Recipe Instance: | LHBMWP_Gs_Constant_Default |
Number of Recipe elements: | 10 |
LHBMWP_Gs_AfterXhDelay | MPosR | Sequence pause length after Exhaust start has been triggered | 1.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_AfterPpDelay | MPosR | Sequence pause length after Pump start has been triggered | 15.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_AfterDiDelay | MPosR | Sequence pause length after Distribution start has been triggered | 1.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_AfterMxDelay | MPosR | Sequence pause length after Mixer start has been triggered | 0.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_AfterPuDelay | MPosR | Sequence pause length after Purifiers start has been triggered | 60.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_AtmPressHLim | MPosR | PT0x01 - H limit to reject wrong atmospheric pressure values | 1100.0 | mbar | 0.0 | 1500.0 |
LHBMWP_Gs_AtmPressLLim | MPosR | PT0x01 - L limit to reject wrong atmospheric pressure values | 900.0 | mbar | 0.0 | 1000.0 |
LHBMWP_Gs_P1InRun | ManReg01 | Purifier 1 module state selection for Gas System Run (1: Run, 0: Stop) | TRUE | - | - | - |
LHBMWP_Gs_XhInFill | ManReg01 | Exhaust module state selection for Gas System Fill (1: Run, 0: Venting) | FALSE | - | - | - |
LHBMWP_Gs_P1InRecup | ManReg01 | Purifier 1 module state selection for Gas System Recuperating (1: Run, 0: Stop) | FALSE | - | - | - |
Recipe Instance: | LHBMWP_Gs_Alarm_Default |
Number of Recipe elements: | 12 |
LHBMWP_Gs_AlarmStopTOTP | MPosR | Pump, Distribution in Stop, Exhaust not in Run alarms delay | 2.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_PuNotInNRunDt | MPosR | Purifier not in Nominal Run alarm delay | 0.5 | h | 0.0 | 100000.0 |
LHBMWP_Gs_MxNotInRunDt | MPosR | Mixer not in Run alarm delay | 0.5 | h | 0.0 | 100000.0 |
LHBMWP_Gs_MxNotInCompDt | MPosR | Mixer not in compliant state alarm delay | 30.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_DeviceDt | MPosR | Profibus communication alarm delay | 2.0 | s | 0.0 | 100000.0 |
LHBMWP_Gs_PSAADt | MPosR | Power supply module alarm delay | 60 | s | 0.0 | 100000.0 |
LHBMWP_Gs_OpMxReqFlag | ManReg01 | Mixer not in compliant state alarm enabling (1:enabled, 0:ignored) | TRUE | - | - | - |
LHBMWP_Gs_PS24VSurIAA | HH | Surface 24VDC power supply module current consumption too high | 25 | - | - | - |
LHBMWP_Gs_PS24VCavIAA | HH | Cavern 24VDC power supply module current consumption too high | 25 | - | - | - |
LHBMWP_Gs_PS18VCavIAA | HH | Cavern 18VDC power supply module current consumption too high | 25 | - | - | - |
LHBMWP_Gs_PS18VCavVAA | HH | Cavern 18VDC power supply module voltage level alarm | 21 | - | - | - |
LHBMWP_Gs_PS18VCavVAA | LL | Cavern 18VDC power supply module voltage level alarm | 15 | - | - | - |
Recipe Instance: | LHBMWP_Gs_Relevant_Default |
Number of Recipe elements: | 10 |
LHBMWP_Gs_MxGlbRelev | ManReg01 | Mixer Module is relevant for global operation | FALSE | - | - | - |
LHBMWP_Gs_PpGlbRelev | ManReg01 | Pump Module is relevant for global operation | FALSE | - | - | - |
LHBMWP_Gs_DiGlbRelev | ManReg01 | Distribution Module is relevant for global operation | FALSE | - | - | - |
LHBMWP_Gs_P1GlbRelev | ManReg01 | Purifier1 Module is relevant for global operation | FALSE | - | - | - |
LHBMWP_Gs_XhGlbRelev | ManReg01 | Exhaust Module is relevant for global operation | FALSE | - | - | - |
LHBMWP_Gs_MxDSSRelev | ManReg01 | Mixer Module is relvant for DSS (ready for physics) signal | FALSE | - | - | - |
LHBMWP_Gs_PpDSSRelev | ManReg01 | Pump Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
LHBMWP_Gs_DiDSSRelev | ManReg01 | Dsitribution Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
LHBMWP_Gs_P1DSSRelev | ManReg01 | Purifier1 Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
LHBMWP_Gs_XhDSSRelev | ManReg01 | Exhaust Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
Recipe Instance: | LHBMWP_Gs_Parameter_Default |
Number of Recipe elements: | 1 |
LHBMWP_Gs_GasLIntPeriod | MPosR | Gas loss integration reset timeout | 4.0 | h | 0.0 | 100000.0 |
Recipe Instance: | LHBMWP_Di_FlowCell_Default |
Number of Recipe elements: | 12 |
LHBMWP_Di_FCRck63Cmd1WP | MPosR | Rack 63 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck63Cmd2WP | MPosR | Rack 63 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck63Cmd3WP | MPosR | Rack 63 flow cell selection (Bit pattern: Edit from panel!) | 15 | | 0 | 65535 |
LHBMWP_Di_FCRck64Cmd1WP | MPosR | Rack 64 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck64Cmd2WP | MPosR | Rack 64 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck64Cmd3WP | MPosR | Rack 64 flow cell selection (Bit pattern: Edit from panel!) | 15 | | 0 | 65535 |
LHBMWP_Di_FCRck65Cmd1WP | MPosR | Rack 65 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck65Cmd2WP | MPosR | Rack 65 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck65Cmd3WP | MPosR | Rack 65 flow cell selection (Bit pattern: Edit from panel!) | 15 | | 0 | 65535 |
LHBMWP_Di_FCRck66Cmd1WP | MPosR | Rack 66 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck66Cmd2WP | MPosR | Rack 66 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
LHBMWP_Di_FCRck66Cmd3WP | MPosR | Rack 66 flow cell selection (Bit pattern: Edit from panel!) | 15 | | 0 | 65535 |
Recipe Instance: | LHBMWP_Di_Alarm_Default |
Number of Recipe elements: | 47 |
LHBMWP_Di_BackUpAlTOTP | MPosR | PT5509, PSL5508 - Backup low pressure alarms delay | 30.0 | s | 0.0 | 300.0 |
LHBMWP_Di_DeviceDt | MPosR | Profibus communication alarm delay | 3.0 | s | 0.0 | 15.0 |
LHBMWP_Di_PresAlTOTP | MPosR | PTxx24, PTxx25, PTxx26, PTxx04, PDTxx25 - Pressure alarms delay | 3.0 | s | 0.0 | 30.0 |
LHBMWP_Di_AlmDATOTP | MPosR | Racks state related alarms delay | 1.0 | s | 0.0 | 300.0 |
LHBMWP_Di_PrRegAlLH | MPosR | Distribution group pressure regulation deviation alarm -L, +H | 1.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_PrRegAlLLHH | MPosR | Distribution group pressure regulation deviation alarm -LL, +HH | 1.5 | mbar | -10.0 | 10.0 |
LHBMWP_Di_PrRegAlTOTP | MPosR | Groups of racks pressure regulation alarm delay | 15.0 | s | 0.0 | 99999.0 |
LHBMWP_Di_ChGAlHH | MPosR | Channels gas loss HH alarms threshold | 50000.0 | l/h | -500.0 | 60000.0 |
LHBMWP_Di_ChGAlTOTP | MPosR | Channels gas loss alarms delay | 30.0 | s | 0.0 | 99999.0 |
LHBMWP_Di_StartupALDt | MPosR | Channels gas loss alarms delay | 0 | h | 0 | 99999 |
LHBMWP_Di_PCVxx2xRLimDt | MPosR | PCVxx26 Distribution pressure regulation valve limit reached alarm delay | 20 | s | 0 | 360 |
LHBMWP_Di_63InPresAl | HH | PTxx24 - Rack 63 input pressure alarm | 10 | - | - | - |
LHBMWP_Di_63InPresAl | H | PTxx24 - Rack 63 input pressure alarm | 8 | - | - | - |
LHBMWP_Di_63InPresAl | L | PTxx24 - Rack 63 input pressure alarm | 1 | - | - | - |
LHBMWP_Di_63InPresAl | LL | PTxx24 - Rack 63 input pressure alarm | 0 | - | - | - |
LHBMWP_Di_64InPresAl | HH | PTxx24 - Rack 64 input pressure alarm | 10 | - | - | - |
LHBMWP_Di_64InPresAl | H | PTxx24 - Rack 64 input pressure alarm | 8 | - | - | - |
LHBMWP_Di_64InPresAl | L | PTxx24 - Rack 64 input pressure alarm | 1 | - | - | - |
LHBMWP_Di_64InPresAl | LL | PTxx24 - Rack 64 input pressure alarm | 0 | - | - | - |
LHBMWP_Di_65InPresAl | HH | PTxx24 - Rack 65 input pressure alarm | 10 | - | - | - |
LHBMWP_Di_65InPresAl | H | PTxx24 - Rack 65 input pressure alarm | 8 | - | - | - |
LHBMWP_Di_65InPresAl | L | PTxx24 - Rack 65 input pressure alarm | 1 | - | - | - |
LHBMWP_Di_65InPresAl | LL | PTxx24 - Rack 65 input pressure alarm | 0 | - | - | - |
LHBMWP_Di_66InPresAl | HH | PTxx24 - Rack 66 input pressure alarm | 10 | - | - | - |
LHBMWP_Di_66InPresAl | H | PTxx24 - Rack 66 input pressure alarm | 8 | - | - | - |
LHBMWP_Di_66InPresAl | L | PTxx24 - Rack 66 input pressure alarm | 1 | - | - | - |
LHBMWP_Di_66InPresAl | LL | PTxx24 - Rack 66 input pressure alarm | 0 | - | - | - |
LHBMWP_Di_PCV6328RLimAl | HH | PCV6328 Distribution pressure regulation valve limit reached | 100.0 | - | - | - |
LHBMWP_Di_PCV6328RLimAl | LL | PCV6328 Distribution pressure regulation valve limit reached | 0.0 | - | - | - |
LHBMWP_Di_PCV6528RLimAl | HH | PCV6528 Distribution pressure regulation valve limit reached | 100.0 | - | - | - |
LHBMWP_Di_PCV6528RLimAl | LL | PCV6528 Distribution pressure regulation valve limit reached | 0.0 | - | - | - |
LHBMWP_Di_63OutPresFAA | HH | PTxx26 - Rack 63 far output pressure alarm | 3 | - | - | - |
LHBMWP_Di_63OutPresFAA | H | PTxx26 - Rack 63 far output pressure alarm | 2 | - | - | - |
LHBMWP_Di_63OutPresFAA | L | PTxx26 - Rack 63 far output pressure alarm | -2 | - | - | - |
LHBMWP_Di_63OutPresFAA | LL | PTxx26 - Rack 63 far output pressure alarm | -3 | - | - | - |
LHBMWP_Di_64OutPresFAA | HH | PTxx26 - Rack 64 far output pressure alarm | 3 | - | - | - |
LHBMWP_Di_64OutPresFAA | H | PTxx26 - Rack 64 far output pressure alarm | 2 | - | - | - |
LHBMWP_Di_64OutPresFAA | L | PTxx26 - Rack 64 far output pressure alarm | -2 | - | - | - |
LHBMWP_Di_64OutPresFAA | LL | PTxx26 - Rack 64 far output pressure alarm | -3 | - | - | - |
LHBMWP_Di_65OutPresFAA | HH | PTxx26 - Rack 65 far output pressure alarm | 3 | - | - | - |
LHBMWP_Di_65OutPresFAA | H | PTxx26 - Rack 65 far output pressure alarm | 2 | - | - | - |
LHBMWP_Di_65OutPresFAA | L | PTxx26 - Rack 65 far output pressure alarm | -2 | - | - | - |
LHBMWP_Di_65OutPresFAA | LL | PTxx26 - Rack 65 far output pressure alarm | -3 | - | - | - |
LHBMWP_Di_66OutPresFAA | HH | PTxx26 - Rack 66 far output pressure alarm | 3 | - | - | - |
LHBMWP_Di_66OutPresFAA | H | PTxx26 - Rack 66 far output pressure alarm | 2 | - | - | - |
LHBMWP_Di_66OutPresFAA | L | PTxx26 - Rack 66 far output pressure alarm | -2 | - | - | - |
LHBMWP_Di_66OutPresFAA | LL | PTxx26 - Rack 66 far output pressure alarm | -3 | - | - | - |
Recipe Instance: | LHBMWP_Di_Constant_Default |
Number of Recipe elements: | 46 |
LHBMWP_Di_rack63PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 63 ready evt input pressure H threshold | 7.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack64PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 64 ready evt input pressure H threshold | 7.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack65PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 65 ready evt input pressure H threshold | 7.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack66PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 66 ready evt input pressure H threshold | 7.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack63PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 63 ready evt input pressure L threshold | 3.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack64PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 64 ready evt input pressure L threshold | 3.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack65PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 65 ready evt input pressure L threshold | 3.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_rack66PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 66 ready evt input pressure L threshold | 3.0 | mbar | -10.0 | 10.0 |
LHBMWP_Di_RackTOTP | MPosR | Isolation valves operation sequence delay | 0.0 | s | 0.0 | 20.0 |
LHBMWP_Di_rackCAirDelay | MPosR | Racks starting sequence delay | 1000.0 | ms | 0.0 | 1500.0 |
LHBMWP_Di_SignFlowLim | MPosR | (RunNotReady) Significant flows threshold | 500.0 | % | 0.0 | 20000.0 |
LHBMWP_Di_EPS | MPosR | Racks Ready/Not Ready transition hysteresis parameter | 0.3 | mbar | 0.0 | 4.0 |
LHBMWP_Di_CN6328PidAuSp | MPosR | Group of racks 2 pressure regulation set point | 0.3 | mbar | 0.0 | 9999999.0 |
LHBMWP_Di_CN6528PidAuSp | MPosR | Group of racks 3 pressure regulation set point | 0.5 | mbar | 0.0 | 9999999.0 |
LHBMWP_Di_PresSPRamp | MPosR | Pressure regulations setpoint ramp | 100.0 | mbar/s | 0.0 | 100000.0 |
LHBMWP_Di_CN6328StUpK | MPosR | Distribution group 2 rack 63 output pressure controller Gain during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528StUpK | MPosR | Distribution group 3 rack 65 output pressure controller Gain during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328StUpTi | MPosR | Distribution group 2 rack 63 output pressure controller Integral time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528StUpTi | MPosR | Distribution group 3 rack 65 output pressure controller Integral time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328StUpTd | MPosR | Distribution group 2 rack 63 output pressure controller Derivative time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528StUpTd | MPosR | Distribution group 3 rack 65 output pressure controller Derivative time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328StUpTds | MPosR | Distribution group 2 rack 63 output pressure controller second Derivative time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528StUpTds | MPosR | Distribution group 3 rack 65 output pressure controller second Derivative time during start-Up | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328RunK | MPosR | Distribution group 2 rack 63 output pressure controller Gain during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528RunK | MPosR | Distribution group 3 rack 65 output pressure controller Gain during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328RunTi | MPosR | Distribution group 2 rack 63 output pressure controller Integral time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528RunTi | MPosR | Distribution group 3 rack 65 output pressure controller Integral time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328RunTd | MPosR | Distribution group 2 rack 63 output pressure controller Derivative time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528RunTd | MPosR | Distribution group 3 rack 65 output pressure controller Derivative time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6328RunTds | MPosR | Distribution group 2 rack 63 output pressure controller second Derivative time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_CN6528RunTds | MPosR | Distribution group 3 rack 65 output pressure controller second Derivative time during Run | 0 | | 0 | 99999 |
LHBMWP_Di_rack63POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 63 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
LHBMWP_Di_rack64POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 64 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
LHBMWP_Di_rack65POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 65 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
LHBMWP_Di_rack66POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 66 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
LHBMWP_Di_rack63POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 63 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
LHBMWP_Di_rack64POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 64 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
LHBMWP_Di_rack65POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 65 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
LHBMWP_Di_rack66POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 66 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
LHBMWP_Di_SmallFlLimit | MPosR | Minimum significant flow limit to calculate racks total flow stabilization | 30.0 | l/h | 0.0 | 20000.0 |
LHBMWP_Di_Rack63Sel | ManReg01 | Rack 63 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
LHBMWP_Di_Rack64Sel | ManReg01 | Rack 64 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
LHBMWP_Di_Rack65Sel | ManReg01 | Rack 65 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
LHBMWP_Di_Rack66Sel | ManReg01 | Rack 66 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
LHBMWP_Di_CriticGasDP | ManReg01 | Critical gas loss (1=Critical, 0=Not critical) | FALSE | - | - | - |
LHBMWP_Di_SignFlow | ManReg01 | (RunNotReady) significant flow condition relevant for rack operation (1=Relevant, 0=NOT relevant) | FALSE | - | - | - |
Recipe Instance: | LHBMWP_Di_Volume_Default |
Number of Recipe elements: | 144 |
LHBMWP_Di_Chan1Vol63 | MPosR | Rack 63 channel 1 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan2Vol63 | MPosR | Rack 63 channel 2 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan3Vol63 | MPosR | Rack 63 channel 3 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan4Vol63 | MPosR | Rack 63 channel 4 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan5Vol63 | MPosR | Rack 63 channel 5 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan6Vol63 | MPosR | Rack 63 channel 6 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan7Vol63 | MPosR | Rack 63 channel 7 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan8Vol63 | MPosR | Rack 63 channel 8 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan9Vol63 | MPosR | Rack 63 channel 9 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan10Vol63 | MPosR | Rack 63 channel 10 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan11Vol63 | MPosR | Rack 63 channel 11 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan12Vol63 | MPosR | Rack 63 channel 12 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan13Vol63 | MPosR | Rack 63 channel 13 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan14Vol63 | MPosR | Rack 63 channel 14 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan15Vol63 | MPosR | Rack 63 channel 15 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan16Vol63 | MPosR | Rack 63 channel 16 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan17Vol63 | MPosR | Rack 63 channel 17 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan18Vol63 | MPosR | Rack 63 channel 18 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan19Vol63 | MPosR | Rack 63 channel 19 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan20Vol63 | MPosR | Rack 63 channel 20 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan21Vol63 | MPosR | Rack 63 channel 21 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan22Vol63 | MPosR | Rack 63 channel 22 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan23Vol63 | MPosR | Rack 63 channel 23 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan24Vol63 | MPosR | Rack 63 channel 24 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan25Vol63 | MPosR | Rack 63 channel 25 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan26Vol63 | MPosR | Rack 63 channel 26 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan27Vol63 | MPosR | Rack 63 channel 27 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan28Vol63 | MPosR | Rack 63 channel 28 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan29Vol63 | MPosR | Rack 63 channel 29 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan30Vol63 | MPosR | Rack 63 channel 30 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan31Vol63 | MPosR | Rack 63 channel 31 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan32Vol63 | MPosR | Rack 63 channel 32 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan33Vol63 | MPosR | Rack 63 channel 33 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan34Vol63 | MPosR | Rack 63 channel 34 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan35Vol63 | MPosR | Rack 63 channel 35 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan36Vol63 | MPosR | Rack 63 channel 36 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan1Vol64 | MPosR | Rack 64 channel 1 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan2Vol64 | MPosR | Rack 64 channel 2 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan3Vol64 | MPosR | Rack 64 channel 3 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan4Vol64 | MPosR | Rack 64 channel 4 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan5Vol64 | MPosR | Rack 64 channel 5 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan6Vol64 | MPosR | Rack 64 channel 6 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan7Vol64 | MPosR | Rack 64 channel 7 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan8Vol64 | MPosR | Rack 64 channel 8 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan9Vol64 | MPosR | Rack 64 channel 9 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan10Vol64 | MPosR | Rack 64 channel 10 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan11Vol64 | MPosR | Rack 64 channel 11 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan12Vol64 | MPosR | Rack 64 channel 12 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan13Vol64 | MPosR | Rack 64 channel 13 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan14Vol64 | MPosR | Rack 64 channel 14 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan15Vol64 | MPosR | Rack 64 channel 15 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan16Vol64 | MPosR | Rack 64 channel 16 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan17Vol64 | MPosR | Rack 64 channel 17 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan18Vol64 | MPosR | Rack 64 channel 18 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan19Vol64 | MPosR | Rack 64 channel 19 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan20Vol64 | MPosR | Rack 64 channel 20 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan21Vol64 | MPosR | Rack 64 channel 21 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan22Vol64 | MPosR | Rack 64 channel 22 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan23Vol64 | MPosR | Rack 64 channel 23 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan24Vol64 | MPosR | Rack 64 channel 24 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan25Vol64 | MPosR | Rack 64 channel 25 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan26Vol64 | MPosR | Rack 64 channel 26 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan27Vol64 | MPosR | Rack 64 channel 27 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan28Vol64 | MPosR | Rack 64 channel 28 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan29Vol64 | MPosR | Rack 64 channel 29 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan30Vol64 | MPosR | Rack 64 channel 30 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan31Vol64 | MPosR | Rack 64 channel 31 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan32Vol64 | MPosR | Rack 64 channel 32 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan33Vol64 | MPosR | Rack 64 channel 33 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan34Vol64 | MPosR | Rack 64 channel 34 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan35Vol64 | MPosR | Rack 64 channel 35 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan36Vol64 | MPosR | Rack 64 channel 36 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan1Vol65 | MPosR | Rack 65 channel 1 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan2Vol65 | MPosR | Rack 65 channel 2 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan3Vol65 | MPosR | Rack 65 channel 3 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan4Vol65 | MPosR | Rack 65 channel 4 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan5Vol65 | MPosR | Rack 65 channel 5 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan6Vol65 | MPosR | Rack 65 channel 6 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan7Vol65 | MPosR | Rack 65 channel 7 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan8Vol65 | MPosR | Rack 65 channel 8 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan9Vol65 | MPosR | Rack 65 channel 9 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan10Vol65 | MPosR | Rack 65 channel 10 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan11Vol65 | MPosR | Rack 65 channel 11 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan12Vol65 | MPosR | Rack 65 channel 12 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan13Vol65 | MPosR | Rack 65 channel 13 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan14Vol65 | MPosR | Rack 65 channel 14 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan15Vol65 | MPosR | Rack 65 channel 15 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan16Vol65 | MPosR | Rack 65 channel 16 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan17Vol65 | MPosR | Rack 65 channel 17 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan18Vol65 | MPosR | Rack 65 channel 18 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan19Vol65 | MPosR | Rack 65 channel 19 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan20Vol65 | MPosR | Rack 65 channel 20 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan21Vol65 | MPosR | Rack 65 channel 21 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan22Vol65 | MPosR | Rack 65 channel 22 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan23Vol65 | MPosR | Rack 65 channel 23 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan24Vol65 | MPosR | Rack 65 channel 24 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan25Vol65 | MPosR | Rack 65 channel 25 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan26Vol65 | MPosR | Rack 65 channel 26 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan27Vol65 | MPosR | Rack 65 channel 27 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan28Vol65 | MPosR | Rack 65 channel 28 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan29Vol65 | MPosR | Rack 65 channel 29 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan30Vol65 | MPosR | Rack 65 channel 30 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan31Vol65 | MPosR | Rack 65 channel 31 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan32Vol65 | MPosR | Rack 65 channel 32 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan33Vol65 | MPosR | Rack 65 channel 33 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan34Vol65 | MPosR | Rack 65 channel 34 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan35Vol65 | MPosR | Rack 65 channel 35 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan36Vol65 | MPosR | Rack 65 channel 36 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan1Vol66 | MPosR | Rack 66 channel 1 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan2Vol66 | MPosR | Rack 66 channel 2 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan3Vol66 | MPosR | Rack 66 channel 3 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan4Vol66 | MPosR | Rack 66 channel 4 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan5Vol66 | MPosR | Rack 66 channel 5 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan6Vol66 | MPosR | Rack 66 channel 6 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan7Vol66 | MPosR | Rack 66 channel 7 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan8Vol66 | MPosR | Rack 66 channel 8 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan9Vol66 | MPosR | Rack 66 channel 9 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan10Vol66 | MPosR | Rack 66 channel 10 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan11Vol66 | MPosR | Rack 66 channel 11 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan12Vol66 | MPosR | Rack 66 channel 12 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan13Vol66 | MPosR | Rack 66 channel 13 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan14Vol66 | MPosR | Rack 66 channel 14 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan15Vol66 | MPosR | Rack 66 channel 15 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan16Vol66 | MPosR | Rack 66 channel 16 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan17Vol66 | MPosR | Rack 66 channel 17 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan18Vol66 | MPosR | Rack 66 channel 18 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan19Vol66 | MPosR | Rack 66 channel 19 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan20Vol66 | MPosR | Rack 66 channel 20 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan21Vol66 | MPosR | Rack 66 channel 21 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan22Vol66 | MPosR | Rack 66 channel 22 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan23Vol66 | MPosR | Rack 66 channel 23 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan24Vol66 | MPosR | Rack 66 channel 24 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan25Vol66 | MPosR | Rack 66 channel 25 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan26Vol66 | MPosR | Rack 66 channel 26 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan27Vol66 | MPosR | Rack 66 channel 27 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan28Vol66 | MPosR | Rack 66 channel 28 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan29Vol66 | MPosR | Rack 66 channel 29 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan30Vol66 | MPosR | Rack 66 channel 30 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan31Vol66 | MPosR | Rack 66 channel 31 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan32Vol66 | MPosR | Rack 66 channel 32 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan33Vol66 | MPosR | Rack 66 channel 33 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan34Vol66 | MPosR | Rack 66 channel 34 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan35Vol66 | MPosR | Rack 66 channel 35 volume | 90000.0 | m3 | 0.0 | 120000.0 |
LHBMWP_Di_Chan36Vol66 | MPosR | Rack 66 channel 36 volume | 90010.0 | m3 | 0.0 | 120000.0 |
Recipe Instance: | LHBMWP_Xh_Constant_Default |
Number of Recipe elements: | 17 |
LHBMWP_Xh_MFCCurCurve | MPosR | XMFC5002 - Calibration curve selection | 0 | - | 0 | 2 |
LHBMWP_Xh_CNPidRamp | MPosR | XMFC5002 - Buffer pressure PID ramp | 10.0 | bar/s | 0.0 | 100.0 |
LHBMWP_Xh_DetVolComp | MPosR | Detector volume parameter for pressure setpoint computation | 8000.0 | l | 0.0 | 120000.0 |
LHBMWP_Xh_FailSafeFlSP | MPosR | XMFC5002 - Fail safe flow setpoint | 25.0 | l/h | 0.0 | 100.0 |
LHBMWP_Xh_MaxPrSP | MPosR | Max. pressure setpoint for pressure setpoint computation | 700.0 | mbar | 0.0 | 10000.0 |
LHBMWP_Xh_MFCC0MaxFlow | MPosR | XMFC5002 - Calibration curve #0 full scale | 200.0 | l/h | 0.0 | 1000.0 |
LHBMWP_Xh_MFCC1MaxFlow | MPosR | XMFC5002 - Calibration curve #1 full scale | 200.0 | l/h | 0.0 | 1000.0 |
LHBMWP_Xh_MinPrSP | MPosR | Min. pressure setpoint for pressure setpoint computation | 550.0 | mbar | 0.0 | 5000.0 |
LHBMWP_Xh_YIC5003_PTTP | MPosR | YC5003 - 3-way valve pulse time | 5.0 | s | 0.0 | 30.0 |
LHBMWP_Xh_AtPrMax | MPosR | Max. atmospheric pressure parameter for pressure setpoint computation | 985.0 | mbar | 0.0 | 1200.0 |
LHBMWP_Xh_BuPrMin | MPosR | Min. buffer pressure parameter for pressure setpoint computation | 550.0 | mbar | 0.0 | 5000.0 |
LHBMWP_Xh_BuVolComp | MPosR | Buffer volume parameter for pressure setpoint computation | 300.0 | l | 0.0 | 10000.0 |
LHBMWP_Xh_BuffPrRegFlag | ManReg01 | Activation of the buffer pressure regulation (1=regulation activated /0=not activated) | TRUE | - | - | - |
LHBMWP_Xh_CN5002 | MKc | Exhaust software pressure controller | 20 | - | - | - |
LHBMWP_Xh_CN5002 | MTi | Exhaust software pressure controller | 200 | - | - | - |
LHBMWP_Xh_CN5002 | MTd | Exhaust software pressure controller | 0 | - | - | - |
LHBMWP_Xh_CN5002 | MTds | Exhaust software pressure controller | | - | - | - |
Recipe Instance: | LHBMWP_Xh_Offset_Default |
Number of Recipe elements: | 2 |
LHBMWP_Xh_TotVolOffset | MPosR | Total exhausted volume computation offset | 0.0 | m3 | 0.0 | 100000.0 |
LHBMWP_Xh_RTXMFC5002OfS | MPosR | XMFC5002 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
Recipe Instance: | LHBMWP_Xh_Alarm_Default |
Number of Recipe elements: | 20 |
LHBMWP_Xh_CiPrAlH | MPosR | PT5011 - Circulation pressure H alarm threshold | 1.5 | bar | 0.0 | 12.0 |
LHBMWP_Xh_ciPrAlHH | MPosR | PT5011 - Circulation pressure HH alarm threshold | 1.6 | bar | 0.0 | 12.0 |
LHBMWP_Xh_ciPrAlL | MPosR | PT5011 - Circulation pressure L alarm threshold | 0.2 | bar | 0.0 | 10.0 |
LHBMWP_Xh_CiPrAlLL | MPosR | PT5011 - Circulation pressure LL alarm threshold | 0.2 | bar | 0.0 | 10.0 |
LHBMWP_Xh_PrRegAlLH | MPosR | Pressure regulation H(-L) alarm threshold | 0.2 | bar | 0.0 | 10.0 |
LHBMWP_Xh_PrRegAlLLHH | MPosR | Pressure regulation HH(-LL) alarm threshold | 0.6 | bar | 0.0 | 10.0 |
LHBMWP_Xh_PrRegAlTOTP | MPosR | Pressure regulation alarm delay | 5.0 | min | 0.0 | 10000.0 |
LHBMWP_Xh_BuPrSenDt | MPosR | PT5005 - Buffer pressure sensor alarm delay | 5.0 | s | 0.0 | 10000.0 |
LHBMWP_Xh_PrAlTOTP | MPosR | Exhaust pressure alarms latency (circulation and buffer) | 30.0 | s | 0.0 | 300.0 |
LHBMWP_Xh_BuPrAlH | MPosR | PT5005 - Buffer pressure H alarm threshold | 1.5 | bar | 0.0 | 12.0 |
LHBMWP_Xh_BuPrAlHH | MPosR | PT5005 - Buffer pressure HH alarm threshold | 1.6 | bar | 0.0 | 12.0 |
LHBMWP_Xh_BuPrAlL | MPosR | PT5005 - Buffer pressure L alarm threshold | 0.5 | bar | 0.0 | 10.0 |
LHBMWP_Xh_BuPrAlLL | MPosR | PT5005 - Buffer pressure LL alarm threshold | 0.4 | bar | 0.0 | 10.0 |
LHBMWP_Xh_AtmPressDt | MPosR | PT0101 - Atmospheric pressure alarm delay | 20.0 | s | 0.0 | 10000.0 |
LHBMWP_Xh_AtmPressLL | MPosR | PT0101 - Atmospheric pressure LL alarm threshold | 900.0 | mbar | 0.0 | 1000.0 |
LHBMWP_Xh_AtmPressHH | MPosR | PT0101 - Atmospheric pressure HH alarm threshold | 1100.0 | mbar | 0.0 | 1500.0 |
LHBMWP_Xh_AtmPrSenDt | MPosR | PT0101 - Atmospheric pressure transmitter alarm delay | 1.0 | h | 0.0 | 100.0 |
LHBMWP_Xh_PDT5030Dt | MPosR | PDT5030 - Exhaust filter clogged alarm delay | 5 | s | 0.0 | 10000.0 |
LHBMWP_Xh_PDT5030AA | HH | PDT5030 - Exhaust filter clogged | 8 | - | - | - |
LHBMWP_Xh_PDT5030AA | H | PDT5030 - Exhaust filter clogged | 7 | - | - | - |
Recipe Instance: | LHBMWP_Mx_Alarm_Default |
Number of Recipe elements: | 55 |
LHBMWP_Mx_L1FlowFuRuLL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow LL alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1FlowFuRuL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow L alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1FlowFsRsLL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow LL alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1FlowFsRsL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow L alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1NotRelLL | MPosR | XMFC1106 - Flow not reliable LL alarm threshold | 1.0 | % | 0.0 | 10000.0 |
LHBMWP_Mx_L2NotRelLL | MPosR | XMFC1206 - Flow not reliable LL alarm threshold | 1.0 | % | 0.0 | 10000.0 |
LHBMWP_Mx_L3NotRelLL | MPosR | XMFC1306 - Flow not reliable LL alarm threshold | 1.0 | % | 0.0 | 10000.0 |
LHBMWP_Mx_L1NotRelL | MPosR | XMFC1106 - Flow not reliable L alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2NotRelL | MPosR | XMFC1206 - Flow not reliable L alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3NotRelL | MPosR | XMFC1306 - Flow not reliable L alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1NotRelH | MPosR | XMFC1106 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L2NotRelH | MPosR | XMFC1206 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L3NotRelH | MPosR | XMFC1306 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L1NotRelHH | MPosR | XMFC1106 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L2NotRelHH | MPosR | XMFC1206 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L3NotRelHH | MPosR | XMFC1306 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
LHBMWP_Mx_L1NotRelDt | MPosR | XMFC1106 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
LHBMWP_Mx_L2NotRelDt | MPosR | XMFC1206 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
LHBMWP_Mx_L3NotRelDt | MPosR | XMFC1306 - Flow not reliable alarm delay | 30.0 | s | 0.0 | 60.0 |
LHBMWP_Mx_L1PressLL | MPosR | PT1103 - Low pressure LL alarm threshold | 0.8 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L2PressLL | MPosR | PT1203 - Low pressure LL alarm threshold | 0.8 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L3PressLL | MPosR | PT1303 - Low pressure LL alarm threshold | 0.8 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L1PressL | MPosR | PT1103 - Low pressure L alarm threshold | 1.0 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L2PressL | MPosR | PT1203 - Low pressure L alarm threshold | 1.0 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L3PressL | MPosR | PT1303 - Low pressure L alarm threshold | 1.0 | bar | 0.0 | 100000.0 |
LHBMWP_Mx_L1PressDt | MPosR | PT1103 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
LHBMWP_Mx_L2PressDt | MPosR | PT1203 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
LHBMWP_Mx_L3PressDt | MPosR | PT1303 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
LHBMWP_Mx_L1RRegUnLH | MPosR | Line 1 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2RRegUnLH | MPosR | Line 2 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3RRegUnLH | MPosR | Line 3 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1RRegStLLHH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2RRegStLLHH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3RRegStLLHH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1RRegStLH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2RRegStLH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3RRegStLH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1RRegDt | MPosR | Line 1 - (Fill/Run) Ratio regulation alarm delay | 60.0 | s | 0.0 | 100.0 |
LHBMWP_Mx_L2RRegDt | MPosR | Line 2 - (Fill/Run) Ratio regulation alarm delay | 60.0 | s | 0.0 | 100.0 |
LHBMWP_Mx_L3RRegDt | MPosR | Line 3 - (Fill/Run) Ratio regulation alarm delay | 60.0 | s | 0.0 | 100.0 |
LHBMWP_Mx_L1FRegPsLL | MPosR | Line 1 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 10.0 |
LHBMWP_Mx_L2FRegPsLL | MPosR | Line 2 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 10.0 |
LHBMWP_Mx_L3FRegPsLL | MPosR | Line 3 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 10.0 |
LHBMWP_Mx_L1FRegPsL | MPosR | Line 1 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 20.0 |
LHBMWP_Mx_L2FRegPsL | MPosR | Line 2 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 20.0 |
LHBMWP_Mx_L3FRegPsL | MPosR | Line 3 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 20.0 |
LHBMWP_Mx_L1FRegDsLLHH | MPosR | Line 1 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2FRegDsLLHH | MPosR | Line 2 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3FRegDsLLHH | MPosR | Line 3 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1FRegDsLH | MPosR | Line 1 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2FRegDsLH | MPosR | Line 2 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3FRegDsLH | MPosR | Line 3 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_FlowDt | MPosR | All lines - Flow regulation alarm delay | 2.0 | min | 0.0 | 60.0 |
LHBMWP_Mx_DeviceDt | MPosR | Profibus communication alarm delay | 5.0 | s | 0.0 | 60.0 |
LHBMWP_Mx_WrongFlowHH | MPosR | Flow on XMFC detected when XMFC not selected for operation | 30 | s | 0.0 | 500.0 |
Recipe Instance: | LHBMWP_Mx_Offset_Default |
Number of Recipe elements: | 7 |
LHBMWP_Mx_TotVolOffset | MPosR | Total volume computation offset | 8109.0 | m3 | 0.0 | 100000.0 |
LHBMWP_Mx_RTXMFC1206OfS | MPosR | XMFC1206 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
LHBMWP_Mx_RTXMFC1306OfS | MPosR | XMFC1306 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
LHBMWP_Mx_RTXMFC1209OfS | MPosR | XMFC1209 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
LHBMWP_Mx_RTXMFC1309OfS | MPosR | XMFC1309 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
LHBMWP_Mx_RTXMFC1106OfS | MPosR | XMFC1106 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
LHBMWP_Mx_RTXMFC1109OfS | MPosR | XMFC1109 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
Recipe Instance: | LHBMWP_Mx_Constant_Default |
Number of Recipe elements: | 26 |
LHBMWP_Mx_MFCCloseDt | MPosR | Time required to close MFCs | 1.0 | ms | 0.0 | 60.0 |
LHBMWP_Mx_FillingDt | MPosR | Time required to fill pipes in front of MFCs | 1.0 | s | 0.0 | 60.0 |
LHBMWP_Mx_FillStabDt | MPosR | (Fill) Time required to stabilize ratios and flow regulations | 20.0 | min | 0.0 | 60.0 |
LHBMWP_Mx_PurgeStabDt | MPosR | (Purge) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
LHBMWP_Mx_RunStabDt | MPosR | (Run) Time required to stabilize ratio and flows regulations | 3.0 | min | 0.0 | 60.0 |
LHBMWP_Mx_DirectStabDt | MPosR | (Direct) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
LHBMWP_Mx_FillReqVol | MPosR | (Fill) Volume required to complete filling | 10.0 | m3 | 0.0 | 150000.0 |
LHBMWP_Mx_PurgeReqVol | MPosR | (Purge) Volume required to complete purging | 10.0 | l | 0.0 | 500000.0 |
LHBMWP_Mx_L1LFRamp | MPosR | XMFC1106 - Flow setpoint ramping | 5.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L2LFRamp | MPosR | XMFC1206 - Flow setpoint ramping | 1.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L3LFRamp | MPosR | XMFC1306 - Flow setpoint ramping | 5.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L1HFRamp | MPosR | XMFC1109 - Flow setpoint ramping | 100.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L2HFRamp | MPosR | XMFC1209 - Flow setpoint ramping | 35.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L3HFRamp | MPosR | XMFC1309 - Flow setpoint ramping | 10.0 | l/hs | 0.0 | 99999.99 |
LHBMWP_Mx_L1MFC6C0FuScl | MPosR | XMFC1106 - Calibration curve 0 full scale | 100.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L1MFC6C1FuScl | MPosR | XMFC1106 - Calibration curve 1 full scale | 100.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L2MFC6C0FuScl | MPosR | XMFC1206 - Calibration curve 0 full scale | 100.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L3MFC6C0FuScl | MPosR | XMFC1306 - Calibration curve 0 full scale | 10.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L1MFC9C0FuScl | MPosR | XMFC1109 - Calibration curve 0 full scale | 500.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L1MFC9C1FuScl | MPosR | XMFC1109 - Calibration curve 1 full scale | 500.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L2MFC9C0FuScl | MPosR | XMFC1209 - Calibration curve 0 full scale | 400.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L3MFC9C0FuScl | MPosR | XMFC1309 - Calibration curve 0 full scale | 50.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L2LFPidRamp | MPosR | CN1206 - PID Setpoint ramp speed | 5.0 | %/s | 0.0 | 100.0 |
LHBMWP_Mx_L3LFPidRamp | MPosR | CN1306 - PID Setpoint ramp speed | 5.0 | %/s | 0.0 | 100.0 |
LHBMWP_Mx_L2HFPidRamp | MPosR | CN1209 - PID Setpoint ramp speed | 50.0 | %/s | 0.0 | 100.0 |
LHBMWP_Mx_L3HFPidRamp | MPosR | CN1309 - PID Setpoint ramp speed | 50.0 | %/s | 0.0 | 100.0 |
Recipe Instance: | LHBMWP_Mx_Parameter_Default |
Number of Recipe elements: | 67 |
LHBMWP_Mx_L1LFPurCur | MPosR | XMFC1106 - (Purge) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
LHBMWP_Mx_L1HFPurCur | MPosR | XMFC1109 - (Purge) Line 1 calibration curve for high flow | 0 | | 0 | 1 |
LHBMWP_Mx_L1LowFlCur | MPosR | XMFC1106 - (Fill/Run/Direct) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
LHBMWP_Mx_L2LowFlCur | MPosR | XMFC1206 - (Fill/Run/Direct) Line 2 calibration curve for low flow | 0 | | 0 | 1 |
LHBMWP_Mx_L3LowFlCur | MPosR | XMFC1306 - (Fill/Run/Direct) Line 3 calibration curve for low flow | 0 | | 0 | 1 |
LHBMWP_Mx_L1HighFlCur | MPosR | XMFC1109 - (Fill/Run/Direct) Line 1 calibration curve for high flow | 0 | | 0 | 1 |
LHBMWP_Mx_L2HighFlCur | MPosR | XMFC1209 - (Fill/Run/Direct) Line 2 calibration curve for high flow | 0 | | 0 | 1 |
LHBMWP_Mx_L3HighFlCur | MPosR | XMFC1309 - (Fill/Run/Direct) Line 3 calibration curve for high flow | 0 | | 0 | 1 |
LHBMWP_Mx_SmallFlow | MPosR | Small flows threshold (values ignored if below) | 1.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L1FillFlowSp | MPosR | (Fill) Line 1 (master) flow setpoint | 500.0 | l/h | 0.0 | 100000.0 |
LHBMWP_Mx_L1PurgeFlowSp | MPosR | (Purge) Line 1 flow setpoint | 500.0 | l/h | 0.0 | 100000.0 |
LHBMWP_Mx_L1RunFlowSp | MPosR | (Run) Line 1 (master) flow setpoint | 500.0 | l/h | 0.0 | 100000.0 |
LHBMWP_Mx_L1DirFlowSp | MPosR | (Direct) Line 1 flow setpoint | 50.0 | l/h | 0.0 | 100000.0 |
LHBMWP_Mx_L2PurgeFlowSp | MPosR | (Purge) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L3PurgeFlowSp | MPosR | (Purge) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L2DirFlowSp | MPosR | (Direct) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L3DirFlowSp | MPosR | (Direct) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 99999.99 |
LHBMWP_Mx_L2FillRatioSp | MPosR | (Fill) Line 2 (slave) ratio regulation setpoint | 40.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3FillRatioSp | MPosR | (Fill) Line 3 (slave) ratio regulation setpoint | 5.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L2RunRatioSp | MPosR | (Run) Line 2 (slave) ratio regulation setpoint | 38.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_L3RunRatioSp | MPosR | (Run) Line 3 (slave) ratio regulation setpoint | 0.0 | % | 0.0 | 100.0 |
LHBMWP_Mx_CN1206StUpKc | MPosR | CN1206 - Kc for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306StUpKc | MPosR | CN1306 - Kc for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206StUpTi | MPosR | CN1206 - Ti for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306StUpTi | MPosR | CN1306 - Ti for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206StUpTd | MPosR | CN1206 - Td for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306StUpTd | MPosR | CN1306 - Td for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206StUpTds | MPosR | CN1206 - Tds for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306StUpTds | MPosR | CN1306 - Tds for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209StUpKc | MPosR | CN1209 - Kc for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309StUpKc | MPosR | CN1309 - Kc for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209StUpTi | MPosR | CN1209 - Ti for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309StUpTi | MPosR | CN1309 - Ti for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209StUpTd | MPosR | CN1209 - Td for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309StUpTd | MPosR | CN1309 - Td for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209StUpTds | MPosR | CN1209 - Tds for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309StUpTds | MPosR | CN1309 - Tds for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206RunKc | MPosR | CN1206 - Kc for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306RunKc | MPosR | CN1306 - Kc for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206RunTi | MPosR | CN1206 - Ti for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306RunTi | MPosR | CN1306 - Ti for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206RunTd | MPosR | CN1206 - Td for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306RunTd | MPosR | CN1306 - Td for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1206RunTds | MPosR | CN1206 - Tds for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1306RunTds | MPosR | CN1306 - Tds for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209RunKc | MPosR | CN1209 - Kc for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309RunKc | MPosR | CN1309 - Kc for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209RunTi | MPosR | CN1209 - Ti for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309RunTi | MPosR | CN1309 - Ti for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209RunTd | MPosR | CN1209 - Td for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309RunTd | MPosR | CN1309 - Td for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1209RunTds | MPosR | CN1209 - Tds for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_CN1309RunTds | MPosR | CN1309 - Tds for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Mx_L1FillLF | ManReg01 | (Fill) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
LHBMWP_Mx_L2FillLF | ManReg01 | (Fill) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
LHBMWP_Mx_L3FillLF | ManReg01 | (Fill) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
LHBMWP_Mx_L1PurgeLF | ManReg01 | (Purge) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
LHBMWP_Mx_L2PurgeLF | ManReg01 | (Purge) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
LHBMWP_Mx_L3PurgeLF | ManReg01 | (Purge) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
LHBMWP_Mx_L1RunLF | ManReg01 | (Run) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
LHBMWP_Mx_L2RunLF | ManReg01 | (Run) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
LHBMWP_Mx_L3RunLF | ManReg01 | (Run) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
LHBMWP_Mx_L1DirectLF | ManReg01 | (Direct) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
LHBMWP_Mx_L2DirectLF | ManReg01 | (Direct) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | TRUE | - | - | - |
LHBMWP_Mx_L3DirectLF | ManReg01 | (Direct) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
LHBMWP_Mx_FillComp | ManReg01 | Activation of Fill auto completion (1=transition enabled) | FALSE | - | - | - |
LHBMWP_Mx_PurgeComp | ManReg01 | Activation of Purge auto completion (1=transition enabled) | FALSE | - | - | - |
Recipe Instance: | LHBMWP_Pp_Constant_Default |
Number of Recipe elements: | 5 |
LHBMWP_Pp_PIDRamp | MPosR | PV4003 - Pressure regulation PID ramp parameter | 0.1 | mbar/s | 0.0 | 1000.0 |
LHBMWP_Pp_PIDSpMax | MPosR | PV4003 - Pressure regulation max setpoint | 2.0 | mbar | -10.0 | 10.0 |
LHBMWP_Pp_PIDSpMin | MPosR | PV4003 - Pressure regulation min setpoint | -10.0 | mbar | -10.0 | 10.0 |
LHBMWP_Pp_PmpUpRunDt | MPosR | YV4002 - (Starting) Time after which the bypass valve shall be closed | 5.0 | s | 0.0 | 10.0 |
LHBMWP_Pp_RunStabDt | MPosR | (Starting) Time required to complete the starting activity | 2.0 | min | 0.0 | 10.0 |
Recipe Instance: | LHBMWP_Pp_Parameter_Default |
Number of Recipe elements: | 11 |
LHBMWP_Pp_RnDfltPSp | MPosR | Pressure regulation set point with PTxx04 sensor | -3.0 | mbar | -10.0 | 10.0 |
LHBMWP_Pp_CN4003StUpKc | MPosR | CN4003 - Kc for Pump Pressure regulation Start-Up | 2 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003StUpTi | MPosR | CN4003 - Ti for Pump Pressure regulation Start-Up | 5 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003StUpTd | MPosR | CN4003 - Td for Pump Pressure regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003StUpTds | MPosR | CN4003 - Tds for Pump Pressure regulation Start-Up | 0 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003RunKc | MPosR | CN4003 - Kc for Pump Pressure regulation Run | 2 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003RunTi | MPosR | CN4003 - Ti for Pump Pressure regulation Run | 5 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003RunTd | MPosR | CN4003 - Td for Pump Pressure regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Pp_CN4003RunTds | MPosR | CN4003 - Tds for Pump Pressure regulation Run | 0 | | 0.0 | 100.0 |
LHBMWP_Pp_Pump1Selected | ManReg01 | PUMP4101 selection (1=selected, 0=not selected) | FALSE | - | - | - |
LHBMWP_Pp_Pump2Selected | ManReg01 | PUMP4201 selection (1=selected, 0=not selected) | TRUE | - | - | - |
Recipe Instance: | LHBMWP_Pp_Offset_Default |
Number of Recipe elements: | 2 |
LHBMWP_Pp_RT1Offset | MPosR | PUMP4101 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
LHBMWP_Pp_RT2Offset | MPosR | PUMP4201 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
Recipe Instance: | LHBMWP_Pp_Alarm_Default |
Number of Recipe elements: | 23 |
LHBMWP_Pp_PressRegDt | MPosR | Pressure regulation alarm delay | 5.0 | s | 0.0 | 600.0 |
LHBMWP_Pp_SWPressDt | MPosR | PT4004 - Soft. pressure alarm delay | 2.0 | s | 0.0 | 240.0 |
LHBMWP_Pp_PmPPressDt | MPosR | PT4i01/j - Membranes pressures alarms delay | 300.0 | s | 0.0 | 600.0 |
LHBMWP_Pp_TooHotDt | MPosR | TE4i01/j - Pumps temperatures alarms delay | 5.0 | min | 0.0 | 240.0 |
LHBMWP_Pp_SWPressHH | MPosR | PT4004 - Soft. pressure HH alarm threshold | 20.0 | mbar | 0.0 | 30.0 |
LHBMWP_Pp_SWPressH | MPosR | PT4004 - Soft. pressure H alarm threshold | 10.0 | mbar | 0.0 | 30.0 |
LHBMWP_Pp_SWPressL | MPosR | PT4004 - Soft. pressure L alarm threshold | -7.0 | mbar | -30.0 | 0.0 |
LHBMWP_Pp_SWPressLL | MPosR | PT4004 - Soft. pressure LL alarm threshold | -10.0 | mbar | -30.0 | 0.0 |
LHBMWP_Pp_TooHot1HH | MPosR | TE4i01/1 - Pump too hot HH alarm threshold | 55.0 | C | 0.0 | 150.0 |
LHBMWP_Pp_TooHot1H | MPosR | TE4i01/1 - Pump too hot H alarm threshold | 42.0 | C | 0.0 | 149.0 |
LHBMWP_Pp_PmPPressLL | MPosR | PT4i01/j - Membranes pressures LL alarm threshold | -0.2 | bar | -0.3 | 5.0 |
LHBMWP_Pp_PmPPressL | MPosR | PT4i01/j - Membranes pressures L alarm threshold | -0.1 | bar | -0.2 | 5.0 |
LHBMWP_Pp_PmPPressH | MPosR | PT4i01/j - Membranes pressures H alarm threshold | 0.5 | bar | 0.0 | 3.4 |
LHBMWP_Pp_PmPPressHH | MPosR | PT4i01/j - Membranes pressures HH alarm threshold | 0.6 | bar | 0.0 | 4.5 |
LHBMWP_Pp_PressRegHHLL | MPosR | Pressure regulation HH(-LL) alarm thresholds | 3.0 | mbar | 0.0 | 5.0 |
LHBMWP_Pp_PressRegHL | MPosR | Pressure regulation H(-L) alarm thresholds | 2.0 | mbar | 0.0 | 4.0 |
LHBMWP_Pp_PV4003RLimDt | MPosR | Pump pressure regulation valve limit reached alarm delay | 180 | s | 0.0 | 1000 |
LHBMWP_Pp_PDT4020Dt | MPosR | Pump module outlet filter clogged alarm delay | 60 | s | 0.0 | 1000 |
LHBMWP_Pp_PUMPDefDisDt | MPosR | Pump Circuit breaker tripped alarm delay | 1 | s | 0.0 | 100 |
LHBMWP_Pp_PDT4020AA | HH | Pump module outlet filter clogged | 100 | - | - | - |
LHBMWP_Pp_PDT4020AA | H | Pump module outlet filter clogged | 50 | - | - | - |
LHBMWP_Pp_PV4003RLimAl | HH | PV4003 Pump pressure regulation valve limit reached | 90 | - | - | - |
LHBMWP_Pp_PV4003RLimAl | LL | PV4003 Pump pressure regulation valve limit reached | 10 | - | - | - |
Recipe Instance: | LHBMWP_P1_Alarm_Default |
Number of Recipe elements: | 16 |
LHBMWP_P1_AlmLatency | MPosR | Valves position alarms delay | 3000.0 | ms | 0.0 | 100000.0 |
LHBMWP_P1_NoPurgeAlTOTP | MPosR | (Purge, CoolDown, Standby) - No flow detected in FIS3112 alarm delay | 15000.0 | ms | 0.0 | 100000.0 |
LHBMWP_P1_NoRegenAlTOTP | MPosR | (Regeneration) - No flow detected in FIS3112 alarm delay | 15000.0 | ms | 0.0 | 100000.0 |
LHBMWP_P1_BadTRegulH | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation H (-L) alarm threshold | 150.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_BadTRegulHH | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation HH (-LL) alarm threshold | 200.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_RunHotH | MPosR | (Run) - Internal temperature TEx101/1-2 H alarm threshold | 75.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_RunHotHH | MPosR | (Run) - Internal temperature TEx101/1-2 HH alarm threshold | 120.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_ExtTHotH | MPosR | (Regeneration) - Internal temperature (TEx101/3) H alarm threshold | 250.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_ExtTHotHH | MPosR | (Regeneration) - Internal temperature (TEx101/3) HH alarm threshold | 260.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_DeviceDt | MPosR | Profibus communication alarm delay | 1000.0 | ms | 0.0 | 100000.0 |
LHBMWP_P1_HUpCheckDelay | MPosR | (Heat up) - Slow heating up (TEx101/1-2) alarm delay | 120.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_HUpFirstStepT | MPosR | (Heat up) - Slow heating up (TEx101/1-2) LL temperature alarm threshold | 50.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_HUpMaxTime | MPosR | (Heat Up) - Max time for regeneration temperature to be reached | 240.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_CDMaxTime | MPosR | (Cool Down) - Max time for cool down temperature to be reached | 1200.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_PrStBMaxTime | MPosR | (Prepare for Stand By) - Max time for Standby pressure to be reached | 6000000.0 | min | 0.0 | 7000000.0 |
LHBMWP_P1_ColSynchAlDt | MPosR | Purifier Columns not synchronized alarm | 30 | s | 0.0 | 1000.0 |
Recipe Instance: | LHBMWP_P1_Constant_Default |
Number of Recipe elements: | 36 |
LHBMWP_P1_PurgPrGasTime | MPosR | (Purge) - Completion timeout | 3.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_RegenTempeSP | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation setpoint | 200.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_RegenTime | MPosR | (Regeneration) Completion timeout | 600.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_CoolDownTemp | MPosR | (Cool down,Purge) - Completion low temperature (TEx101/1-2) threshold | 45.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_ColumnPrPLim | MPosR | (Prepare for standby) - Completion high pressure (PTxc08) limit | 1.2 | bar | -100.0 | 100000.0 |
LHBMWP_P1_RunSatVoLim | MPosR | (Run Pre Saturation) Columns saturation volume threshold | 500.0 | m3 | 0.0 | 100000.0 |
LHBMWP_P1_PrepRunP2Time | MPosR | (Prepare For Run/Ph2) - Completion timeout | 35.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_PreHUpTempe | MPosR | (Heat Up) - Temperature (TEx101/1-2) at which pump switch on | 50.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_MaxExtTemp | MPosR | (Heat up, Regenaration) - HH temperature (TExc01/2) limit for heater operation | 220.0 | C | 0.0 | 100000.0 |
LHBMWP_P1_PressAdjustDt | MPosR | (Prepare For Run/Ph1) - Delay to allow Column Pressure stabilization after filling pulse | 60.0 | s | 0.0 | 100.0 |
LHBMWP_P1_PressReadyH | MPosR | (Prepare For Run/Ph1) Column Pressure adjustment H limit | 0.6 | bar | -10.0 | 10.0 |
LHBMWP_P1_PressReadyL | MPosR | (Prepare For Run/Ph1) Column Pressure adjustment L limit | 0.5 | bar | -10.0 | 10.0 |
LHBMWP_P1_PressDelta | MPosR | gap of pressure variation (applied on exhaust pt5005 sensor) | 0.1 | bar | 0.0 | 10.0 |
LHBMWP_P1_CAPh1Timer | MPosR | (Prepare for Run/Ph1) - Column A max time for phase 1 | 60.0 | min | 10.0 | 100000.0 |
LHBMWP_P1_CAPh1PrDelta | MPosR | (Prepare for Run/Ph1 - Column A max pressure difference to complete Ph1 (PT5005 used) | 0.1 | bar | 0.0 | 100000.0 |
LHBMWP_P1_CAPh1OnDt | MPosR | (Prepare for Run/Ph1) - Column A Input valve (YVij03) opening time for pulsing | 1.0 | s | 0.0 | 100000.0 |
LHBMWP_P1_CAPh1OffDt | MPosR | (Prepare for Run/Ph1) - Column A Input valve (YVij03) waiting time between two pulses | 15.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_CBPh1Timer | MPosR | (Prepare for Run/Ph1) - Column B max time for phase 1 | 60.0 | min | 10.0 | 100000.0 |
LHBMWP_P1_CBPh1PrDelta | MPosR | (Prepare for Run/Ph1 - Column B max pressure difference to complete Ph1 (PT5005 used) | 0.1 | bar | 0.0 | 100000.0 |
LHBMWP_P1_CBPh1OnDt | MPosR | (Prepare for Run/Ph1) - Column B Input valve (YVij03) opening time for pulsing | 1.0 | s | 0.0 | 100000.0 |
LHBMWP_P1_CBPh1OffDt | MPosR | Column B Input valve (YVij03) waiting time between two pulses | 15.0 | min | 0.0 | 100000.0 |
LHBMWP_P1_RunPrSatVoLim | MPosR | (Run Nominal) Columns pre saturation volume threshold | 430.0 | m3 | 0.0 | 100000.0 |
LHBMWP_P1_EvacPress | MPosR | Evacuation pressure threshold to trigger the extraction pump | -0.1 | bar | -1.0 | 5.0 |
LHBMWP_P1_PumpInPforRun | ManReg01 | (Prepare for run) Pump selection (1=Selected, 0=Not selected) | FALSE | - | - | - |
LHBMWP_P1_PumpInRegnSeq | ManReg01 | (Regeneration sequence) Pump selection(1=Selected, 0=Not selected) | FALSE | - | - | - |
LHBMWP_P1_CAMntStartInt | ManReg01 | Column A cannot be used due to maintenance activity (1=Disabled, 0=Enabled) | FALSE | - | - | - |
LHBMWP_P1_CBMntStartInt | ManReg01 | Column B cannot be used due to maintenance activity (1=Disabled, 0=Enabled) | FALSE | - | - | - |
LHBMWP_P1_SkipPrep | ManReg01 | Skip Preparation for Run after restart (1=Selected, 0=Not Selected) | FALSE | - | - | - |
LHBMWP_P1_CNTZ2101 | MKc | Purifier1 col A heater PID | 10 | - | - | - |
LHBMWP_P1_CNTZ2101 | MTi | Purifier1 col A heater PID | 5 | - | - | - |
LHBMWP_P1_CNTZ2101 | MTd | Purifier1 col A heater PID | 0 | - | - | - |
LHBMWP_P1_CNTZ2101 | MTds | Purifier1 col A heater PID | | - | - | - |
LHBMWP_P1_CNTZ2201 | MKc | Purifier1 col B heater PID | 10 | - | - | - |
LHBMWP_P1_CNTZ2201 | MTi | Purifier1 col B heater PID | 5 | - | - | - |
LHBMWP_P1_CNTZ2201 | MTd | Purifier1 col B heater PID | 0 | - | - | - |
LHBMWP_P1_CNTZ2201 | MTds | Purifier1 col B heater PID | | - | - | - |
Recipe Instance: | LHBMWP_P1_Offset_Default |
Number of Recipe elements: | |
| | Offset Description | | | | |
LHBMWP_P1_CARunVOffset | MPosR | Column A run total volume offset | 181.0 | m3 | 0.0 | 10000.0 |
LHBMWP_P1_CBRunVOffset | MPosR | Column B run total volume offset | 0.0 | m3 | 0.0 | 10000.0 |
LHBMWP_P1_CANmROffset | MPosR | Column A number of regeneration cycles computation offset | 0.0 | - | 0.0 | 100.0 |
LHBMWP_P1_CBNmROffset | MPosR | Column B number of regeneration cycles computation offset | 0.0 | - | 0.0 | 100.0 |