Recipe Instance: | ATLMMG_Gs_Constant_Default |
Number of Recipe elements: | 4 |
ATLMMG_Gs_AfterDiDelay | MPosR | Sequence pause length after Distribution start has been triggered | 2.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_AfterMxDelay | MPosR | Sequence pause length after Mixer start has been triggered | 2.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_AtmPressHLim | MPosR | PT0x01 - H limit to reject wrong atmospheric pressure values | 1100.0 | mbar | 0.0 | 1500.0 |
ATLMMG_Gs_AtmPressLLim | MPosR | PT0x01 - L limit to reject wrong atmospheric pressure values | 900.0 | mbar | 0.0 | 1000.0 |
Recipe Instance: | ATLMMG_Gs_Relevant_Default |
Number of Recipe elements: | 8 |
ATLMMG_Gs_MxGlbRelev | ManReg01 | Mixer Module is relevant for global operation | TRUE | - | - | - |
ATLMMG_Gs_DiGlbRelev | ManReg01 | Distribution Module is relevant for global operation | TRUE | - | - | - |
ATLMMG_Gs_AnL1GlbRelev | ManReg01 | AnalysisL1 Module is relevant for global operation | FALSE | - | - | - |
ATLMMG_Gs_AnL2GlbRelev | ManReg01 | AnalysisL2 Module is relevant for global operation | FALSE | - | - | - |
ATLMMG_Gs_MxDSSRelev | ManReg01 | Mixer Module is relvant for DSS (ready for physics) signal | TRUE | - | - | - |
ATLMMG_Gs_DiDSSRelev | ManReg01 | Dsitribution Module is relevant for DSS (ready for physics) signal | TRUE | - | - | - |
ATLMMG_Gs_AnL1DSSRelev | ManReg01 | AnalysisL1 Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
ATLMMG_Gs_AnL2DSSRelev | ManReg01 | AnalysisL2 Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
Recipe Instance: | ATLMMG_Gs_Parameter_Default |
Number of Recipe elements: | 1 |
ATLMMG_Gs_GasLIntPeriod | MPosR | Gas loss integration reset timeout | 24.0 | h | 0.0 | 100000.0 |
Recipe Instance: | ATLMMG_Gs_Alarm_Default |
Number of Recipe elements: | 15 |
ATLMMG_Gs_AlarmStopTOTP | MPosR | Pump, Distribution in Stop, Exhaust not in Run alarms delay | 2.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_MxNotInRunDt | MPosR | Mixer not in Run alarm delay | 0.1 | h | 0.0 | 100000.0 |
ATLMMG_Gs_MxNotInCompDt | MPosR | Mixer not in compliant state alarm delay | 30.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_DeviceDt | MPosR | Profibus communication alarm delay | 3.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_PSAADt | MPosR | Power supply module alarm delay | 60.0 | s | 0.0 | 100000.0 |
ATLMMG_Gs_OpMxReqFlag | ManReg01 | Mixer not in compliant state alarm enabling (1:enabled, 0:ignored) | TRUE | - | - | - |
ATLMMG_Gs_PS24VSurIAA | HH | Surface 24VDC power supply module current consumption too high | 25 | - | - | - |
ATLMMG_Gs_PS24VCavIAA | HH | Cavern 24VDC power supply module current consumption too high | 25 | - | - | - |
ATLMMG_Gs_PS18VCavIAA | HH | Cavern 18VDC power supply module current consumption too high | 25 | - | - | - |
ATLMMG_Gs_PS18VCavVAA | HH | Cavern 18VDC power supply module voltage level alarm | 21 | - | - | - |
ATLMMG_Gs_PS18VCavVAA | LL | Cavern 18VDC power supply module voltage level alarm | 15 | - | - | - |
ATLMMG_Gs_Wg1ErrCtAA | HH | Gas System wago surface profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Gs_Wg1ErrCtAA | H | Gas System wago surface profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Gs_Wg2ErrCtAA | HH | Gas System wago underground profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Gs_Wg2ErrCtAA | H | Gas System wago underground profibus communication error counter Alarm | 3 | - | - | - |
Recipe Instance: | ATLMMG_An_L1Selection_Default |
Number of Recipe elements: | 3 |
ATLMMG_An_L1LC9102WP | MPosR | YV9102/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) | 4 | | 0 | 65535 |
ATLMMG_An_L1SC9102WP | MPosR | YV9102/x - (Sample All) Short cycle source selection (Bit pattern, edit from panel) | 4 | | 0 | 65535 |
ATLMMG_An_L1Jmp9102WP | MPosR | YV9102/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) | 0 | | 0 | 65535 |
Recipe Instance: | ATLMMG_An_L1Alarm_Default |
Number of Recipe elements: | 30 |
ATLMMG_An_L1AlarmDt | MPosR | XANA9116,17,18,19 - Concentrations alarm delays | 0.1 | min | 0.0 | 500.0 |
ATLMMG_An_L1MeasNotOkDt | MPosR | PT9115 - Not enough pressure for measurements alarm delay | 1.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1MeasNotOkL | MPosR | PT9115 - Not enough pressure for measurements L alarm threshold | 10.0 | mbar | -20.0 | 20.0 |
ATLMMG_An_L1MeasNotOkLL | MPosR | PT9115 - Not enough pressure for measurements LL alarm threshold | 5.0 | mbar | -20.0 | 20.0 |
ATLMMG_An_L1Sr141GasAA | HH | XANA9119 - Source 141 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr141GasAA | H | XANA9119 - Source 141 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr141GasAA | L | XANA9119 - Source 141 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr141GasAA | LL | XANA9119 - Source 141 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr142GasAA | HH | XANA9119 - Source 142 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr142GasAA | H | XANA9119 - Source 142 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr142GasAA | L | XANA9119 - Source 142 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr142GasAA | LL | XANA9119 - Source 142 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr143GasAA | HH | XANA9119 - Source 143 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr143GasAA | H | XANA9119 - Source 143 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr143GasAA | L | XANA9119 - Source 143 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr143GasAA | LL | XANA9119 - Source 143 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr144GasAA | HH | XANA9119 - Source 144 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr144GasAA | H | XANA9119 - Source 144 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr144GasAA | L | XANA9119 - Source 144 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr144GasAA | LL | XANA9119 - Source 144 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr145GasAA | HH | XANA9119 - Source 145 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr145GasAA | H | XANA9119 - Source 145 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr145GasAA | L | XANA9119 - Source 145 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr145GasAA | LL | XANA9119 - Source 145 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr146GasAA | HH | XANA9119 - Source 146 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr146GasAA | H | XANA9119 - Source 146 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr146GasAA | L | XANA9119 - Source 146 gas concentration alarm | logic | - | - | - |
ATLMMG_An_L1Sr146GasAA | LL | XANA9119 - Source 146 gas concentration alarm | logic | - | - | - |
ATLMMG_An_Wg1ErrCtAA | HH | Gas System wago chain 1 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_An_Wg1ErrCtAA | H | Gas System wago chain 1 profibus communication error counter Alarm | 3 | - | - | - |
Recipe Instance: | ATLMMG_An_L1Constant_Default |
Number of Recipe elements: | 11 |
ATLMMG_An_L1LCycleRate | MPosR | Line1 (Sample All) Long cycle length | 5.0 | day | 0.0 | 500.0 |
ATLMMG_An_L1Sr141Flush | MPosR | YV9102/1 - Argon source 141 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1Sr142Flush | MPosR | YV9102/2 - IR Calibration source 142 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1Sr143Flush | MPosR | YV9102/3 - Mixer Output source 143 purge time | 0.1 | min | 0.0 | 500.0 |
ATLMMG_An_L1Sr144Flush | MPosR | YV9102/4 - spare source 144 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1Sr145Flush | MPosR | YV9102/5 - spare source 145 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1Sr146Flush | MPosR | YV9102/6 - spare source 146 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L1SampleTime | MPosR | Line1 measurment sample time | 120.0 | s | 0.0 | 1000.0 |
ATLMMG_An_L1CyAllPause | MPosR | Line1 (Sample All) Cycle Pause | 0.01 | min | 0.0 | 500.0 |
ATLMMG_An_L1CyOnePause | MPosR | Line1 (Sample One) Cycle Pause | 0.01 | min | 0.0 | 500.0 |
ATLMMG_An_L1IRFulScAP | MPosR | XANA9119 - IR gas meter full scale | 20.0 | % | 0.0 | 100.0 |
Recipe Instance: | ATLMMG_An_L2Selection_Default |
Number of Recipe elements: | 6 |
ATLMMG_An_L2LC9202WP | MPosR | YV9202/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) | 0 | | 0 | 65535 |
ATLMMG_An_L2SC9202WP | MPosR | YV9202/x - (Sample All) Short cycle source selection (Bit pattern, edit from panel) | 3 | | 0 | 65535 |
ATLMMG_An_L2LC9209WP | MPosR | YV9209/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) | 5 | | 0 | 65535 |
ATLMMG_An_L2Jmp9202WP | MPosR | YV9202/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) | 0 | | 0 | 65535 |
ATLMMG_An_L2Jmp9209WP | MPosR | YV9209/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) | 1 | | 0 | 65535 |
ATLMMG_An_L2SC9209WP | MPosR | YV9209/x - (Sample/Jump All) Short cycle source selection (Bit pattern, edit from panel) | 0 | | 0 | 65535 |
Recipe Instance: | ATLMMG_An_L2Param_Default |
Number of Recipe elements: | 1 |
ATLMMG_An_L2InhibExtF | ManReg01 | Line2 external requests inhibit parameter (1=Inhibit, 0=Allowed) | FALSE | - | - | - |
Recipe Instance: | ATLMMG_An_L2Alarm_Default |
Number of Recipe elements: | 50 |
ATLMMG_An_L2AlarmDt | MPosR | XANA9216,17,18,19 - Concentrations alarm delays | 0.2 | min | 0.0 | 500.0 |
ATLMMG_An_L2MeasNotOkDt | MPosR | PT9215 - Not enough pressure for measurements alarm delay | 1.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2MeasNotOkL | MPosR | PT9215 - Not enough pressure for measurements L alarm threshold | -10.0 | mbar | -20.0 | 20.0 |
ATLMMG_An_L2MeasNotOkLL | MPosR | PT9215 - Not enough pressure for measurements LL alarm threshold | -20.0 | mbar | -20.0 | 20.0 |
ATLMMG_An_L2Sr181H2OAA | HH | XANA9217 - Source 181 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr181H2OAA | H | XANA9217 - Source 181 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr181H2OAA | L | XANA9217 - Source 181 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr181H2OAA | LL | XANA9217 - Source 181 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr182H2OAA | HH | XANA9217 - Source 182 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr182H2OAA | H | XANA9217 - Source 182 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr182H2OAA | L | XANA9217 - Source 182 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr182H2OAA | LL | XANA9217 - Source 182 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr183H2OAA | HH | XANA9217 - Source 183 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr183H2OAA | H | XANA9217 - Source 183 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr183H2OAA | L | XANA9217 - Source 183 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr183H2OAA | LL | XANA9217 - Source 183 H2O alarm | | - | - | - |
ATLMMG_An_L2Sr181O2AA | HH | XANA9218 - Source 181 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr181O2AA | H | XANA9218 - Source 181 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr181O2AA | L | XANA9218 - Source 181 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr181O2AA | LL | XANA9218 - Source 181 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr182O2AA | HH | XANA9218 - Source 182 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr182O2AA | H | XANA9218 - Source 182 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr182O2AA | L | XANA9218 - Source 182 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr182O2AA | LL | XANA9218 - Source 182 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr183O2AA | HH | XANA9218 - Source 183 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr183O2AA | H | XANA9218 - Source 183 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr183O2AA | L | XANA9218 - Source 183 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr183O2AA | LL | XANA9218 - Source 183 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr141H2OAA | HH | XANA9217 - Source 141 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr141H2OAA | H | XANA9217 - Source 141 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr141H2OAA | L | XANA9217 - Source 141 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr141H2OAA | LL | XANA9217 - Source 141 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr142H2OAA | HH | XANA9217 - Source 142 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr142H2OAA | H | XANA9217 - Source 142 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr142H2OAA | L | XANA9217 - Source 142 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr142H2OAA | LL | XANA9217 - Source 142 H2O alarm | logic | - | - | - |
ATLMMG_An_L2Sr141O2AA | HH | XANA9218 - Source 141 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr141O2AA | H | XANA9218 - Source 141 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr141O2AA | L | XANA9218 - Source 141 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr141O2AA | LL | XANA9218 - Source 141 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr142O2AA | HH | XANA9218 - Source 142 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr142O2AA | H | XANA9218 - Source 142 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr142O2AA | L | XANA9218 - Source 142 O2 alarm | logic | - | - | - |
ATLMMG_An_L2Sr142O2AA | LL | XANA9218 - Source 142 O2 alarm | logic | - | - | - |
ATLMMG_An_L2PT9230AA | HH | PT9230 - Analysis 2 input pressure alarm | 100 | - | - | - |
ATLMMG_An_L2PT9230AA | H | PT9230 - Analysis 2 input pressure alarm | 50 | - | - | - |
ATLMMG_An_L2PT9230AA | L | PT9230 - Analysis 2 input pressure alarm | -50 | - | - | - |
ATLMMG_An_L2PT9230AA | LL | PT9230 - Analysis 2 input pressure alarm | -100 | - | - | - |
ATLMMG_An_Wg2ErrCtAA | HH | Gas System wago chain 2 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_An_Wg2ErrCtAA | H | Gas System wago chain 2 profibus communication error counter Alarm | 3 | - | - | - |
Recipe Instance: | ATLMMG_An_L1Param_Default |
Number of Recipe elements: | 2 |
ATLMMG_An_L1InhibExtF | ManReg01 | Line1 external requests inhibit parameter (1=Inhibit, 0=Allowed) | FALSE | - | - | - |
ATLMMG_An_L1GasConcF | ManReg01 | XANA9119 - Line1 gas concentration interlock to gas system (0=Disabled, 1=Enabled) | FALSE | - | - | - |
Recipe Instance: | ATLMMG_An_L2Constant_Default |
Number of Recipe elements: | 10 |
ATLMMG_An_L2LCycleRate | MPosR | Line2 (Sample All) Long cycle length | 5.0 | day | 0.0 | 500.0 |
ATLMMG_An_L2Sr141Flush | MPosR | YV9202/1 - return Rack 61 source 141 purge time | 120.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2Sr142Flush | MPosR | YV9202/2 - return Rack 62 source 142 purge time | 120.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2Sr181Flush | MPosR | YV9209/1 - Argon source 181 purge time | 60.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2Sr182Flush | MPosR | YV9209/2 - Argon+100ppm H2O source 182 purge time | 30.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2Sr183Flush | MPosR | YV9209/3 - Supply gas source 183 purge time | 2.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2SampleTime | MPosR | Line2 measurment sample time | 30.0 | s | 0.0 | 1000.0 |
ATLMMG_An_L2CyAllPause | MPosR | Line2 (Sample All) Cycle Pause | 1.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2CyOnePause | MPosR | Line2 (Sample One) Cycle Pause | 10.0 | min | 0.0 | 500.0 |
ATLMMG_An_L2O2FulScAP | MPosR | XANA9218 - O2 meter full scale | 0 | ppm | 0 | 99999 |
Recipe Instance: | ATLMMG_Di_FlowCell_Default |
Number of Recipe elements: | 4 |
ATLMMG_Di_FCRck61Cmd1WP | MPosR | Rack 61 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
ATLMMG_Di_FCRck61Cmd2WP | MPosR | Rack 61 flow cell selection (Bit pattern: Edit from panel!) | 0 | | 0 | 65535 |
ATLMMG_Di_FCRck62Cmd1WP | MPosR | Rack 62 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
ATLMMG_Di_FCRck62Cmd2WP | MPosR | Rack 62 flow cell selection (Bit pattern: Edit from panel!) | 0 | | 0 | 65535 |
Recipe Instance: | ATLMMG_Di_Volume_Default |
Number of Recipe elements: | 32 |
ATLMMG_Di_Chan1Vol61 | MPosR | Rack 61 channel 1 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan2Vol61 | MPosR | Rack 61 channel 2 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan3Vol61 | MPosR | Rack 61 channel 3 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan4Vol61 | MPosR | Rack 61 channel 4 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan5Vol61 | MPosR | Rack 61 channel 5 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan6Vol61 | MPosR | Rack 61 channel 6 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan7Vol61 | MPosR | Rack 61 channel 7 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan8Vol61 | MPosR | Rack 61 channel 8 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan9Vol61 | MPosR | Rack 61 channel 9 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan10Vol61 | MPosR | Rack 61 channel 10 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan11Vol61 | MPosR | Rack 61 channel 11 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan12Vol61 | MPosR | Rack 61 channel 12 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan13Vol61 | MPosR | Rack 61 channel 13 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan14Vol61 | MPosR | Rack 61 channel 14 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan15Vol61 | MPosR | Rack 61 channel 15 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan16Vol61 | MPosR | Rack 61 channel 16 volume | 0.05 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan1Vol62 | MPosR | Rack 62 channel 1 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan2Vol62 | MPosR | Rack 62 channel 2 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan3Vol62 | MPosR | Rack 62 channel 3 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan4Vol62 | MPosR | Rack 62 channel 4 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan5Vol62 | MPosR | Rack 62 channel 5 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan6Vol62 | MPosR | Rack 62 channel 6 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan7Vol62 | MPosR | Rack 62 channel 7 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan8Vol62 | MPosR | Rack 62 channel 8 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan9Vol62 | MPosR | Rack 62 channel 9 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan10Vol62 | MPosR | Rack 62 channel 10 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan11Vol62 | MPosR | Rack 62 channel 11 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan12Vol62 | MPosR | Rack 62 channel 12 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan13Vol62 | MPosR | Rack 62 channel 13 volume | 0.16 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan14Vol62 | MPosR | Rack 62 channel 14 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan15Vol62 | MPosR | Rack 62 channel 15 volume | 0.24 | m3 | 0.0 | 120000.0 |
ATLMMG_Di_Chan16Vol62 | MPosR | Rack 62 channel 16 volume | 0.24 | m3 | 0.0 | 120000.0 |
Recipe Instance: | ATLMMG_Di_Constant_Default |
Number of Recipe elements: | 13 |
ATLMMG_Di_rack61PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure H threshold | 90.0 | mbar | 0.0 | 100.0 |
ATLMMG_Di_rack62PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure H threshold | 74.0 | mbar | 0.0 | 100.0 |
ATLMMG_Di_rack61PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure L threshold | 35.0 | mbar | 0.0 | 100.0 |
ATLMMG_Di_rack62PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure L threshold | 35.0 | mbar | 0.0 | 100.0 |
ATLMMG_Di_RackTOTP | MPosR | Isolation valves operation sequence delay | 0.0 | s | 0.0 | 20.0 |
ATLMMG_Di_rackCAirDelay | MPosR | Racks starting sequence delay | 1000.0 | ms | 0.0 | 1500.0 |
ATLMMG_Di_SignFlowLim | MPosR | (RunNotReady) Significant flows threshold | 100.0 | % | 0.0 | 20000.0 |
ATLMMG_Di_EPS | MPosR | Racks Ready/Not Ready transition hysteresis parameter | 0.3 | mbar | 0.0 | 4.0 |
ATLMMG_Di_SmallFlLimit | MPosR | Minimum significant flow limit to calculate racks total flow stabilization | 300.0 | l/h | 0.0 | 20000.0 |
ATLMMG_Di_Rack61Sel | ManReg01 | Rack 61 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
ATLMMG_Di_Rack62Sel | ManReg01 | Rack 62 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
ATLMMG_Di_CriticGasDP | ManReg01 | Critical gas loss (1=Critical, 0=Not critical) | FALSE | - | - | - |
ATLMMG_Di_SignFlow | ManReg01 | (RunNotReady) significant flow condition relevant for rack operation (1=Relevant, 0=NOT relevant) | FALSE | - | - | - |
Recipe Instance: | ATLMMG_Di_Alarm_Default |
Number of Recipe elements: | 42 |
ATLMMG_Di_BackUpAlTOTP | MPosR | PT5509, PSL5508 - Backup low pressure alarms delay | 30.0 | s | 0.0 | 300.0 |
ATLMMG_Di_DeviceDt | MPosR | Profibus communication alarm delay | 3.0 | s | 0.0 | 15.0 |
ATLMMG_Di_PresAlTOTP | MPosR | PTxx24, PTxx25, PTxx26, PTxx04, PDTxx25 - Pressure alarms delay | 5.0 | s | 0.0 | 30.0 |
ATLMMG_Di_AlmDATOTP | MPosR | Racks state related alarms delay | 5.0 | s | 0.0 | 300.0 |
ATLMMG_Di_ChGAlHH | MPosR | Channels gas loss HH alarms threshold | 40.0 | % | -200.0 | 200.0 |
ATLMMG_Di_ChGAlTOTP | MPosR | Channels gas loss alarms delay | 60.0 | s | 0.0 | 99999.0 |
ATLMMG_Di_ChamPRegAALL | MPosR | PTxx04 - chamber pressure LL alarm threshold | 0.0 | mbar | 0.0 | 40.0 |
ATLMMG_Di_ChamPRegAAL | MPosR | PTxx04 - chamber pressure L alarm threshold | 0.5 | mbar | 0.0 | 40.0 |
ATLMMG_Di_ChamPRegAAH | MPosR | PTxx04 - chamber pressure H alarm threshold | 5.0 | mbar | 0.0 | 40.0 |
ATLMMG_Di_ChamPRegAAHH | MPosR | PTxx04 - chamber pressure HH alarm threshold | 6.0 | mbar | 0.0 | 40.0 |
ATLMMG_Di_StartupALDt | MPosR | Channels gas loss alarms delay | 0.5 | h | 0.0 | 99999.0 |
ATLMMG_Di_FCRckErrAADt | MPosR | Distribution racks flowcell error alarm delay time | 3600.0 | s | 0.0 | 20000.0 |
ATLMMG_Di_ChGAlH | MPosR | Channels gas loss H alarms threshold | 0 | % | -200 | 200 |
ATLMMG_Di_ChGAlL | MPosR | Channels gas loss L alarms threshold | 0 | % | -200 | 200 |
ATLMMG_Di_61InPresAl | HH | PTxx24 - Rack 61 input pressure alarm | 20 | - | - | - |
ATLMMG_Di_61InPresAl | H | PTxx24 - Rack 61 input pressure alarm | 10 | - | - | - |
ATLMMG_Di_61InPresAl | L | PTxx24 - Rack 61 input pressure alarm | 5 | - | - | - |
ATLMMG_Di_61InPresAl | LL | PTxx24 - Rack 61 input pressure alarm | 2 | - | - | - |
ATLMMG_Di_62InPresAl | HH | PTxx24 - Rack 62 input pressure alarm | 20 | - | - | - |
ATLMMG_Di_62InPresAl | H | PTxx24 - Rack 62 input pressure alarm | 10 | - | - | - |
ATLMMG_Di_62InPresAl | L | PTxx24 - Rack 62 input pressure alarm | 5 | - | - | - |
ATLMMG_Di_62InPresAl | LL | PTxx24 - Rack 62 input pressure alarm | 2 | - | - | - |
ATLMMG_Di_Wg1ErrCtAA | HH | Distribution wago 1 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Di_Wg1ErrCtAA | H | Distribution wago 1 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Di_Wg2ErrCtAA | HH | Distribution wago 2 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Di_Wg2ErrCtAA | H | Distribution wago 2 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Di_FC61Err1CtAA | HH | Distribution Rack 61 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC61Err1CtAA | H | Distribution Rack 61 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC62Err1CtAA | HH | Distribution Rack 62 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC62Err1CtAA | H | Distribution Rack 62 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC61Err2CtAA | HH | Distribution Rack 61 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC61Err2CtAA | H | Distribution Rack 61 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC62Err2CtAA | HH | Distribution Rack 62 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC62Err2CtAA | H | Distribution Rack 62 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC61Err3CtAA | HH | Distribution Rack 61 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC61Err3CtAA | H | Distribution Rack 61 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC62Err3CtAA | HH | Distribution Rack 62 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC62Err3CtAA | H | Distribution Rack 62 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC61Err4CtAA | HH | Distribution Rack 61 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC61Err4CtAA | H | Distribution Rack 61 ELMB node error counter alarm | 3 | - | - | - |
ATLMMG_Di_FC62Err4CtAA | HH | Distribution Rack 62 ELMB node error counter alarm | 6 | - | - | - |
ATLMMG_Di_FC62Err4CtAA | H | Distribution Rack 62 ELMB node error counter alarm | 3 | - | - | - |
Recipe Instance: | ATLMMG_Mx_Alarm_Default |
Number of Recipe elements: | 70 |
ATLMMG_Mx_L1FlowFuRuLL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow LL alarm threshold | 6.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1FlowFuRuL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow L alarm threshold | 4.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1FlowFsRsLL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow LL alarm threshold | 4.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1FlowFsRsL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow L alarm threshold | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1NotRelLL | MPosR | XMFC1106 - Flow not reliable LL alarm threshold | 0.6 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2NotRelLL | MPosR | XMFC1206 - Flow not reliable LL alarm threshold | 0.6 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3NotRelLL | MPosR | XMFC1306 - Flow not reliable LL alarm threshold | 0.6 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1NotRelL | MPosR | XMFC1106 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2NotRelL | MPosR | XMFC1206 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3NotRelL | MPosR | XMFC1306 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1NotRelH | MPosR | XMFC1106 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L2NotRelH | MPosR | XMFC1206 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L3NotRelH | MPosR | XMFC1306 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L1NotRelHH | MPosR | XMFC1106 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L2NotRelHH | MPosR | XMFC1206 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L3NotRelHH | MPosR | XMFC1306 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ATLMMG_Mx_L1NotRelDt | MPosR | XMFC1106 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_L2NotRelDt | MPosR | XMFC1206 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_L3NotRelDt | MPosR | XMFC1306 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_L1PressLL | MPosR | PT1103 - Low pressure LL alarm threshold | 1.2 | bar | 0.0 | 100.0 |
ATLMMG_Mx_L2PressLL | MPosR | PT1203 - Low pressure LL alarm threshold | 1.2 | bar | 0.0 | 100.0 |
ATLMMG_Mx_L3PressLL | MPosR | PT1303 - Low pressure LL alarm threshold | 1.2 | bar | 0.0 | 100.0 |
ATLMMG_Mx_L1PressL | MPosR | PT1103 - Low pressure L alarm threshold | 1.5 | bar | 0.0 | 10.0 |
ATLMMG_Mx_L2PressL | MPosR | PT1203 - Low pressure L alarm threshold | 1.5 | bar | 0.0 | 10.0 |
ATLMMG_Mx_L3PressL | MPosR | PT1303 - Low pressure L alarm threshold | 1.5 | bar | 0.0 | 10.0 |
ATLMMG_Mx_L1PressDt | MPosR | PT1103 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ATLMMG_Mx_L2PressDt | MPosR | PT1203 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ATLMMG_Mx_L3PressDt | MPosR | PT1303 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ATLMMG_Mx_L1RRegUnLH | MPosR | Line 1 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2RRegUnLH | MPosR | Line 2 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3RRegUnLH | MPosR | Line 3 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1RRegStLLHH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2RRegStLLHH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3RRegStLLHH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 0.4 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1RRegStLH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2RRegStLH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3RRegStLH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 0.3 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1RRegDt | MPosR | Line 1 - (Fill/Run) Ratio regulation alarm delay | 90.0 | s | 0.0 | 100.0 |
ATLMMG_Mx_L2RRegDt | MPosR | Line 2 - (Fill/Run) Ratio regulation alarm delay | 90.0 | s | 0.0 | 100.0 |
ATLMMG_Mx_L3RRegDt | MPosR | Line 3 - (Fill/Run) Ratio regulation alarm delay | 90.0 | s | 0.0 | 100.0 |
ATLMMG_Mx_L1FRegPsLL | MPosR | Line 1 - (Purge Stable) Flow regulation LL alarm threshold | -10.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L2FRegPsLL | MPosR | Line 2 - (Purge Stable) Flow regulation LL alarm threshold | -10.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L3FRegPsLL | MPosR | Line 3 - (Purge Stable) Flow regulation LL alarm threshold | -10.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L1FRegPsL | MPosR | Line 1 - (Purge Stable) Flow regulation L alarm threshold | -5.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L2FRegPsL | MPosR | Line 2 - (Purge Stable) Flow regulation L alarm threshold | -5.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L3FRegPsL | MPosR | Line 3 - (Purge Stable) Flow regulation L alarm threshold | -5.0 | % | -100.0 | 0.0 |
ATLMMG_Mx_L1FRegDsLLHH | MPosR | Line 1 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2FRegDsLLHH | MPosR | Line 2 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3FRegDsLLHH | MPosR | Line 3 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1FRegDsLH | MPosR | Line 1 - (Direct Stable) Flow regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2FRegDsLH | MPosR | Line 2 - (Direct Stable) Flow regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3FRegDsLH | MPosR | Line 3 - (Direct Stable) Flow regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ATLMMG_Mx_FlowDt | MPosR | All lines - Flow regulation alarm delay | 2.0 | min | 0.0 | 60.0 |
ATLMMG_Mx_DeviceDt | MPosR | Profibus communication alarm delay | 5.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_ExtFlamGasDt | MPosR | ZSH9119 - External HW interlock alarm delay | 60.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_WrongFlowHH | MPosR | Flow on XMFC detected when XMFC not selected for operation | 30 | s | 0.0 | 500.0 |
ATLMMG_Mx_Wg1ErrCtAA | HH | Mixer Wago 1 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_Wg1ErrCtAA | H | Mixer Wago 1 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1109ErrCtAA | HH | Mixer XMFC1109 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1109ErrCtAA | H | Mixer XMFC1109 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1209ErrCtAA | HH | Mixer XMFC1209 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1209ErrCtAA | H | Mixer XMFC1209 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1309ErrCtAA | HH | Mixer XMFC1309 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1309ErrCtAA | H | Mixer XMFC1309 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1106ErrCtAA | HH | Mixer XMFC1106 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1106ErrCtAA | H | Mixer XMFC1106 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1206ErrCtAA | HH | Mixer XMFC1206 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1206ErrCtAA | H | Mixer XMFC1206 profibus communication error counter Alarm | 3 | - | - | - |
ATLMMG_Mx_X1306ErrCtAA | HH | Mixer XMFC1306 profibus communication error counter Alarm | 6 | - | - | - |
ATLMMG_Mx_X1306ErrCtAA | H | Mixer XMFC1306 profibus communication error counter Alarm | 3 | - | - | - |
Recipe Instance: | ATLMMG_Mx_Parameter_Default |
Number of Recipe elements: | 67 |
ATLMMG_Mx_L1LFPurCur | MPosR | XMFC1106 - (Purge) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
ATLMMG_Mx_L1HFPurCur | MPosR | XMFC1109 - (Purge) Line 1 calibration curve for high flow | 0 | | 0 | 1 |
ATLMMG_Mx_L1HighFlCur | MPosR | XMFC1109 - (Fill/Run/Direct) Line 1 calibration curve for high flow | 0 | | 0 | 1 |
ATLMMG_Mx_L2HighFlCur | MPosR | XMFC1209 - (Fill/Run/Direct) Line 2 calibration curve for high flow | 0 | | 0 | 1 |
ATLMMG_Mx_L3HighFlCur | MPosR | XMFC1309 - (Fill/Run/Direct) Line 3 calibration curve for high flow | 0 | | 0 | 1 |
ATLMMG_Mx_L1LowFlCur | MPosR | XMFC1106 - (Fill/Run/Direct) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
ATLMMG_Mx_L2LowFlCur | MPosR | XMFC1206 - (Fill/Run/Direct) Line 2 calibration curve for low flow | 0 | | 0 | 1 |
ATLMMG_Mx_L3LowFlCur | MPosR | XMFC1306 - (Fill/Run/Direct) Line 3 calibration curve for low flow | 0 | | 0 | 1 |
ATLMMG_Mx_SmallFlow | MPosR | Small flows threshold (values ignored if below) | 1.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L1FillFlowSp | MPosR | (Fill) Line 1 (master) flow setpoint | 50.0 | l/h | 0.0 | 1400.0 |
ATLMMG_Mx_L1PurgeFlowSp | MPosR | (Purge) Line 1 flow setpoint | 100.0 | l/h | 0.0 | 10200.0 |
ATLMMG_Mx_L1RunFlowSp | MPosR | (Run) Line 1 (master) flow setpoint | 1900.0 | l/h | 0.0 | 1950.0 |
ATLMMG_Mx_L1DirFlowSp | MPosR | (Direct) Line 1 flow setpoint | 50.0 | l/h | 0.0 | 10200.0 |
ATLMMG_Mx_L2PurgeFlowSp | MPosR | (Purge) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
ATLMMG_Mx_L3PurgeFlowSp | MPosR | (Purge) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
ATLMMG_Mx_L2DirFlowSp | MPosR | (Direct) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
ATLMMG_Mx_L3DirFlowSp | MPosR | (Direct) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
ATLMMG_Mx_L2FillRatioSp | MPosR | (Fill) Line 2 (slave) ratio regulation setpoint | 5.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3FillRatioSp | MPosR | (Fill) Line 3 (slave) ratio regulation setpoint | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L2RunRatioSp | MPosR | (Run) Line 2 (slave) ratio regulation setpoint | 5.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_L3RunRatioSp | MPosR | (Run) Line 3 (slave) ratio regulation setpoint | 2.0 | % | 0.0 | 100.0 |
ATLMMG_Mx_CN1206StUpKc | MPosR | CN1206 - Kc for XMFC1206 flow regulation Start-Up | 0.2 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306StUpKc | MPosR | CN1306 - Kc for XMFC1306 flow regulation Start-Up | 5.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206StUpTi | MPosR | CN1206 - Ti for XMFC1206 flow regulation Start-Up | 2.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306StUpTi | MPosR | CN1306 - Ti for XMFC1306 flow regulation Start-Up | 2.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206StUpTd | MPosR | CN1206 - Td for XMFC1206 flow regulation Start-Up | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306StUpTd | MPosR | CN1306 - Td for XMFC1306 flow regulation Start-Up | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206StUpTds | MPosR | CN1206 - Tds for XMFC1206 flow regulation Start-Up | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306StUpTds | MPosR | CN1306 - Tds for XMFC1306 flow regulation Start-Up | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209StUpKc | MPosR | CN1209 - Kc for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309StUpKc | MPosR | CN1309 - Kc for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209StUpTi | MPosR | CN1209 - Ti for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309StUpTi | MPosR | CN1309 - Ti for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209StUpTd | MPosR | CN1209 - Td for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309StUpTd | MPosR | CN1309 - Td for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209StUpTds | MPosR | CN1209 - Tds for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309StUpTds | MPosR | CN1309 - Tds for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206RunKc | MPosR | CN1206 - Kc for XMFC1206 flow regulation Run | 0.2 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306RunKc | MPosR | CN1306 - Kc for XMFC1306 flow regulation Run | 5.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206RunTi | MPosR | CN1206 - Ti for XMFC1206 flow regulation Run | 2.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306RunTi | MPosR | CN1306 - Ti for XMFC1306 flow regulation Run | 2.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206RunTd | MPosR | CN1206 - Td for XMFC1206 flow regulation Run | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306RunTd | MPosR | CN1306 - Td for XMFC1306 flow regulation Run | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1206RunTds | MPosR | CN1206 - Tds for XMFC1206 flow regulation Run | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1306RunTds | MPosR | CN1306 - Tds for XMFC1306 flow regulation Run | 0.0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209RunKc | MPosR | CN1209 - Kc for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309RunKc | MPosR | CN1309 - Kc for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209RunTi | MPosR | CN1209 - Ti for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309RunTi | MPosR | CN1309 - Ti for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209RunTd | MPosR | CN1209 - Td for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309RunTd | MPosR | CN1309 - Td for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1209RunTds | MPosR | CN1209 - Tds for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_CN1309RunTds | MPosR | CN1309 - Tds for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ATLMMG_Mx_L1FillLF | ManReg01 | (Fill) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
ATLMMG_Mx_L2FillLF | ManReg01 | (Fill) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
ATLMMG_Mx_L3FillLF | ManReg01 | (Fill) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
ATLMMG_Mx_L1PurgeLF | ManReg01 | (Purge) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
ATLMMG_Mx_L2PurgeLF | ManReg01 | (Purge) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
ATLMMG_Mx_L3PurgeLF | ManReg01 | (Purge) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
ATLMMG_Mx_L1RunLF | ManReg01 | (Run) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
ATLMMG_Mx_L2RunLF | ManReg01 | (Run) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | TRUE | - | - | - |
ATLMMG_Mx_L3RunLF | ManReg01 | (Run) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
ATLMMG_Mx_L1DirectLF | ManReg01 | (Direct) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
ATLMMG_Mx_L2DirectLF | ManReg01 | (Direct) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | TRUE | - | - | - |
ATLMMG_Mx_L3DirectLF | ManReg01 | (Direct) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
ATLMMG_Mx_FillComp | ManReg01 | Activation of Fill auto completion (1=transition enabled) | FALSE | - | - | - |
ATLMMG_Mx_PurgeComp | ManReg01 | Activation of Purge auto completion (1=transition enabled) | FALSE | - | - | - |
Recipe Instance: | ATLMMG_Mx_Offset_Default |
Number of Recipe elements: | 7 |
ATLMMG_Mx_TotVolOffset | MPosR | Total volume computation offset | 0.0 | m3 | 0.0 | 100000.0 |
ATLMMG_Mx_RTXMFC1206OfS | MPosR | XMFC1206 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
ATLMMG_Mx_RTXMFC1306OfS | MPosR | XMFC1306 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
ATLMMG_Mx_RTXMFC1209OfS | MPosR | XMFC1209 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ATLMMG_Mx_RTXMFC1309OfS | MPosR | XMFC1309 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ATLMMG_Mx_RTXMFC1106OfS | MPosR | XMFC1106 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
ATLMMG_Mx_RTXMFC1109OfS | MPosR | XMFC1109 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
Recipe Instance: | ATLMMG_Mx_Constant_Default |
Number of Recipe elements: | |
| | Constant Description | | | | |
ATLMMG_Mx_MFCCloseDt | MPosR | Time required to close MFCs | 1.0 | ms | 0.0 | 60.0 |
ATLMMG_Mx_FillingDt | MPosR | Time required to fill pipes in front of MFCs | 1.0 | s | 0.0 | 60.0 |
ATLMMG_Mx_FillStabDt | MPosR | (Fill) Time required to stabilize ratios and flow regulations | 3.0 | min | 0.0 | 60.0 |
ATLMMG_Mx_PurgeStabDt | MPosR | (Purge) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
ATLMMG_Mx_RunStabDt | MPosR | (Run) Time required to stabilize ratio and flows regulations | 3.0 | min | 0.0 | 60.0 |
ATLMMG_Mx_DirectStabDt | MPosR | (Direct) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
ATLMMG_Mx_FillReqVol | MPosR | (Fill) Volume required to complete filling | 20.0 | m3 | 0.0 | 150000.0 |
ATLMMG_Mx_PurgeReqVol | MPosR | (Purge) Volume required to complete purging | 1000.0 | l | 0.0 | 500000.0 |
ATLMMG_Mx_L1LFRamp | MPosR | XMFC1106 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L2LFRamp | MPosR | XMFC1206 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L3LFRamp | MPosR | XMFC1306 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L1HFRamp | MPosR | XMFC1109 - Flow setpoint ramping | 123.4 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L2HFRamp | MPosR | XMFC1209 - Flow setpoint ramping | 123.4 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L3HFRamp | MPosR | XMFC1309 - Flow setpoint ramping | 123.4 | l/hs | 0.0 | 99999.99 |
ATLMMG_Mx_L1MFC6C0FuScl | MPosR | XMFC1106 - Calibration curve 0 full scale | 1950.0 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L1MFC6C1FuScl | MPosR | XMFC1106 - Calibration curve 1 full scale | 123.4 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L2MFC6C0FuScl | MPosR | XMFC1206 - Calibration curve 0 full scale | 300.0 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L3MFC6C0FuScl | MPosR | XMFC1306 - Calibration curve 0 full scale | 44.0 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L1MFC9C0FuScl | MPosR | XMFC1109 - Calibration curve 0 full scale | 123.4 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L1MFC9C1FuScl | MPosR | XMFC1109 - Calibration curve 1 full scale | 123.4 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L2MFC9C0FuScl | MPosR | XMFC1209 - Calibration curve 0 full scale | 123.4 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L3MFC9C0FuScl | MPosR | XMFC1309 - Calibration curve 0 full scale | 123.4 | l/min | 0.0 | 9999.99 |
ATLMMG_Mx_L2LFPidRamp | MPosR | CN1206 - PID Setpoint ramp speed | 50.0 | l/hs | 0.0 | 100.0 |
ATLMMG_Mx_L3LFPidRamp | MPosR | CN1306 - PID Setpoint ramp speed | 50.0 | l/hs | 0.0 | 100.0 |
ATLMMG_Mx_L2HFPidRamp | MPosR | CN1209 - PID Setpoint ramp speed | 50 | l/hs | 0.0 | 100.0 |
ATLMMG_Mx_L3HFPidRamp | MPosR | CN1309 - PID Setpoint ramp speed | 50 | l/hs | 0.0 | 100.0 |