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Recipes List


Generation Information
Project: ATLMMG
Application: ATLMMG
Generation Plug-in: ExtendedConfigGenerator v1.2.3
Generation date: 31/10/2023 15:54:26
User: mquilich
Computer: PCBE17382

Recipes List Table
Recipe Class: ATLMMG_Gs_Constant
Recipe Instance: ATLMMG_Gs_Constant_Default
Number of Recipe elements: 4
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Gs_AfterDiDelay MPosR Sequence pause length after Distribution start has been triggered 2.0 s 0.0 100000.0
ATLMMG_Gs_AfterMxDelay MPosR Sequence pause length after Mixer start has been triggered 2.0 s 0.0 100000.0
ATLMMG_Gs_AtmPressHLim MPosR PT0x01 - H limit to reject wrong atmospheric pressure values 1100.0 mbar 0.0 1500.0
ATLMMG_Gs_AtmPressLLim MPosR PT0x01 - L limit to reject wrong atmospheric pressure values 900.0 mbar 0.0 1000.0
Recipe Class: ATLMMG_Gs_Relevant
Recipe Instance: ATLMMG_Gs_Relevant_Default
Number of Recipe elements: 8
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Gs_MxGlbRelev ManReg01 Mixer Module is relevant for global operation TRUE - - -
ATLMMG_Gs_DiGlbRelev ManReg01 Distribution Module is relevant for global operation TRUE - - -
ATLMMG_Gs_AnL1GlbRelev ManReg01 AnalysisL1 Module is relevant for global operation FALSE - - -
ATLMMG_Gs_AnL2GlbRelev ManReg01 AnalysisL2 Module is relevant for global operation FALSE - - -
ATLMMG_Gs_MxDSSRelev ManReg01 Mixer Module is relvant for DSS (ready for physics) signal TRUE - - -
ATLMMG_Gs_DiDSSRelev ManReg01 Dsitribution Module is relevant for DSS (ready for physics) signal TRUE - - -
ATLMMG_Gs_AnL1DSSRelev ManReg01 AnalysisL1 Module is relevant for DSS (ready for physics) signal FALSE - - -
ATLMMG_Gs_AnL2DSSRelev ManReg01 AnalysisL2 Module is relevant for DSS (ready for physics) signal FALSE - - -
Recipe Class: ATLMMG_Gs_Parameter
Recipe Instance: ATLMMG_Gs_Parameter_Default
Number of Recipe elements: 1
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Gs_GasLIntPeriod MPosR Gas loss integration reset timeout 24.0 h 0.0 100000.0
Recipe Class: ATLMMG_Gs_Alarm
Recipe Instance: ATLMMG_Gs_Alarm_Default
Number of Recipe elements: 15
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Gs_AlarmStopTOTP MPosR Pump, Distribution in Stop, Exhaust not in Run alarms delay 2.0 s 0.0 100000.0
ATLMMG_Gs_MxNotInRunDt MPosR Mixer not in Run alarm delay 0.1 h 0.0 100000.0
ATLMMG_Gs_MxNotInCompDt MPosR Mixer not in compliant state alarm delay 30.0 s 0.0 100000.0
ATLMMG_Gs_DeviceDt MPosR Profibus communication alarm delay 3.0 s 0.0 100000.0
ATLMMG_Gs_PSAADt MPosR Power supply module alarm delay 60.0 s 0.0 100000.0
ATLMMG_Gs_OpMxReqFlag ManReg01 Mixer not in compliant state alarm enabling (1:enabled, 0:ignored) TRUE - - -
ATLMMG_Gs_PS24VSurIAA HH Surface 24VDC power supply module current consumption too high 25 - - -
ATLMMG_Gs_PS24VCavIAA HH Cavern 24VDC power supply module current consumption too high 25 - - -
ATLMMG_Gs_PS18VCavIAA HH Cavern 18VDC power supply module current consumption too high 25 - - -
ATLMMG_Gs_PS18VCavVAA HH Cavern 18VDC power supply module voltage level alarm 21 - - -
ATLMMG_Gs_PS18VCavVAA LL Cavern 18VDC power supply module voltage level alarm 15 - - -
ATLMMG_Gs_Wg1ErrCtAA HH Gas System wago surface profibus communication error counter Alarm 6 - - -
ATLMMG_Gs_Wg1ErrCtAA H Gas System wago surface profibus communication error counter Alarm 3 - - -
ATLMMG_Gs_Wg2ErrCtAA HH Gas System wago underground profibus communication error counter Alarm 6 - - -
ATLMMG_Gs_Wg2ErrCtAA H Gas System wago underground profibus communication error counter Alarm 3 - - -
Recipe Class: ATLMMG_An_L1Selection
Recipe Instance: ATLMMG_An_L1Selection_Default
Number of Recipe elements: 3
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L1LC9102WP MPosR YV9102/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) 4 0 65535
ATLMMG_An_L1SC9102WP MPosR YV9102/x - (Sample All) Short cycle source selection (Bit pattern, edit from panel) 4 0 65535
ATLMMG_An_L1Jmp9102WP MPosR YV9102/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) 0 0 65535
Recipe Class: ATLMMG_An_L1Alarm
Recipe Instance: ATLMMG_An_L1Alarm_Default
Number of Recipe elements: 30
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L1AlarmDt MPosR XANA9116,17,18,19 - Concentrations alarm delays 0.1 min 0.0 500.0
ATLMMG_An_L1MeasNotOkDt MPosR PT9115 - Not enough pressure for measurements alarm delay 1.0 min 0.0 500.0
ATLMMG_An_L1MeasNotOkL MPosR PT9115 - Not enough pressure for measurements L alarm threshold 10.0 mbar -20.0 20.0
ATLMMG_An_L1MeasNotOkLL MPosR PT9115 - Not enough pressure for measurements LL alarm threshold 5.0 mbar -20.0 20.0
ATLMMG_An_L1Sr141GasAA HH XANA9119 - Source 141 gas concentration alarm logic - - -
ATLMMG_An_L1Sr141GasAA H XANA9119 - Source 141 gas concentration alarm logic - - -
ATLMMG_An_L1Sr141GasAA L XANA9119 - Source 141 gas concentration alarm logic - - -
ATLMMG_An_L1Sr141GasAA LL XANA9119 - Source 141 gas concentration alarm logic - - -
ATLMMG_An_L1Sr142GasAA HH XANA9119 - Source 142 gas concentration alarm logic - - -
ATLMMG_An_L1Sr142GasAA H XANA9119 - Source 142 gas concentration alarm logic - - -
ATLMMG_An_L1Sr142GasAA L XANA9119 - Source 142 gas concentration alarm logic - - -
ATLMMG_An_L1Sr142GasAA LL XANA9119 - Source 142 gas concentration alarm logic - - -
ATLMMG_An_L1Sr143GasAA HH XANA9119 - Source 143 gas concentration alarm logic - - -
ATLMMG_An_L1Sr143GasAA H XANA9119 - Source 143 gas concentration alarm logic - - -
ATLMMG_An_L1Sr143GasAA L XANA9119 - Source 143 gas concentration alarm logic - - -
ATLMMG_An_L1Sr143GasAA LL XANA9119 - Source 143 gas concentration alarm logic - - -
ATLMMG_An_L1Sr144GasAA HH XANA9119 - Source 144 gas concentration alarm logic - - -
ATLMMG_An_L1Sr144GasAA H XANA9119 - Source 144 gas concentration alarm logic - - -
ATLMMG_An_L1Sr144GasAA L XANA9119 - Source 144 gas concentration alarm logic - - -
ATLMMG_An_L1Sr144GasAA LL XANA9119 - Source 144 gas concentration alarm logic - - -
ATLMMG_An_L1Sr145GasAA HH XANA9119 - Source 145 gas concentration alarm logic - - -
ATLMMG_An_L1Sr145GasAA H XANA9119 - Source 145 gas concentration alarm logic - - -
ATLMMG_An_L1Sr145GasAA L XANA9119 - Source 145 gas concentration alarm logic - - -
ATLMMG_An_L1Sr145GasAA LL XANA9119 - Source 145 gas concentration alarm logic - - -
ATLMMG_An_L1Sr146GasAA HH XANA9119 - Source 146 gas concentration alarm logic - - -
ATLMMG_An_L1Sr146GasAA H XANA9119 - Source 146 gas concentration alarm logic - - -
ATLMMG_An_L1Sr146GasAA L XANA9119 - Source 146 gas concentration alarm logic - - -
ATLMMG_An_L1Sr146GasAA LL XANA9119 - Source 146 gas concentration alarm logic - - -
ATLMMG_An_Wg1ErrCtAA HH Gas System wago chain 1 profibus communication error counter Alarm 6 - - -
ATLMMG_An_Wg1ErrCtAA H Gas System wago chain 1 profibus communication error counter Alarm 3 - - -
Recipe Class: ATLMMG_An_L1Constant
Recipe Instance: ATLMMG_An_L1Constant_Default
Number of Recipe elements: 11
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L1LCycleRate MPosR Line1 (Sample All) Long cycle length 5.0 day 0.0 500.0
ATLMMG_An_L1Sr141Flush MPosR YV9102/1 - Argon source 141 purge time 30.0 min 0.0 500.0
ATLMMG_An_L1Sr142Flush MPosR YV9102/2 - IR Calibration source 142 purge time 30.0 min 0.0 500.0
ATLMMG_An_L1Sr143Flush MPosR YV9102/3 - Mixer Output source 143 purge time 0.1 min 0.0 500.0
ATLMMG_An_L1Sr144Flush MPosR YV9102/4 - spare source 144 purge time 30.0 min 0.0 500.0
ATLMMG_An_L1Sr145Flush MPosR YV9102/5 - spare source 145 purge time 30.0 min 0.0 500.0
ATLMMG_An_L1Sr146Flush MPosR YV9102/6 - spare source 146 purge time 30.0 min 0.0 500.0
ATLMMG_An_L1SampleTime MPosR Line1 measurment sample time 120.0 s 0.0 1000.0
ATLMMG_An_L1CyAllPause MPosR Line1 (Sample All) Cycle Pause 0.01 min 0.0 500.0
ATLMMG_An_L1CyOnePause MPosR Line1 (Sample One) Cycle Pause 0.01 min 0.0 500.0
ATLMMG_An_L1IRFulScAP MPosR XANA9119 - IR gas meter full scale 20.0 % 0.0 100.0
Recipe Class: ATLMMG_An_L2Selection
Recipe Instance: ATLMMG_An_L2Selection_Default
Number of Recipe elements: 6
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L2LC9202WP MPosR YV9202/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) 0 0 65535
ATLMMG_An_L2SC9202WP MPosR YV9202/x - (Sample All) Short cycle source selection (Bit pattern, edit from panel) 3 0 65535
ATLMMG_An_L2LC9209WP MPosR YV9209/x - (Sample All) Long cycle source selection (Bit pattern, edit from panel) 5 0 65535
ATLMMG_An_L2Jmp9202WP MPosR YV9202/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) 0 0 65535
ATLMMG_An_L2Jmp9209WP MPosR YV9209/x - (Sample/Jump One) Source selection (Bit pattern, edit from panel) 1 0 65535
ATLMMG_An_L2SC9209WP MPosR YV9209/x - (Sample/Jump All) Short cycle source selection (Bit pattern, edit from panel) 0 0 65535
Recipe Class: ATLMMG_An_L2Param
Recipe Instance: ATLMMG_An_L2Param_Default
Number of Recipe elements: 1
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L2InhibExtF ManReg01 Line2 external requests inhibit parameter (1=Inhibit, 0=Allowed) FALSE - - -
Recipe Class: ATLMMG_An_L2Alarm
Recipe Instance: ATLMMG_An_L2Alarm_Default
Number of Recipe elements: 50
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L2AlarmDt MPosR XANA9216,17,18,19 - Concentrations alarm delays 0.2 min 0.0 500.0
ATLMMG_An_L2MeasNotOkDt MPosR PT9215 - Not enough pressure for measurements alarm delay 1.0 min 0.0 500.0
ATLMMG_An_L2MeasNotOkL MPosR PT9215 - Not enough pressure for measurements L alarm threshold -10.0 mbar -20.0 20.0
ATLMMG_An_L2MeasNotOkLL MPosR PT9215 - Not enough pressure for measurements LL alarm threshold -20.0 mbar -20.0 20.0
ATLMMG_An_L2Sr181H2OAA HH XANA9217 - Source 181 H2O alarm logic - - -
ATLMMG_An_L2Sr181H2OAA H XANA9217 - Source 181 H2O alarm logic - - -
ATLMMG_An_L2Sr181H2OAA L XANA9217 - Source 181 H2O alarm - - -
ATLMMG_An_L2Sr181H2OAA LL XANA9217 - Source 181 H2O alarm - - -
ATLMMG_An_L2Sr182H2OAA HH XANA9217 - Source 182 H2O alarm logic - - -
ATLMMG_An_L2Sr182H2OAA H XANA9217 - Source 182 H2O alarm logic - - -
ATLMMG_An_L2Sr182H2OAA L XANA9217 - Source 182 H2O alarm - - -
ATLMMG_An_L2Sr182H2OAA LL XANA9217 - Source 182 H2O alarm - - -
ATLMMG_An_L2Sr183H2OAA HH XANA9217 - Source 183 H2O alarm logic - - -
ATLMMG_An_L2Sr183H2OAA H XANA9217 - Source 183 H2O alarm logic - - -
ATLMMG_An_L2Sr183H2OAA L XANA9217 - Source 183 H2O alarm - - -
ATLMMG_An_L2Sr183H2OAA LL XANA9217 - Source 183 H2O alarm - - -
ATLMMG_An_L2Sr181O2AA HH XANA9218 - Source 181 O2 alarm logic - - -
ATLMMG_An_L2Sr181O2AA H XANA9218 - Source 181 O2 alarm logic - - -
ATLMMG_An_L2Sr181O2AA L XANA9218 - Source 181 O2 alarm logic - - -
ATLMMG_An_L2Sr181O2AA LL XANA9218 - Source 181 O2 alarm logic - - -
ATLMMG_An_L2Sr182O2AA HH XANA9218 - Source 182 O2 alarm logic - - -
ATLMMG_An_L2Sr182O2AA H XANA9218 - Source 182 O2 alarm logic - - -
ATLMMG_An_L2Sr182O2AA L XANA9218 - Source 182 O2 alarm logic - - -
ATLMMG_An_L2Sr182O2AA LL XANA9218 - Source 182 O2 alarm logic - - -
ATLMMG_An_L2Sr183O2AA HH XANA9218 - Source 183 O2 alarm logic - - -
ATLMMG_An_L2Sr183O2AA H XANA9218 - Source 183 O2 alarm logic - - -
ATLMMG_An_L2Sr183O2AA L XANA9218 - Source 183 O2 alarm logic - - -
ATLMMG_An_L2Sr183O2AA LL XANA9218 - Source 183 O2 alarm logic - - -
ATLMMG_An_L2Sr141H2OAA HH XANA9217 - Source 141 H2O alarm logic - - -
ATLMMG_An_L2Sr141H2OAA H XANA9217 - Source 141 H2O alarm logic - - -
ATLMMG_An_L2Sr141H2OAA L XANA9217 - Source 141 H2O alarm logic - - -
ATLMMG_An_L2Sr141H2OAA LL XANA9217 - Source 141 H2O alarm logic - - -
ATLMMG_An_L2Sr142H2OAA HH XANA9217 - Source 142 H2O alarm logic - - -
ATLMMG_An_L2Sr142H2OAA H XANA9217 - Source 142 H2O alarm logic - - -
ATLMMG_An_L2Sr142H2OAA L XANA9217 - Source 142 H2O alarm logic - - -
ATLMMG_An_L2Sr142H2OAA LL XANA9217 - Source 142 H2O alarm logic - - -
ATLMMG_An_L2Sr141O2AA HH XANA9218 - Source 141 O2 alarm logic - - -
ATLMMG_An_L2Sr141O2AA H XANA9218 - Source 141 O2 alarm logic - - -
ATLMMG_An_L2Sr141O2AA L XANA9218 - Source 141 O2 alarm logic - - -
ATLMMG_An_L2Sr141O2AA LL XANA9218 - Source 141 O2 alarm logic - - -
ATLMMG_An_L2Sr142O2AA HH XANA9218 - Source 142 O2 alarm logic - - -
ATLMMG_An_L2Sr142O2AA H XANA9218 - Source 142 O2 alarm logic - - -
ATLMMG_An_L2Sr142O2AA L XANA9218 - Source 142 O2 alarm logic - - -
ATLMMG_An_L2Sr142O2AA LL XANA9218 - Source 142 O2 alarm logic - - -
ATLMMG_An_L2PT9230AA HH PT9230 - Analysis 2 input pressure alarm 100 - - -
ATLMMG_An_L2PT9230AA H PT9230 - Analysis 2 input pressure alarm 50 - - -
ATLMMG_An_L2PT9230AA L PT9230 - Analysis 2 input pressure alarm -50 - - -
ATLMMG_An_L2PT9230AA LL PT9230 - Analysis 2 input pressure alarm -100 - - -
ATLMMG_An_Wg2ErrCtAA HH Gas System wago chain 2 profibus communication error counter Alarm 6 - - -
ATLMMG_An_Wg2ErrCtAA H Gas System wago chain 2 profibus communication error counter Alarm 3 - - -
Recipe Class: ATLMMG_An_L1Param
Recipe Instance: ATLMMG_An_L1Param_Default
Number of Recipe elements: 2
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L1InhibExtF ManReg01 Line1 external requests inhibit parameter (1=Inhibit, 0=Allowed) FALSE - - -
ATLMMG_An_L1GasConcF ManReg01 XANA9119 - Line1 gas concentration interlock to gas system (0=Disabled, 1=Enabled) FALSE - - -
Recipe Class: ATLMMG_An_L2Constant
Recipe Instance: ATLMMG_An_L2Constant_Default
Number of Recipe elements: 10
Alias Element Description Value Unit Range Min Range Max
ATLMMG_An_L2LCycleRate MPosR Line2 (Sample All) Long cycle length 5.0 day 0.0 500.0
ATLMMG_An_L2Sr141Flush MPosR YV9202/1 - return Rack 61 source 141 purge time 120.0 min 0.0 500.0
ATLMMG_An_L2Sr142Flush MPosR YV9202/2 - return Rack 62 source 142 purge time 120.0 min 0.0 500.0
ATLMMG_An_L2Sr181Flush MPosR YV9209/1 - Argon source 181 purge time 60.0 min 0.0 500.0
ATLMMG_An_L2Sr182Flush MPosR YV9209/2 - Argon+100ppm H2O source 182 purge time 30.0 min 0.0 500.0
ATLMMG_An_L2Sr183Flush MPosR YV9209/3 - Supply gas source 183 purge time 2.0 min 0.0 500.0
ATLMMG_An_L2SampleTime MPosR Line2 measurment sample time 30.0 s 0.0 1000.0
ATLMMG_An_L2CyAllPause MPosR Line2 (Sample All) Cycle Pause 1.0 min 0.0 500.0
ATLMMG_An_L2CyOnePause MPosR Line2 (Sample One) Cycle Pause 10.0 min 0.0 500.0
ATLMMG_An_L2O2FulScAP MPosR XANA9218 - O2 meter full scale 0 ppm 0 99999
Recipe Class: ATLMMG_Di_FlowCell
Recipe Instance: ATLMMG_Di_FlowCell_Default
Number of Recipe elements: 4
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Di_FCRck61Cmd1WP MPosR Rack 61 flow cell selection (Bit pattern: Edit from panel!) 65535 0 65535
ATLMMG_Di_FCRck61Cmd2WP MPosR Rack 61 flow cell selection (Bit pattern: Edit from panel!) 0 0 65535
ATLMMG_Di_FCRck62Cmd1WP MPosR Rack 62 flow cell selection (Bit pattern: Edit from panel!) 65535 0 65535
ATLMMG_Di_FCRck62Cmd2WP MPosR Rack 62 flow cell selection (Bit pattern: Edit from panel!) 0 0 65535
Recipe Class: ATLMMG_Di_Volume
Recipe Instance: ATLMMG_Di_Volume_Default
Number of Recipe elements: 32
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Di_Chan1Vol61 MPosR Rack 61 channel 1 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan2Vol61 MPosR Rack 61 channel 2 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan3Vol61 MPosR Rack 61 channel 3 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan4Vol61 MPosR Rack 61 channel 4 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan5Vol61 MPosR Rack 61 channel 5 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan6Vol61 MPosR Rack 61 channel 6 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan7Vol61 MPosR Rack 61 channel 7 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan8Vol61 MPosR Rack 61 channel 8 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan9Vol61 MPosR Rack 61 channel 9 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan10Vol61 MPosR Rack 61 channel 10 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan11Vol61 MPosR Rack 61 channel 11 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan12Vol61 MPosR Rack 61 channel 12 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan13Vol61 MPosR Rack 61 channel 13 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan14Vol61 MPosR Rack 61 channel 14 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan15Vol61 MPosR Rack 61 channel 15 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan16Vol61 MPosR Rack 61 channel 16 volume 0.05 m3 0.0 120000.0
ATLMMG_Di_Chan1Vol62 MPosR Rack 62 channel 1 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan2Vol62 MPosR Rack 62 channel 2 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan3Vol62 MPosR Rack 62 channel 3 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan4Vol62 MPosR Rack 62 channel 4 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan5Vol62 MPosR Rack 62 channel 5 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan6Vol62 MPosR Rack 62 channel 6 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan7Vol62 MPosR Rack 62 channel 7 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan8Vol62 MPosR Rack 62 channel 8 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan9Vol62 MPosR Rack 62 channel 9 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan10Vol62 MPosR Rack 62 channel 10 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan11Vol62 MPosR Rack 62 channel 11 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan12Vol62 MPosR Rack 62 channel 12 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan13Vol62 MPosR Rack 62 channel 13 volume 0.16 m3 0.0 120000.0
ATLMMG_Di_Chan14Vol62 MPosR Rack 62 channel 14 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan15Vol62 MPosR Rack 62 channel 15 volume 0.24 m3 0.0 120000.0
ATLMMG_Di_Chan16Vol62 MPosR Rack 62 channel 16 volume 0.24 m3 0.0 120000.0
Recipe Class: ATLMMG_Di_Constant
Recipe Instance: ATLMMG_Di_Constant_Default
Number of Recipe elements: 13
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Di_rack61PInH MPosR (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure H threshold 90.0 mbar 0.0 100.0
ATLMMG_Di_rack62PInH MPosR (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure H threshold 74.0 mbar 0.0 100.0
ATLMMG_Di_rack61PInL MPosR (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure L threshold 35.0 mbar 0.0 100.0
ATLMMG_Di_rack62PInL MPosR (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure L threshold 35.0 mbar 0.0 100.0
ATLMMG_Di_RackTOTP MPosR Isolation valves operation sequence delay 0.0 s 0.0 20.0
ATLMMG_Di_rackCAirDelay MPosR Racks starting sequence delay 1000.0 ms 0.0 1500.0
ATLMMG_Di_SignFlowLim MPosR (RunNotReady) Significant flows threshold 100.0 % 0.0 20000.0
ATLMMG_Di_EPS MPosR Racks Ready/Not Ready transition hysteresis parameter 0.3 mbar 0.0 4.0
ATLMMG_Di_SmallFlLimit MPosR Minimum significant flow limit to calculate racks total flow stabilization 300.0 l/h 0.0 20000.0
ATLMMG_Di_Rack61Sel ManReg01 Rack 61 selection (1=relevant for global operation, 0=not relevant) TRUE - - -
ATLMMG_Di_Rack62Sel ManReg01 Rack 62 selection (1=relevant for global operation, 0=not relevant) TRUE - - -
ATLMMG_Di_CriticGasDP ManReg01 Critical gas loss (1=Critical, 0=Not critical) FALSE - - -
ATLMMG_Di_SignFlow ManReg01 (RunNotReady) significant flow condition relevant for rack operation (1=Relevant, 0=NOT relevant) FALSE - - -
Recipe Class: ATLMMG_Di_Alarm
Recipe Instance: ATLMMG_Di_Alarm_Default
Number of Recipe elements: 42
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Di_BackUpAlTOTP MPosR PT5509, PSL5508 - Backup low pressure alarms delay 30.0 s 0.0 300.0
ATLMMG_Di_DeviceDt MPosR Profibus communication alarm delay 3.0 s 0.0 15.0
ATLMMG_Di_PresAlTOTP MPosR PTxx24, PTxx25, PTxx26, PTxx04, PDTxx25 - Pressure alarms delay 5.0 s 0.0 30.0
ATLMMG_Di_AlmDATOTP MPosR Racks state related alarms delay 5.0 s 0.0 300.0
ATLMMG_Di_ChGAlHH MPosR Channels gas loss HH alarms threshold 40.0 % -200.0 200.0
ATLMMG_Di_ChGAlTOTP MPosR Channels gas loss alarms delay 60.0 s 0.0 99999.0
ATLMMG_Di_ChamPRegAALL MPosR PTxx04 - chamber pressure LL alarm threshold 0.0 mbar 0.0 40.0
ATLMMG_Di_ChamPRegAAL MPosR PTxx04 - chamber pressure L alarm threshold 0.5 mbar 0.0 40.0
ATLMMG_Di_ChamPRegAAH MPosR PTxx04 - chamber pressure H alarm threshold 5.0 mbar 0.0 40.0
ATLMMG_Di_ChamPRegAAHH MPosR PTxx04 - chamber pressure HH alarm threshold 6.0 mbar 0.0 40.0
ATLMMG_Di_StartupALDt MPosR Channels gas loss alarms delay 0.5 h 0.0 99999.0
ATLMMG_Di_FCRckErrAADt MPosR Distribution racks flowcell error alarm delay time 3600.0 s 0.0 20000.0
ATLMMG_Di_ChGAlH MPosR Channels gas loss H alarms threshold 0 % -200 200
ATLMMG_Di_ChGAlL MPosR Channels gas loss L alarms threshold 0 % -200 200
ATLMMG_Di_61InPresAl HH PTxx24 - Rack 61 input pressure alarm 20 - - -
ATLMMG_Di_61InPresAl H PTxx24 - Rack 61 input pressure alarm 10 - - -
ATLMMG_Di_61InPresAl L PTxx24 - Rack 61 input pressure alarm 5 - - -
ATLMMG_Di_61InPresAl LL PTxx24 - Rack 61 input pressure alarm 2 - - -
ATLMMG_Di_62InPresAl HH PTxx24 - Rack 62 input pressure alarm 20 - - -
ATLMMG_Di_62InPresAl H PTxx24 - Rack 62 input pressure alarm 10 - - -
ATLMMG_Di_62InPresAl L PTxx24 - Rack 62 input pressure alarm 5 - - -
ATLMMG_Di_62InPresAl LL PTxx24 - Rack 62 input pressure alarm 2 - - -
ATLMMG_Di_Wg1ErrCtAA HH Distribution wago 1 profibus communication error counter Alarm 6 - - -
ATLMMG_Di_Wg1ErrCtAA H Distribution wago 1 profibus communication error counter Alarm 3 - - -
ATLMMG_Di_Wg2ErrCtAA HH Distribution wago 2 profibus communication error counter Alarm 6 - - -
ATLMMG_Di_Wg2ErrCtAA H Distribution wago 2 profibus communication error counter Alarm 3 - - -
ATLMMG_Di_FC61Err1CtAA HH Distribution Rack 61 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC61Err1CtAA H Distribution Rack 61 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC62Err1CtAA HH Distribution Rack 62 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC62Err1CtAA H Distribution Rack 62 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC61Err2CtAA HH Distribution Rack 61 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC61Err2CtAA H Distribution Rack 61 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC62Err2CtAA HH Distribution Rack 62 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC62Err2CtAA H Distribution Rack 62 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC61Err3CtAA HH Distribution Rack 61 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC61Err3CtAA H Distribution Rack 61 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC62Err3CtAA HH Distribution Rack 62 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC62Err3CtAA H Distribution Rack 62 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC61Err4CtAA HH Distribution Rack 61 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC61Err4CtAA H Distribution Rack 61 ELMB node error counter alarm 3 - - -
ATLMMG_Di_FC62Err4CtAA HH Distribution Rack 62 ELMB node error counter alarm 6 - - -
ATLMMG_Di_FC62Err4CtAA H Distribution Rack 62 ELMB node error counter alarm 3 - - -
Recipe Class: ATLMMG_Mx_Alarm
Recipe Instance: ATLMMG_Mx_Alarm_Default
Number of Recipe elements: 70
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Mx_L1FlowFuRuLL MPosR XMFC1106 - (Fill/Run Unstable) Master gas flow LL alarm threshold 6.0 % 0.0 100.0
ATLMMG_Mx_L1FlowFuRuL MPosR XMFC1106 - (Fill/Run Unstable) Master gas flow L alarm threshold 4.0 % 0.0 100.0
ATLMMG_Mx_L1FlowFsRsLL MPosR XMFC1106 - (Fill/Run Stable) Master gas flow LL alarm threshold 4.0 % 0.0 100.0
ATLMMG_Mx_L1FlowFsRsL MPosR XMFC1106 - (Fill/Run Stable) Master gas flow L alarm threshold 2.0 % 0.0 100.0
ATLMMG_Mx_L1NotRelLL MPosR XMFC1106 - Flow not reliable LL alarm threshold 0.6 % 0.0 100.0
ATLMMG_Mx_L2NotRelLL MPosR XMFC1206 - Flow not reliable LL alarm threshold 0.6 % 0.0 100.0
ATLMMG_Mx_L3NotRelLL MPosR XMFC1306 - Flow not reliable LL alarm threshold 0.6 % 0.0 100.0
ATLMMG_Mx_L1NotRelL MPosR XMFC1106 - Flow not reliable L alarm threshold 0.8 % 0.0 100.0
ATLMMG_Mx_L2NotRelL MPosR XMFC1206 - Flow not reliable L alarm threshold 0.8 % 0.0 100.0
ATLMMG_Mx_L3NotRelL MPosR XMFC1306 - Flow not reliable L alarm threshold 0.8 % 0.0 100.0
ATLMMG_Mx_L1NotRelH MPosR XMFC1106 - Flow not reliable H alarm threshold 103.0 % 0.0 120.0
ATLMMG_Mx_L2NotRelH MPosR XMFC1206 - Flow not reliable H alarm threshold 103.0 % 0.0 120.0
ATLMMG_Mx_L3NotRelH MPosR XMFC1306 - Flow not reliable H alarm threshold 103.0 % 0.0 120.0
ATLMMG_Mx_L1NotRelHH MPosR XMFC1106 - Flow not reliable HH alarm threshold 105.0 % 0.0 120.0
ATLMMG_Mx_L2NotRelHH MPosR XMFC1206 - Flow not reliable HH alarm threshold 105.0 % 0.0 120.0
ATLMMG_Mx_L3NotRelHH MPosR XMFC1306 - Flow not reliable HH alarm threshold 105.0 % 0.0 120.0
ATLMMG_Mx_L1NotRelDt MPosR XMFC1106 - Flow not reliable alarm delay 30.0 s 0.0 60.0
ATLMMG_Mx_L2NotRelDt MPosR XMFC1206 - Flow not reliable alarm delay 30.0 s 0.0 60.0
ATLMMG_Mx_L3NotRelDt MPosR XMFC1306 - Flow not reliable alarm delay 30.0 s 0.0 60.0
ATLMMG_Mx_L1PressLL MPosR PT1103 - Low pressure LL alarm threshold 1.2 bar 0.0 100.0
ATLMMG_Mx_L2PressLL MPosR PT1203 - Low pressure LL alarm threshold 1.2 bar 0.0 100.0
ATLMMG_Mx_L3PressLL MPosR PT1303 - Low pressure LL alarm threshold 1.2 bar 0.0 100.0
ATLMMG_Mx_L1PressL MPosR PT1103 - Low pressure L alarm threshold 1.5 bar 0.0 10.0
ATLMMG_Mx_L2PressL MPosR PT1203 - Low pressure L alarm threshold 1.5 bar 0.0 10.0
ATLMMG_Mx_L3PressL MPosR PT1303 - Low pressure L alarm threshold 1.5 bar 0.0 10.0
ATLMMG_Mx_L1PressDt MPosR PT1103 - Low pressure L alarm delay 15.0 s 0.0 20.0
ATLMMG_Mx_L2PressDt MPosR PT1203 - Low pressure L alarm delay 15.0 s 0.0 20.0
ATLMMG_Mx_L3PressDt MPosR PT1303 - Low pressure L alarm delay 15.0 s 0.0 20.0
ATLMMG_Mx_L1RRegUnLH MPosR Line 1 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold 3.0 % 0.0 100.0
ATLMMG_Mx_L2RRegUnLH MPosR Line 2 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold 3.0 % 0.0 100.0
ATLMMG_Mx_L3RRegUnLH MPosR Line 3 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold 3.0 % 0.0 100.0
ATLMMG_Mx_L1RRegStLLHH MPosR Line 1 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold 1.5 % 0.0 100.0
ATLMMG_Mx_L2RRegStLLHH MPosR Line 2 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold 1.5 % 0.0 100.0
ATLMMG_Mx_L3RRegStLLHH MPosR Line 3 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold 0.4 % 0.0 100.0
ATLMMG_Mx_L1RRegStLH MPosR Line 1 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold 1.0 % 0.0 100.0
ATLMMG_Mx_L2RRegStLH MPosR Line 2 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold 1.0 % 0.0 100.0
ATLMMG_Mx_L3RRegStLH MPosR Line 3 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold 0.3 % 0.0 100.0
ATLMMG_Mx_L1RRegDt MPosR Line 1 - (Fill/Run) Ratio regulation alarm delay 90.0 s 0.0 100.0
ATLMMG_Mx_L2RRegDt MPosR Line 2 - (Fill/Run) Ratio regulation alarm delay 90.0 s 0.0 100.0
ATLMMG_Mx_L3RRegDt MPosR Line 3 - (Fill/Run) Ratio regulation alarm delay 90.0 s 0.0 100.0
ATLMMG_Mx_L1FRegPsLL MPosR Line 1 - (Purge Stable) Flow regulation LL alarm threshold -10.0 % -100.0 0.0
ATLMMG_Mx_L2FRegPsLL MPosR Line 2 - (Purge Stable) Flow regulation LL alarm threshold -10.0 % -100.0 0.0
ATLMMG_Mx_L3FRegPsLL MPosR Line 3 - (Purge Stable) Flow regulation LL alarm threshold -10.0 % -100.0 0.0
ATLMMG_Mx_L1FRegPsL MPosR Line 1 - (Purge Stable) Flow regulation L alarm threshold -5.0 % -100.0 0.0
ATLMMG_Mx_L2FRegPsL MPosR Line 2 - (Purge Stable) Flow regulation L alarm threshold -5.0 % -100.0 0.0
ATLMMG_Mx_L3FRegPsL MPosR Line 3 - (Purge Stable) Flow regulation L alarm threshold -5.0 % -100.0 0.0
ATLMMG_Mx_L1FRegDsLLHH MPosR Line 1 - (Direct Stable) Flow regulation HH(-LL) alarm threshold 2.0 % 0.0 100.0
ATLMMG_Mx_L2FRegDsLLHH MPosR Line 2 - (Direct Stable) Flow regulation HH(-LL) alarm threshold 2.0 % 0.0 100.0
ATLMMG_Mx_L3FRegDsLLHH MPosR Line 3 - (Direct Stable) Flow regulation HH(-LL) alarm threshold 2.0 % 0.0 100.0
ATLMMG_Mx_L1FRegDsLH MPosR Line 1 - (Direct Stable) Flow regulation H(-L) alarm threshold 1.5 % 0.0 100.0
ATLMMG_Mx_L2FRegDsLH MPosR Line 2 - (Direct Stable) Flow regulation H(-L) alarm threshold 1.5 % 0.0 100.0
ATLMMG_Mx_L3FRegDsLH MPosR Line 3 - (Direct Stable) Flow regulation H(-L) alarm threshold 1.5 % 0.0 100.0
ATLMMG_Mx_FlowDt MPosR All lines - Flow regulation alarm delay 2.0 min 0.0 60.0
ATLMMG_Mx_DeviceDt MPosR Profibus communication alarm delay 5.0 s 0.0 60.0
ATLMMG_Mx_ExtFlamGasDt MPosR ZSH9119 - External HW interlock alarm delay 60.0 s 0.0 60.0
ATLMMG_Mx_WrongFlowHH MPosR Flow on XMFC detected when XMFC not selected for operation 30 s 0.0 500.0
ATLMMG_Mx_Wg1ErrCtAA HH Mixer Wago 1 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_Wg1ErrCtAA H Mixer Wago 1 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1109ErrCtAA HH Mixer XMFC1109 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1109ErrCtAA H Mixer XMFC1109 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1209ErrCtAA HH Mixer XMFC1209 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1209ErrCtAA H Mixer XMFC1209 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1309ErrCtAA HH Mixer XMFC1309 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1309ErrCtAA H Mixer XMFC1309 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1106ErrCtAA HH Mixer XMFC1106 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1106ErrCtAA H Mixer XMFC1106 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1206ErrCtAA HH Mixer XMFC1206 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1206ErrCtAA H Mixer XMFC1206 profibus communication error counter Alarm 3 - - -
ATLMMG_Mx_X1306ErrCtAA HH Mixer XMFC1306 profibus communication error counter Alarm 6 - - -
ATLMMG_Mx_X1306ErrCtAA H Mixer XMFC1306 profibus communication error counter Alarm 3 - - -
Recipe Class: ATLMMG_Mx_Parameter
Recipe Instance: ATLMMG_Mx_Parameter_Default
Number of Recipe elements: 67
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Mx_L1LFPurCur MPosR XMFC1106 - (Purge) Line 1 calibration curve for low flow 0 0 1
ATLMMG_Mx_L1HFPurCur MPosR XMFC1109 - (Purge) Line 1 calibration curve for high flow 0 0 1
ATLMMG_Mx_L1HighFlCur MPosR XMFC1109 - (Fill/Run/Direct) Line 1 calibration curve for high flow 0 0 1
ATLMMG_Mx_L2HighFlCur MPosR XMFC1209 - (Fill/Run/Direct) Line 2 calibration curve for high flow 0 0 1
ATLMMG_Mx_L3HighFlCur MPosR XMFC1309 - (Fill/Run/Direct) Line 3 calibration curve for high flow 0 0 1
ATLMMG_Mx_L1LowFlCur MPosR XMFC1106 - (Fill/Run/Direct) Line 1 calibration curve for low flow 0 0 1
ATLMMG_Mx_L2LowFlCur MPosR XMFC1206 - (Fill/Run/Direct) Line 2 calibration curve for low flow 0 0 1
ATLMMG_Mx_L3LowFlCur MPosR XMFC1306 - (Fill/Run/Direct) Line 3 calibration curve for low flow 0 0 1
ATLMMG_Mx_SmallFlow MPosR Small flows threshold (values ignored if below) 1.0 % 0.0 100.0
ATLMMG_Mx_L1FillFlowSp MPosR (Fill) Line 1 (master) flow setpoint 50.0 l/h 0.0 1400.0
ATLMMG_Mx_L1PurgeFlowSp MPosR (Purge) Line 1 flow setpoint 100.0 l/h 0.0 10200.0
ATLMMG_Mx_L1RunFlowSp MPosR (Run) Line 1 (master) flow setpoint 1900.0 l/h 0.0 1950.0
ATLMMG_Mx_L1DirFlowSp MPosR (Direct) Line 1 flow setpoint 50.0 l/h 0.0 10200.0
ATLMMG_Mx_L2PurgeFlowSp MPosR (Purge) Line 2 flow setpoint 0.0 l/h 0.0 99999.99
ATLMMG_Mx_L3PurgeFlowSp MPosR (Purge) Line 3 flow setpoint 0.0 l/h 0.0 99999.99
ATLMMG_Mx_L2DirFlowSp MPosR (Direct) Line 2 flow setpoint 0.0 l/h 0.0 99999.99
ATLMMG_Mx_L3DirFlowSp MPosR (Direct) Line 3 flow setpoint 0.0 l/h 0.0 99999.99
ATLMMG_Mx_L2FillRatioSp MPosR (Fill) Line 2 (slave) ratio regulation setpoint 5.0 % 0.0 100.0
ATLMMG_Mx_L3FillRatioSp MPosR (Fill) Line 3 (slave) ratio regulation setpoint 2.0 % 0.0 100.0
ATLMMG_Mx_L2RunRatioSp MPosR (Run) Line 2 (slave) ratio regulation setpoint 5.0 % 0.0 100.0
ATLMMG_Mx_L3RunRatioSp MPosR (Run) Line 3 (slave) ratio regulation setpoint 2.0 % 0.0 100.0
ATLMMG_Mx_CN1206StUpKc MPosR CN1206 - Kc for XMFC1206 flow regulation Start-Up 0.2 0.0 100.0
ATLMMG_Mx_CN1306StUpKc MPosR CN1306 - Kc for XMFC1306 flow regulation Start-Up 5.0 0.0 100.0
ATLMMG_Mx_CN1206StUpTi MPosR CN1206 - Ti for XMFC1206 flow regulation Start-Up 2.0 0.0 100.0
ATLMMG_Mx_CN1306StUpTi MPosR CN1306 - Ti for XMFC1306 flow regulation Start-Up 2.0 0.0 100.0
ATLMMG_Mx_CN1206StUpTd MPosR CN1206 - Td for XMFC1206 flow regulation Start-Up 0.0 0.0 100.0
ATLMMG_Mx_CN1306StUpTd MPosR CN1306 - Td for XMFC1306 flow regulation Start-Up 0.0 0.0 100.0
ATLMMG_Mx_CN1206StUpTds MPosR CN1206 - Tds for XMFC1206 flow regulation Start-Up 0.0 0.0 100.0
ATLMMG_Mx_CN1306StUpTds MPosR CN1306 - Tds for XMFC1306 flow regulation Start-Up 0.0 0.0 100.0
ATLMMG_Mx_CN1209StUpKc MPosR CN1209 - Kc for XMFC1209 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1309StUpKc MPosR CN1309 - Kc for XMFC1309 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1209StUpTi MPosR CN1209 - Ti for XMFC1209 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1309StUpTi MPosR CN1309 - Ti for XMFC1309 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1209StUpTd MPosR CN1209 - Td for XMFC1209 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1309StUpTd MPosR CN1309 - Td for XMFC1309 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1209StUpTds MPosR CN1209 - Tds for XMFC1209 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1309StUpTds MPosR CN1309 - Tds for XMFC1309 flow regulation Start-Up 0 0.0 100.0
ATLMMG_Mx_CN1206RunKc MPosR CN1206 - Kc for XMFC1206 flow regulation Run 0.2 0.0 100.0
ATLMMG_Mx_CN1306RunKc MPosR CN1306 - Kc for XMFC1306 flow regulation Run 5.0 0.0 100.0
ATLMMG_Mx_CN1206RunTi MPosR CN1206 - Ti for XMFC1206 flow regulation Run 2.0 0.0 100.0
ATLMMG_Mx_CN1306RunTi MPosR CN1306 - Ti for XMFC1306 flow regulation Run 2.0 0.0 100.0
ATLMMG_Mx_CN1206RunTd MPosR CN1206 - Td for XMFC1206 flow regulation Run 0.0 0.0 100.0
ATLMMG_Mx_CN1306RunTd MPosR CN1306 - Td for XMFC1306 flow regulation Run 0.0 0.0 100.0
ATLMMG_Mx_CN1206RunTds MPosR CN1206 - Tds for XMFC1206 flow regulation Run 0.0 0.0 100.0
ATLMMG_Mx_CN1306RunTds MPosR CN1306 - Tds for XMFC1306 flow regulation Run 0.0 0.0 100.0
ATLMMG_Mx_CN1209RunKc MPosR CN1209 - Kc for XMFC1209 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1309RunKc MPosR CN1309 - Kc for XMFC1309 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1209RunTi MPosR CN1209 - Ti for XMFC1209 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1309RunTi MPosR CN1309 - Ti for XMFC1309 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1209RunTd MPosR CN1209 - Td for XMFC1209 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1309RunTd MPosR CN1309 - Td for XMFC1309 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1209RunTds MPosR CN1209 - Tds for XMFC1209 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_CN1309RunTds MPosR CN1309 - Tds for XMFC1309 flow regulation Run 0 0.0 100.0
ATLMMG_Mx_L1FillLF ManReg01 (Fill) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) FALSE - - -
ATLMMG_Mx_L2FillLF ManReg01 (Fill) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) FALSE - - -
ATLMMG_Mx_L3FillLF ManReg01 (Fill) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) FALSE - - -
ATLMMG_Mx_L1PurgeLF ManReg01 (Purge) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) FALSE - - -
ATLMMG_Mx_L2PurgeLF ManReg01 (Purge) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) FALSE - - -
ATLMMG_Mx_L3PurgeLF ManReg01 (Purge) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) FALSE - - -
ATLMMG_Mx_L1RunLF ManReg01 (Run) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) TRUE - - -
ATLMMG_Mx_L2RunLF ManReg01 (Run) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) TRUE - - -
ATLMMG_Mx_L3RunLF ManReg01 (Run) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) TRUE - - -
ATLMMG_Mx_L1DirectLF ManReg01 (Direct) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) TRUE - - -
ATLMMG_Mx_L2DirectLF ManReg01 (Direct) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) TRUE - - -
ATLMMG_Mx_L3DirectLF ManReg01 (Direct) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) TRUE - - -
ATLMMG_Mx_FillComp ManReg01 Activation of Fill auto completion (1=transition enabled) FALSE - - -
ATLMMG_Mx_PurgeComp ManReg01 Activation of Purge auto completion (1=transition enabled) FALSE - - -
Recipe Class: ATLMMG_Mx_Offset
Recipe Instance: ATLMMG_Mx_Offset_Default
Number of Recipe elements: 7
Alias Element Description Value Unit Range Min Range Max
ATLMMG_Mx_TotVolOffset MPosR Total volume computation offset 0.0 m3 0.0 100000.0
ATLMMG_Mx_RTXMFC1206OfS MPosR XMFC1206 - Total running hours computation offset 0.0 h 0.0 90000.0
ATLMMG_Mx_RTXMFC1306OfS MPosR XMFC1306 - Total running hours computation offset 0.0 h 0.0 90000.0
ATLMMG_Mx_RTXMFC1209OfS MPosR XMFC1209 - Total running hours computation offset 0 h 0.0 90000.0
ATLMMG_Mx_RTXMFC1309OfS MPosR XMFC1309 - Total running hours computation offset 0 h 0.0 90000.0
ATLMMG_Mx_RTXMFC1106OfS MPosR XMFC1106 - Total running hours computation offset 0.0 h 0.0 90000.0
ATLMMG_Mx_RTXMFC1109OfS MPosR XMFC1109 - Total running hours computation offset 0 h 0.0 90000.0
Recipe Class: ATLMMG_Mx_Constant
Recipe Instance: ATLMMG_Mx_Constant_Default
Number of Recipe elements:
Alias Element Description Value Unit Range Min Range Max
Constant Description
ATLMMG_Mx_MFCCloseDt MPosR Time required to close MFCs 1.0 ms 0.0 60.0
ATLMMG_Mx_FillingDt MPosR Time required to fill pipes in front of MFCs 1.0 s 0.0 60.0
ATLMMG_Mx_FillStabDt MPosR (Fill) Time required to stabilize ratios and flow regulations 3.0 min 0.0 60.0
ATLMMG_Mx_PurgeStabDt MPosR (Purge) Time required to stabilize flows regulations 3.0 min 0.0 60.0
ATLMMG_Mx_RunStabDt MPosR (Run) Time required to stabilize ratio and flows regulations 3.0 min 0.0 60.0
ATLMMG_Mx_DirectStabDt MPosR (Direct) Time required to stabilize flows regulations 3.0 min 0.0 60.0
ATLMMG_Mx_FillReqVol MPosR (Fill) Volume required to complete filling 20.0 m3 0.0 150000.0
ATLMMG_Mx_PurgeReqVol MPosR (Purge) Volume required to complete purging 1000.0 l 0.0 500000.0
ATLMMG_Mx_L1LFRamp MPosR XMFC1106 - Flow setpoint ramping 50.0 l/hs 0.0 99999.99
ATLMMG_Mx_L2LFRamp MPosR XMFC1206 - Flow setpoint ramping 50.0 l/hs 0.0 99999.99
ATLMMG_Mx_L3LFRamp MPosR XMFC1306 - Flow setpoint ramping 50.0 l/hs 0.0 99999.99
ATLMMG_Mx_L1HFRamp MPosR XMFC1109 - Flow setpoint ramping 123.4 l/hs 0.0 99999.99
ATLMMG_Mx_L2HFRamp MPosR XMFC1209 - Flow setpoint ramping 123.4 l/hs 0.0 99999.99
ATLMMG_Mx_L3HFRamp MPosR XMFC1309 - Flow setpoint ramping 123.4 l/hs 0.0 99999.99
ATLMMG_Mx_L1MFC6C0FuScl MPosR XMFC1106 - Calibration curve 0 full scale 1950.0 l/min 0.0 9999.99
ATLMMG_Mx_L1MFC6C1FuScl MPosR XMFC1106 - Calibration curve 1 full scale 123.4 l/min 0.0 9999.99
ATLMMG_Mx_L2MFC6C0FuScl MPosR XMFC1206 - Calibration curve 0 full scale 300.0 l/min 0.0 9999.99
ATLMMG_Mx_L3MFC6C0FuScl MPosR XMFC1306 - Calibration curve 0 full scale 44.0 l/min 0.0 9999.99
ATLMMG_Mx_L1MFC9C0FuScl MPosR XMFC1109 - Calibration curve 0 full scale 123.4 l/min 0.0 9999.99
ATLMMG_Mx_L1MFC9C1FuScl MPosR XMFC1109 - Calibration curve 1 full scale 123.4 l/min 0.0 9999.99
ATLMMG_Mx_L2MFC9C0FuScl MPosR XMFC1209 - Calibration curve 0 full scale 123.4 l/min 0.0 9999.99
ATLMMG_Mx_L3MFC9C0FuScl MPosR XMFC1309 - Calibration curve 0 full scale 123.4 l/min 0.0 9999.99
ATLMMG_Mx_L2LFPidRamp MPosR CN1206 - PID Setpoint ramp speed 50.0 l/hs 0.0 100.0
ATLMMG_Mx_L3LFPidRamp MPosR CN1306 - PID Setpoint ramp speed 50.0 l/hs 0.0 100.0
ATLMMG_Mx_L2HFPidRamp MPosR CN1209 - PID Setpoint ramp speed 50 l/hs 0.0 100.0
ATLMMG_Mx_L3HFPidRamp MPosR CN1309 - PID Setpoint ramp speed 50 l/hs 0.0 100.0