Recipe Instance: | ALITOF_Di_Alarm_Default |
Number of Recipe elements: | 45 |
ALITOF_Di_rack61PTDev | MPosR | PT6104/x deviation to trigger alarm | 2 | mbar | -10 | 10 |
ALITOF_Di_rack62PTDev | MPosR | PT6204/x deviation to trigger alarm | 2 | mbar | -10 | 10 |
ALITOF_Di_rack61PTChDev | MPosR | PT6104/x chamber sensors deviation to trigger alarm | 2 | mbar | -10 | 10 |
ALITOF_Di_rack62PTChDev | MPosR | PT6204/x chamber sensors deviation to trigger alarm | 2 | mbar | -10 | 10 |
ALITOF_Di_BackUpAlTOTP | MPosR | PT5509, PSL5508 - Backup low pressure alarms delay | 30.0 | s | 0.0 | 300.0 |
ALITOF_Di_DeviceDt | MPosR | Profibus communication alarm delay | 3.0 | s | 0.0 | 15.0 |
ALITOF_Di_PresAlTOTP | MPosR | PTxx24, PTxx25, PTxx26, PTxx04, PDTxx25 - Pressure alarms delay | 5.0 | s | 0.0 | 30.0 |
ALITOF_Di_AlmDATOTP | MPosR | Racks state related alarms delay | 5.0 | s | 0.0 | 300.0 |
ALITOF_Di_PRegAlTOTP | MPosR | Racks pressure regulation alarms delay | 5.0 | s | 0.0 | 99999.0 |
ALITOF_Di_ChGAlHH | MPosR | Channels gas loss HH alarms threshold | 3000.0 | % | -200.0 | 3000.0 |
ALITOF_Di_ChGAlTOTP | MPosR | Channels gas loss alarms delay | 1800.0 | s | 0.0 | 99999.0 |
ALITOF_Di_61PRegAlH | MPosR | Rack 61 pressure regulation H (-L) alarm threshold | 2.0 | mbar | -15.0 | 15.0 |
ALITOF_Di_62PRegAlH | MPosR | Rack 62 pressure regulation H (-L) alarm threshold | 2.0 | mbar | -15.0 | 15.0 |
ALITOF_Di_61PRegAlHH | MPosR | Rack 61 pressure regulation HH (-LL) alarm threshold | 10.0 | mbar | -15.0 | 15.0 |
ALITOF_Di_62PRegAlHH | MPosR | Rack 62 pressure regulation HH (-LL) alarm threshold | 10.0 | mbar | -15.0 | 15.0 |
ALITOF_Di_ChamPRegAALL | MPosR | PTxx04 - chamber pressure LL alarm threshold | -2.0 | mbar | -3.0 | 0.0 |
ALITOF_Di_ChamPRegAAL | MPosR | PTxx04 - chamber pressure L alarm threshold | -1.0 | mbar | -2.0 | 0.0 |
ALITOF_Di_ChamPRegAAH | MPosR | PTxx04 - chamber pressure H alarm threshold | 2.0 | mbar | -2.0 | 2.0 |
ALITOF_Di_ChamPRegAAHH | MPosR | PTxx04 - chamber pressure HH alarm threshold | 2.5 | mbar | -3.0 | 2.5 |
ALITOF_Di_AtmPrSeDATOTP | MPosR | PT0201 - Atmospheric pressure transmitter alarm delay | 1.0 | h | 0.0 | 5.0 |
ALITOF_Di_AtmPressAALL | MPosR | PT0201 - Atmospheric pressure LL alarm threshold | 900.0 | mbar | 0.0 | 10000.0 |
ALITOF_Di_AtmPressAAHH | MPosR | PT0201 - Atmospheric pressure HH alarm threshold | 1100.0 | mbar | 0.0 | 10000.0 |
ALITOF_Di_AtmPresAATOTP | MPosR | PT0201 - Atmospheric pressure alarm delay | 20.0 | s | 0.0 | 50.0 |
ALITOF_Di_StartupALDt | MPosR | Channels gas loss alarms delay | 0 | h | 0 | 99999 |
ALITOF_Di_PCVxx2xRLimDt | MPosR | PCVxx26 Distribution pressure regulation valve limit reached alarm delay | 20 | s | 0 | 360 |
ALITOF_Di_61InPresAl | HH | PTxx24 - Rack 61 input pressure alarm | 8 | - | - | - |
ALITOF_Di_61InPresAl | H | PTxx24 - Rack 61 input pressure alarm | 7 | - | - | - |
ALITOF_Di_61InPresAl | L | PTxx24 - Rack 61 input pressure alarm | 1 | - | - | - |
ALITOF_Di_61InPresAl | LL | PTxx24 - Rack 61 input pressure alarm | 0 | - | - | - |
ALITOF_Di_62InPresAl | HH | PTxx24 - Rack 62 input pressure alarm | 8 | - | - | - |
ALITOF_Di_62InPresAl | H | PTxx24 - Rack 62 input pressure alarm | 7 | - | - | - |
ALITOF_Di_62InPresAl | L | PTxx24 - Rack 62 input pressure alarm | 1 | - | - | - |
ALITOF_Di_62InPresAl | LL | PTxx24 - Rack 62 input pressure alarm | 0 | - | - | - |
ALITOF_Di_PCV6126RLimAl | HH | PCV6126 - Distribution pressure regulation valve limit reached | 100.0 | - | - | - |
ALITOF_Di_PCV6126RLimAl | LL | PCV6126 - Distribution pressure regulation valve limit reached | 0.0 | - | - | - |
ALITOF_Di_PCV6226RLimAl | HH | PCV6226 - Distribution pressure regulation valve limit reached | 100.0 | - | - | - |
ALITOF_Di_PCV6226RLimAl | LL | PCV6226 - Distribution pressure regulation valve limit reached | 0.0 | - | - | - |
ALITOF_Di_61OutPresFAA | HH | PTxx26 - Rack 61 far output pressure alarm | 3.5 | - | - | - |
ALITOF_Di_61OutPresFAA | H | PTxx26 - Rack 61 far output pressure alarm | 3 | - | - | - |
ALITOF_Di_61OutPresFAA | L | PTxx26 - Rack 61 far output pressure alarm | 1 | - | - | - |
ALITOF_Di_61OutPresFAA | LL | PTxx26 - Rack 61 far output pressure alarm | 0 | - | - | - |
ALITOF_Di_62OutPresFAA | HH | PTxx26 - Rack 62 far output pressure alarm | 2.2 | - | - | - |
ALITOF_Di_62OutPresFAA | H | PTxx26 - Rack 62 far output pressure alarm | 1.5 | - | - | - |
ALITOF_Di_62OutPresFAA | L | PTxx26 - Rack 62 far output pressure alarm | 1 | - | - | - |
ALITOF_Di_62OutPresFAA | LL | PTxx26 - Rack 62 far output pressure alarm | 0 | - | - | - |
Recipe Instance: | ALITOF_Di_Constant_Default |
Number of Recipe elements: | 47 |
ALITOF_Di_ChamPRegWP | MPosR | Pressure sensor selection for racks pressure regulator | 0 | | 0 | 3 |
ALITOF_Di_rack61PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure H threshold | 6.5 | mbar | -10.0 | 10.0 |
ALITOF_Di_rack62PInH | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure H threshold | 6.0 | mbar | -10.0 | 10.0 |
ALITOF_Di_rack61PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 61 ready evt input pressure L threshold | 2.5 | mbar | -10.0 | 10.0 |
ALITOF_Di_rack62PInL | MPosR | (RunNotReady/RunReady) PTxx24 - Rack 62 ready evt input pressure L threshold | 2.5 | mbar | -10.0 | 10.0 |
ALITOF_Di_RackTOTP | MPosR | Isolation valves operation sequence delay | 1.0 | s | 0.0 | 20.0 |
ALITOF_Di_rackCAirDelay | MPosR | Racks starting sequence delay | 1000.0 | ms | 0.0 | 1500.0 |
ALITOF_Di_SignFlowLim | MPosR | (RunNotReady) Significant flows threshold | 50.0 | % | 0.0 | 20000.0 |
ALITOF_Di_EPS | MPosR | Racks Ready/Not Ready transition hysteresis parameter | 0.3 | mbar | 0.0 | 4.0 |
ALITOF_Di_PresSPRamp | MPosR | Pressure regulations setpoint ramp | 50.0 | mbar/s | 0.0 | 100000.0 |
ALITOF_Di_CN6126StUpK | MPosR | Distribution rack 61 pressure regulator Gain during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6226StUpK | MPosR | Distribution rack 62 pressure regulator Gain during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6126PidChSp | MPosR | Rack 61 Chamber pressure regulation setpoint | 1 | mbar | -15 | 15 |
ALITOF_Di_CN6226PidChSp | MPosR | Rack 62 Chamber pressure regulation setpoint | 1 | mbar | -15 | 15 |
ALITOF_Di_CN6126PidORSp | MPosR | Rack 61 rack Relative output pressure regulation setpoint | 1 | mbar | -15 | 15 |
ALITOF_Di_CN6226PidORSp | MPosR | Rack 62 rack Relative output pressure regulation setpoint | 1 | mbar | -15 | 15 |
ALITOF_Di_CN6126PidOASp | MPosR | Rack 61 rack Absolute output pressure regulation setpoint | 1000 | mbar | -2000 | 2000 |
ALITOF_Di_CN6226PidOASp | MPosR | Rack 62 rack Absolute output pressure regulation setpoint | 1000 | mbar | -2000 | 2000 |
ALITOF_Di_CN6126StUpTi | MPosR | Distribution rack 61 pressure regulator Integral time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6226StUpTi | MPosR | Distribution rack 62 pressure regulator Integral time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6126StUpTd | MPosR | Distribution rack 61 pressure regulator Derivative time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6226StUpTd | MPosR | Distribution rack 62 pressure regulator Derivative time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6126StUpTds | MPosR | Distribution rack 61 pressure regulator second Derivative time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6226StUpTds | MPosR | Distribution rack 62 pressure regulator second Derivative time during start-Up | 0 | | 0 | 99999 |
ALITOF_Di_CN6126RunK | MPosR | Distribution rack 61 pressure regulator Gain during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6226RunK | MPosR | Distribution rack 62 pressure regulator Gain during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6126RunTi | MPosR | Distribution rack 61 pressure regulator Integral time during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6226RunTi | MPosR | Distribution rack 62 pressure regulator Integral time during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6126RunTd | MPosR | Distribution rack 61 pressure regulator Derivative time during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6226RunTd | MPosR | Distribution rack 62 pressure regulator Derivative time during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6126RunTds | MPosR | Distribution rack 61 pressure regulator second Derivative time during Run | 0 | | 0 | 99999 |
ALITOF_Di_CN6226RunTds | MPosR | Distribution rack 62 pressure regulator second Derivative time during Run | 0 | | 0 | 99999 |
ALITOF_Di_rack61POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 61 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
ALITOF_Di_rack62POutHR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 62 ready evt output relative pressure H threshold | 0 | mbar | -10 | 10 |
ALITOF_Di_rack61POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 61 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
ALITOF_Di_rack62POutLR | MPosR | (RunNotReady/RunReady) PTxx26 - Rack 62 ready evt output relative pressure L threshold | -2 | mbar | -10 | 10 |
ALITOF_Di_Rack61Sel | ManReg01 | Rack 61 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
ALITOF_Di_Rack62Sel | ManReg01 | Rack 62 selection (1=relevant for global operation, 0=not relevant) | TRUE | - | - | - |
ALITOF_Di_CriticGasDP | ManReg01 | Critical gas loss (1=Critical, 0=Not critical) | FALSE | - | - | - |
ALITOF_Di_AbsPreRegDP | ManReg01 | Absolute pressure selection for regulation (1=Absolute, 0=Relative) | FALSE | - | - | - |
ALITOF_Di_SignFlow | ManReg01 | (RunNotReady) significant flow condition relevant for rack operation (1=Relevant, 0=NOT relevant) | FALSE | - | - | - |
ALITOF_Di_PT6104_Sel | ManReg01 | Rack 61 Pressure sensor selection for regulation (0=PT6104 /2, 1= PT6126) | FALSE | - | - | - |
ALITOF_Di_PT6204_Sel | ManReg01 | Rack 62 Pressure sensor selection for regulation (0=PT6204 /2, 1= PT6226) | FALSE | - | - | - |
ALITOF_Di_PT61041FT1Sel | ManReg01 | PT6104/1 in IO Error or significant deviation between PT6126 and PT6104/1 detected Selection (1=Sel) | FALSE | - | - | - |
ALITOF_Di_PT62041FT1Sel | ManReg01 | PT6204/1 in IO Error or significant deviation between PT6226 and PT6204/1 detected Selection (1=Sel) | FALSE | - | - | - |
ALITOF_Di_PT61042FT1Sel | ManReg01 | PT6104/2 in IO Error or significant deviation between PT6126 and PT6104/2 detected Selection (1=Sel) | FALSE | - | - | - |
ALITOF_Di_PT62042FT1Sel | ManReg01 | PT6204/2 in IO Error or significant deviation between PT6226 and PT6204/2 detected Selection (1=Sel) | FALSE | - | - | - |
Recipe Instance: | ALITOF_Di_Volume_Default |
Number of Recipe elements: | 36 |
ALITOF_Di_Chan1Vol61 | MPosR | Rack 61 channel 1 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan2Vol61 | MPosR | Rack 61 channel 2 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan3Vol61 | MPosR | Rack 61 channel 3 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan4Vol61 | MPosR | Rack 61 channel 4 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan5Vol61 | MPosR | Rack 61 channel 5 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan6Vol61 | MPosR | Rack 61 channel 6 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan7Vol61 | MPosR | Rack 61 channel 7 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan8Vol61 | MPosR | Rack 61 channel 8 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan9Vol61 | MPosR | Rack 61 channel 9 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan10Vol61 | MPosR | Rack 61 channel 10 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan11Vol61 | MPosR | Rack 61 channel 11 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan12Vol61 | MPosR | Rack 61 channel 12 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan13Vol61 | MPosR | Rack 61 channel 13 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan14Vol61 | MPosR | Rack 61 channel 14 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan15Vol61 | MPosR | Rack 61 channel 15 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan16Vol61 | MPosR | Rack 61 channel 16 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan17Vol61 | MPosR | Rack 61 channel 17 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan18Vol61 | MPosR | Rack 61 channel 18 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan1Vol62 | MPosR | Rack 62 channel 1 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan2Vol62 | MPosR | Rack 62 channel 2 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan3Vol62 | MPosR | Rack 62 channel 3 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan4Vol62 | MPosR | Rack 62 channel 4 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan5Vol62 | MPosR | Rack 62 channel 5 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan6Vol62 | MPosR | Rack 62 channel 6 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan7Vol62 | MPosR | Rack 62 channel 7 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan8Vol62 | MPosR | Rack 62 channel 8 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan9Vol62 | MPosR | Rack 62 channel 9 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan10Vol62 | MPosR | Rack 62 channel 10 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan11Vol62 | MPosR | Rack 62 channel 11 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan12Vol62 | MPosR | Rack 62 channel 12 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan13Vol62 | MPosR | Rack 62 channel 13 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan14Vol62 | MPosR | Rack 62 channel 14 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan15Vol62 | MPosR | Rack 62 channel 15 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan16Vol62 | MPosR | Rack 62 channel 16 volume | 0.53 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan17Vol62 | MPosR | Rack 62 channel 17 volume | 0.44 | m3 | 0.0 | 120000.0 |
ALITOF_Di_Chan18Vol62 | MPosR | Rack 62 channel 18 volume | 0.53 | m3 | 0.0 | 120000.0 |
Recipe Instance: | ALITOF_Di_FlowCell_Default |
Number of Recipe elements: | 4 |
ALITOF_Di_FCRck61Cmd1WP | MPosR | Rack 61 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
ALITOF_Di_FCRck61Cmd2WP | MPosR | Rack 61 flow cell selection (Bit pattern: Edit from panel!) | 3 | | 0 | 65535 |
ALITOF_Di_FCRck62Cmd1WP | MPosR | Rack 62 flow cell selection (Bit pattern: Edit from panel!) | 65535 | | 0 | 65535 |
ALITOF_Di_FCRck62Cmd2WP | MPosR | Rack 62 flow cell selection (Bit pattern: Edit from panel!) | 3 | | 0 | 65535 |
Recipe Instance: | ALITOF_Xh_Alarm_Default |
Number of Recipe elements: | 20 |
ALITOF_Xh_CiPrAlH | MPosR | PT5011 - Circulation pressure H alarm threshold | 2.3 | bar | 0.0 | 12.0 |
ALITOF_Xh_ciPrAlHH | MPosR | PT5011 - Circulation pressure HH alarm threshold | 2.5 | bar | 0.0 | 12.0 |
ALITOF_Xh_ciPrAlL | MPosR | PT5011 - Circulation pressure L alarm threshold | 0.55 | bar | 0.0 | 10.0 |
ALITOF_Xh_CiPrAlLL | MPosR | PT5011 - Circulation pressure LL alarm threshold | 0.001 | bar | 0.0 | 10.0 |
ALITOF_Xh_PrRegAlLH | MPosR | Pressure regulation H(-L) alarm threshold | 5.0 | bar | 0.0 | 10.0 |
ALITOF_Xh_PrRegAlLLHH | MPosR | Pressure regulation HH(-LL) alarm threshold | 6.0 | bar | 0.0 | 10.0 |
ALITOF_Xh_PrRegAlTOTP | MPosR | Pressure regulation alarm delay | 5.0 | min | 0.0 | 10000.0 |
ALITOF_Xh_BuPrSenDt | MPosR | PT5005 - Buffer pressure sensor alarm delay | 5.0 | s | 0.0 | 10000.0 |
ALITOF_Xh_PrAlTOTP | MPosR | Exhaust pressure alarms latency (circulation and buffer) | 30.0 | s | 0.0 | 300.0 |
ALITOF_Xh_BuPrAlH | MPosR | PT5005 - Buffer pressure H alarm threshold | 1.2 | bar | 0.0 | 12.0 |
ALITOF_Xh_BuPrAlHH | MPosR | PT5005 - Buffer pressure HH alarm threshold | 1.3 | bar | 0.0 | 12.0 |
ALITOF_Xh_BuPrAlL | MPosR | PT5005 - Buffer pressure L alarm threshold | 0.49 | bar | 0.0 | 10.0 |
ALITOF_Xh_BuPrAlLL | MPosR | PT5005 - Buffer pressure LL alarm threshold | 0.45 | bar | 0.0 | 10.0 |
ALITOF_Xh_AtmPressDt | MPosR | PT0101 - Atmospheric pressure alarm delay | 20.0 | s | 0.0 | 10000.0 |
ALITOF_Xh_AtmPressLL | MPosR | PT0101 - Atmospheric pressure LL alarm threshold | 900.0 | mbar | 0.0 | 1000.0 |
ALITOF_Xh_AtmPressHH | MPosR | PT0101 - Atmospheric pressure HH alarm threshold | 1100.0 | mbar | 0.0 | 1500.0 |
ALITOF_Xh_AtmPrSenDt | MPosR | PT0101 - Atmospheric pressure transmitter alarm delay | 1.0 | h | 0.0 | 100.0 |
ALITOF_Xh_PDT5030Dt | MPosR | PDT5030 - Exhaust filter clogged alarm delay | 5 | s | 0.0 | 10000.0 |
ALITOF_Xh_PDT5030AA | HH | PDT5030 - Exhaust filter clogged | 8 | - | - | - |
ALITOF_Xh_PDT5030AA | H | PDT5030 - Exhaust filter clogged | 7 | - | - | - |
Recipe Instance: | ALITOF_Xh_Constant_Default |
Number of Recipe elements: | 17 |
ALITOF_Xh_MFCCurCurve | MPosR | XMFC5002 - Calibration curve selection | 0 | - | 0 | 2 |
ALITOF_Xh_CNPidRamp | MPosR | XMFC5002 - Buffer pressure PID ramp | 50.0 | bar/s | 0.0 | 100.0 |
ALITOF_Xh_DetVolComp | MPosR | Detector volume parameter for pressure setpoint computation | 8000.0 | l | 0.0 | 120000.0 |
ALITOF_Xh_FailSafeFlSP | MPosR | XMFC5002 - Fail safe flow setpoint | 30.0 | l/h | 0.0 | 100.0 |
ALITOF_Xh_MaxPrSP | MPosR | Max. pressure setpoint for pressure setpoint computation | 650.0 | mbar | 0.0 | 10000.0 |
ALITOF_Xh_MFCC0MaxFlow | MPosR | XMFC5002 - Calibration curve #0 full scale | 120.0 | l/h | 0.0 | 1000.0 |
ALITOF_Xh_MFCC1MaxFlow | MPosR | XMFC5002 - Calibration curve #1 full scale | 120.0 | l/h | 0.0 | 1000.0 |
ALITOF_Xh_MinPrSP | MPosR | Min. pressure setpoint for pressure setpoint computation | 600.0 | mbar | 0.0 | 5000.0 |
ALITOF_Xh_YIC5003_PTTP | MPosR | YC5003 - 3-way valve pulse time | 5.0 | s | 0.0 | 30.0 |
ALITOF_Xh_AtPrMax | MPosR | Max. atmospheric pressure parameter for pressure setpoint computation | 980.0 | mbar | 0.0 | 1200.0 |
ALITOF_Xh_BuPrMin | MPosR | Min. buffer pressure parameter for pressure setpoint computation | 600.0 | mbar | 0.0 | 5000.0 |
ALITOF_Xh_BuVolComp | MPosR | Buffer volume parameter for pressure setpoint computation | 500.0 | l | 0.0 | 10000.0 |
ALITOF_Xh_BuffPrRegFlag | ManReg01 | Activation of the buffer pressure regulation (1=regulation activated /0=not activated) | TRUE | - | - | - |
ALITOF_Xh_CN5002 | MKc | Exhaust software pressure controller | 0.5 | - | - | - |
ALITOF_Xh_CN5002 | MTi | Exhaust software pressure controller | 2 | - | - | - |
ALITOF_Xh_CN5002 | MTd | Exhaust software pressure controller | 0 | - | - | - |
ALITOF_Xh_CN5002 | MTds | Exhaust software pressure controller | 0 | - | - | - |
Recipe Instance: | ALITOF_Xh_Offset_Default |
Number of Recipe elements: | 2 |
ALITOF_Xh_TotVolOffset | MPosR | Total exhausted volume computation offset | 1.4 | m3 | 0.0 | 100000.0 |
ALITOF_Xh_RTXMFC5002OfS | MPosR | XMFC5002 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
Recipe Instance: | ALITOF_Gs_Parameter_Default |
Number of Recipe elements: | 1 |
ALITOF_Gs_GasLIntPeriod | MPosR | Gas loss integration reset timeout | 3.0 | h | 0.0 | 100000.0 |
Recipe Instance: | ALITOF_Gs_Alarm_Default |
Number of Recipe elements: | 12 |
ALITOF_Gs_AlarmStopTOTP | MPosR | Pump, Distribution in Stop, Exhaust not in Run alarms delay | 2.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_PuNotInNRunDt | MPosR | Purifier not in Nominal Run alarm delay | 6.0 | h | 0.0 | 100000.0 |
ALITOF_Gs_MxNotInRunDt | MPosR | Mixer not in Run alarm delay | 6.0 | h | 0.0 | 100000.0 |
ALITOF_Gs_MxNotInCompDt | MPosR | Mixer not in compliant state alarm delay | 30.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_DeviceDt | MPosR | Profibus communication alarm delay | 2.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_PSAADt | MPosR | Power supply module alarm delay | 60 | s | 0.0 | 100000.0 |
ALITOF_Gs_OpMxReqFlag | ManReg01 | Mixer not in compliant state alarm enabling (1:enabled, 0:ignored) | FALSE | - | - | - |
ALITOF_Gs_PS24VSurIAA | HH | Surface 24VDC power supply module current consumption too high | 25 | - | - | - |
ALITOF_Gs_PS24VCavIAA | HH | Cavern 24VDC power supply module current consumption too high | 25 | - | - | - |
ALITOF_Gs_PS18VCavIAA | HH | Cavern 18VDC power supply module current consumption too high | 25 | - | - | - |
ALITOF_Gs_PS18VCavVAA | HH | Cavern 18VDC power supply module voltage level alarm | 21 | - | - | - |
ALITOF_Gs_PS18VCavVAA | LL | Cavern 18VDC power supply module voltage level alarm | 15 | - | - | - |
Recipe Instance: | ALITOF_Gs_Constant_Default |
Number of Recipe elements: | 10 |
ALITOF_Gs_AfterXhDelay | MPosR | Sequence pause length after Exhaust start has been triggered | 0.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_AfterPpDelay | MPosR | Sequence pause length after Pump start has been triggered | 10.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_AfterDiDelay | MPosR | Sequence pause length after Distribution start has been triggered | 1.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_AfterMxDelay | MPosR | Sequence pause length after Mixer start has been triggered | 0.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_AfterPuDelay | MPosR | Sequence pause length after Purifiers start has been triggered | 0.0 | s | 0.0 | 100000.0 |
ALITOF_Gs_AtmPressHLim | MPosR | PT0x01 - H limit to reject wrong atmospheric pressure values | 1100.0 | mbar | 0.0 | 1500.0 |
ALITOF_Gs_AtmPressLLim | MPosR | PT0x01 - L limit to reject wrong atmospheric pressure values | 900.0 | mbar | 0.0 | 1000.0 |
ALITOF_Gs_P1InRun | ManReg01 | Purifier 1 module state selection for Gas System Run (1: Run, 0: Stop) | TRUE | - | - | - |
ALITOF_Gs_XhInFill | ManReg01 | Exhaust module state selection for Gas System Fill (1: Run, 0: Venting) | TRUE | - | - | - |
ALITOF_Gs_P1InRecup | ManReg01 | Purifier 1 module state selection for Gas System Recuperating (1: Run, 0: Stop) | FALSE | - | - | - |
Recipe Instance: | ALITOF_Gs_Relevant_Default |
Number of Recipe elements: | 10 |
ALITOF_Gs_MxGlbRelev | ManReg01 | Mixer Module is relevant for global operation | TRUE | - | - | - |
ALITOF_Gs_PpGlbRelev | ManReg01 | Pump Module is relevant for global operation | TRUE | - | - | - |
ALITOF_Gs_DiGlbRelev | ManReg01 | Distribution Module is relevant for global operation | TRUE | - | - | - |
ALITOF_Gs_P1GlbRelev | ManReg01 | Purifier1 Module is relevant for global operation | TRUE | - | - | - |
ALITOF_Gs_XhGlbRelev | ManReg01 | Exhaust Module is relevant for global operation | TRUE | - | - | - |
ALITOF_Gs_MxDSSRelev | ManReg01 | Mixer Module is relvant for DSS (ready for physics) signal | FALSE | - | - | - |
ALITOF_Gs_PpDSSRelev | ManReg01 | Pump Module is relevant for DSS (ready for physics) signal | TRUE | - | - | - |
ALITOF_Gs_DiDSSRelev | ManReg01 | Dsitribution Module is relevant for DSS (ready for physics) signal | TRUE | - | - | - |
ALITOF_Gs_P1DSSRelev | ManReg01 | Purifier1 Module is relevant for DSS (ready for physics) signal | FALSE | - | - | - |
ALITOF_Gs_XhDSSRelev | ManReg01 | Exhaust Module is relevant for DSS (ready for physics) signal | TRUE | - | - | - |
Recipe Instance: | ALITOF_Mx_Constant_Default |
Number of Recipe elements: | 26 |
ALITOF_Mx_MFCCloseDt | MPosR | Time required to close MFCs | 1.0 | ms | 0.0 | 60.0 |
ALITOF_Mx_FillingDt | MPosR | Time required to fill pipes in front of MFCs | 1.0 | s | 0.0 | 60.0 |
ALITOF_Mx_FillStabDt | MPosR | (Fill) Time required to stabilize ratios and flow regulations | 3.0 | min | 0.0 | 60.0 |
ALITOF_Mx_PurgeStabDt | MPosR | (Purge) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
ALITOF_Mx_RunStabDt | MPosR | (Run) Time required to stabilize ratio and flows regulations | 3.0 | min | 0.0 | 60.0 |
ALITOF_Mx_DirectStabDt | MPosR | (Direct) Time required to stabilize flows regulations | 3.0 | min | 0.0 | 60.0 |
ALITOF_Mx_FillReqVol | MPosR | (Fill) Volume required to complete filling | 1000.0 | m3 | 0.0 | 150000.0 |
ALITOF_Mx_PurgeReqVol | MPosR | (Purge) Volume required to complete purging | 1000.0 | l | 0.0 | 500000.0 |
ALITOF_Mx_L1LFRamp | MPosR | XMFC1106 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L2LFRamp | MPosR | XMFC1206 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L3LFRamp | MPosR | XMFC1306 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L1HFRamp | MPosR | XMFC1109 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L2HFRamp | MPosR | XMFC1209 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L3HFRamp | MPosR | XMFC1309 - Flow setpoint ramping | 50.0 | l/hs | 0.0 | 1234.56 |
ALITOF_Mx_L1MFC6C0FuScl | MPosR | XMFC1106 - Calibration curve 0 full scale | 264.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L1MFC6C1FuScl | MPosR | XMFC1106 - Calibration curve 1 full scale | 264.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L2MFC6C0FuScl | MPosR | XMFC1206 - Calibration curve 0 full scale | 18.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L3MFC6C0FuScl | MPosR | XMFC1306 - Calibration curve 0 full scale | 18.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L1MFC9C0FuScl | MPosR | XMFC1109 - Calibration curve 0 full scale | 2400.0 | l/h | 0.0 | 4380.0 |
ALITOF_Mx_L1MFC9C1FuScl | MPosR | XMFC1109 - Calibration curve 1 full scale | 2400.0 | l/h | 0.0 | 4380.0 |
ALITOF_Mx_L2MFC9C0FuScl | MPosR | XMFC1209 - Calibration curve 0 full scale | 240.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L3MFC9C0FuScl | MPosR | XMFC1309 - Calibration curve 0 full scale | 180.0 | l/h | 0.0 | 1234.56 |
ALITOF_Mx_L2LFPidRamp | MPosR | CN1206 - PID Setpoint ramp speed | 50.0 | %/s | 0.0 | 100.0 |
ALITOF_Mx_L3LFPidRamp | MPosR | CN1306 - PID Setpoint ramp speed | 50.0 | %/s | 0.0 | 100.0 |
ALITOF_Mx_L2HFPidRamp | MPosR | CN1209 - PID Setpoint ramp speed | 50.0 | l/hs | 0.0 | 100.0 |
ALITOF_Mx_L3HFPidRamp | MPosR | CN1309 - PID Setpoint ramp speed | 50.0 | l/hs | 0.0 | 100.0 |
Recipe Instance: | ALITOF_Mx_Offset_Default |
Number of Recipe elements: | 7 |
ALITOF_Mx_TotVolOffset | MPosR | Total volume computation offset | 0.0 | m3 | 0.0 | 100000.0 |
ALITOF_Mx_RTXMFC1206OfS | MPosR | XMFC1206 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ALITOF_Mx_RTXMFC1306OfS | MPosR | XMFC1306 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ALITOF_Mx_RTXMFC1209OfS | MPosR | XMFC1209 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ALITOF_Mx_RTXMFC1309OfS | MPosR | XMFC1309 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ALITOF_Mx_RTXMFC1106OfS | MPosR | XMFC1106 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
ALITOF_Mx_RTXMFC1109OfS | MPosR | XMFC1109 - Total running hours computation offset | 0 | h | 0.0 | 90000.0 |
Recipe Instance: | ALITOF_Mx_Parameter_Default |
Number of Recipe elements: | 64 |
ALITOF_Mx_L1LFPurCur | MPosR | XMFC1106 - (Purge) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
ALITOF_Mx_L1HFPurCur | MPosR | XMFC1109 - (Purge) Line 1 calibration curve for high flow | 0 | | 0 | 1 |
ALITOF_Mx_L1LowFlCur | MPosR | XMFC1106 - (Fill/Run/Direct) Line 1 calibration curve for low flow | 0 | | 0 | 1 |
ALITOF_Mx_L2LowFlCur | MPosR | XMFC1206 - (Fill/Run/Direct) Line 2 calibration curve for low flow | 0 | | 0 | 1 |
ALITOF_Mx_L3LowFlCur | MPosR | XMFC1306 - (Fill/Run/Direct) Line 3 calibration curve for low flow | 0 | | 0 | 1 |
ALITOF_Mx_SmallFlow | MPosR | Small flows threshold (values ignored if below) | 1.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1FillFlowSp | MPosR | (Fill) Line 1 (master) flow setpoint | 1000.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L1PurgeFlowSp | MPosR | (Purge) Line 1 flow setpoint | 75.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L1RunFlowSp | MPosR | (Run) Line 1 (master) flow setpoint | 120.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L1DirFlowSp | MPosR | (Direct) Line 1 flow setpoint | 175.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L2PurgeFlowSp | MPosR | (Purge) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L3PurgeFlowSp | MPosR | (Purge) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L2DirFlowSp | MPosR | (Direct) Line 2 flow setpoint | 0.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L3DirFlowSp | MPosR | (Direct) Line 3 flow setpoint | 0.0 | l/h | 0.0 | 100000.0 |
ALITOF_Mx_L2FillRatioSp | MPosR | (Fill) Line 2 (slave) ratio regulation setpoint | 0.0 | % | 0.0 | 123.45 |
ALITOF_Mx_L3FillRatioSp | MPosR | (Fill) Line 3 (slave) ratio regulation setpoint | 7.0 | % | 0.0 | 123.45 |
ALITOF_Mx_L2RunRatioSp | MPosR | (Run) Line 2 (slave) ratio regulation setpoint | 0.0 | % | 0.0 | 123.45 |
ALITOF_Mx_L3RunRatioSp | MPosR | (Run) Line 3 (slave) ratio regulation setpoint | 7.0 | % | 0.0 | 123.45 |
ALITOF_Mx_CN1206StUpKc | MPosR | CN1206 – Kc for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306StUpKc | MPosR | CN1306 – Kc for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206StUpTi | MPosR | CN1206 – Ti for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306StUpTi | MPosR | CN1306 – Ti for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206StUpTd | MPosR | CN1206 – Td for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306StUpTd | MPosR | CN1306 – Td for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206StUpTds | MPosR | CN1206 – Tds for XMFC1206 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306StUpTds | MPosR | CN1306 – Tds for XMFC1306 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209StUpKc | MPosR | CN1209 – Kc for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309StUpKc | MPosR | CN1309 – Kc for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209StUpTi | MPosR | CN1209 – Ti for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309StUpTi | MPosR | CN1309 – Ti for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209StUpTd | MPosR | CN1209 – Td for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309StUpTd | MPosR | CN1309 – Td for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209StUpTds | MPosR | CN1209 – Tds for XMFC1209 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309StUpTds | MPosR | CN1309 – Tds for XMFC1309 flow regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206RunKc | MPosR | CN1206 – Kc for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306RunKc | MPosR | CN1306 – Kc for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206RunTi | MPosR | CN1206 – Ti for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306RunTi | MPosR | CN1306 – Ti for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206RunTd | MPosR | CN1206 – Td for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306RunTd | MPosR | CN1306 – Td for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1206RunTds | MPosR | CN1206 – Tds for XMFC1206 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1306RunTds | MPosR | CN1306 – Tds for XMFC1306 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209RunKc | MPosR | CN1209 – Kc for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309RunKc | MPosR | CN1309 – Kc for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209RunTi | MPosR | CN1209 – Ti for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309RunTi | MPosR | CN1309 – Ti for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209RunTd | MPosR | CN1209 – Td for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309RunTd | MPosR | CN1309 – Td for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1209RunTds | MPosR | CN1209 – Tds for XMFC1209 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_CN1309RunTds | MPosR | CN1309 – Tds for XMFC1309 flow regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Mx_L1FillLF | ManReg01 | (Fill) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | FALSE | - | - | - |
ALITOF_Mx_L2FillLF | ManReg01 | (Fill) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
ALITOF_Mx_L3FillLF | ManReg01 | (Fill) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
ALITOF_Mx_L1PurgeLF | ManReg01 | (Purge) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
ALITOF_Mx_L2PurgeLF | ManReg01 | (Purge) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | FALSE | - | - | - |
ALITOF_Mx_L3PurgeLF | ManReg01 | (Purge) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | FALSE | - | - | - |
ALITOF_Mx_L1RunLF | ManReg01 | (Run) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
ALITOF_Mx_L2RunLF | ManReg01 | (Run) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | TRUE | - | - | - |
ALITOF_Mx_L3RunLF | ManReg01 | (Run) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
ALITOF_Mx_L1DirectLF | ManReg01 | (Direct) Line 1 MFC selection (1=XMFC1106,0=XMFC1109) | TRUE | - | - | - |
ALITOF_Mx_L2DirectLF | ManReg01 | (Direct) Line 2 MFC selection (1=XMFC1206,0=XMFC1209) | TRUE | - | - | - |
ALITOF_Mx_L3DirectLF | ManReg01 | (Direct) Line 3 MFC selection (1=XMFC1306,0=XMFC1309) | TRUE | - | - | - |
ALITOF_Mx_FillComp | ManReg01 | Activation of Fill auto completion (1=transition enabled) | FALSE | - | - | - |
ALITOF_Mx_PurgeComp | ManReg01 | Activation of Purge auto completion (1=transition enabled) | FALSE | - | - | - |
Recipe Instance: | ALITOF_Mx_Alarm_Default |
Number of Recipe elements: | 56 |
ALITOF_Mx_L1FlowFuRuLL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow LL alarm threshold | 2.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1FlowFuRuL | MPosR | XMFC1106 - (Fill/Run Unstable) Master gas flow L alarm threshold | 1.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1FlowFsRsLL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow LL alarm threshold | 2.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1FlowFsRsL | MPosR | XMFC1106 - (Fill/Run Stable) Master gas flow L alarm threshold | 1.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1NotRelLL | MPosR | XMFC1106 - Flow not reliable LL alarm threshold | 0.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L2NotRelLL | MPosR | XMFC1206 - Flow not reliable LL alarm threshold | 0.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L3NotRelLL | MPosR | XMFC1306 - Flow not reliable LL alarm threshold | 0.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L1NotRelL | MPosR | XMFC1106 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ALITOF_Mx_L2NotRelL | MPosR | XMFC1206 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ALITOF_Mx_L3NotRelL | MPosR | XMFC1306 - Flow not reliable L alarm threshold | 0.8 | % | 0.0 | 100.0 |
ALITOF_Mx_L1NotRelH | MPosR | XMFC1106 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L2NotRelH | MPosR | XMFC1206 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L3NotRelH | MPosR | XMFC1306 - Flow not reliable H alarm threshold | 103.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L1NotRelHH | MPosR | XMFC1106 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L2NotRelHH | MPosR | XMFC1206 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L3NotRelHH | MPosR | XMFC1306 - Flow not reliable HH alarm threshold | 105.0 | % | 0.0 | 120.0 |
ALITOF_Mx_L1NotRelDt | MPosR | XMFC1106 - Flow not reliable alarm delay | 90.0 | s | 0.0 | 90.0 |
ALITOF_Mx_L2NotRelDt | MPosR | XMFC1206 - Flow not reliable alarm delay | 90.0 | s | 0.0 | 90.0 |
ALITOF_Mx_L3NotRelDt | MPosR | XMFC1306 - Flow not reliable alarm delay | 90.0 | s | 0.0 | 90.0 |
ALITOF_Mx_L1PressLL | MPosR | PT1103 - Low pressure LL alarm threshold | 1.0 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L2PressLL | MPosR | PT1203 - Low pressure LL alarm threshold | 1.0 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L3PressLL | MPosR | PT1303 - Low pressure LL alarm threshold | 1.1 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L1PressL | MPosR | PT1103 - Low pressure L alarm threshold | 1.3 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L2PressL | MPosR | PT1203 - Low pressure L alarm threshold | 1.3 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L3PressL | MPosR | PT1303 - Low pressure L alarm threshold | 1.5 | bar | 0.0 | 100000.0 |
ALITOF_Mx_L1PressDt | MPosR | PT1103 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ALITOF_Mx_L2PressDt | MPosR | PT1203 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ALITOF_Mx_L3PressDt | MPosR | PT1303 - Low pressure L alarm delay | 15.0 | s | 0.0 | 20.0 |
ALITOF_Mx_L1RRegUnLH | MPosR | Line 1 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L2RRegUnLH | MPosR | Line 2 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L3RRegUnLH | MPosR | Line 3 - (Fill/Run Unstable) Ratio regulation H(-L) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1RRegStLLHH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L2RRegStLLHH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L3RRegStLLHH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1RRegStLH | MPosR | Line 1 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L2RRegStLH | MPosR | Line 2 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L3RRegStLH | MPosR | Line 3 - (Fill/Run Stable) Ratio regulation H(-L) alarm threshold | 1.5 | % | 0.0 | 100.0 |
ALITOF_Mx_L1RRegDt | MPosR | Line 1 - (Fill/Run) Ratio regulation alarm delay | 15.0 | s | 0.0 | 100.0 |
ALITOF_Mx_L2RRegDt | MPosR | Line 2 - (Fill/Run) Ratio regulation alarm delay | 15.0 | s | 0.0 | 100.0 |
ALITOF_Mx_L3RRegDt | MPosR | Line 3 - (Fill/Run) Ratio regulation alarm delay | 15.0 | s | 0.0 | 100.0 |
ALITOF_Mx_L1FRegPsLL | MPosR | Line 1 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 5.0 |
ALITOF_Mx_L2FRegPsLL | MPosR | Line 2 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 5.0 |
ALITOF_Mx_L3FRegPsLL | MPosR | Line 3 - (Purge Stable) Flow regulation LL alarm threshold | 5.0 | % | -100.0 | 5.0 |
ALITOF_Mx_L1FRegPsL | MPosR | Line 1 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 10.0 |
ALITOF_Mx_L2FRegPsL | MPosR | Line 2 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 10.0 |
ALITOF_Mx_L3FRegPsL | MPosR | Line 3 - (Purge Stable) Flow regulation L alarm threshold | 10.0 | % | -100.0 | 10.0 |
ALITOF_Mx_L1FRegDsLLHH | MPosR | Line 1 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L2FRegDsLLHH | MPosR | Line 2 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L3FRegDsLLHH | MPosR | Line 3 - (Direct Stable) Flow regulation HH(-LL) alarm threshold | 3.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L1FRegDsLH | MPosR | Line 1 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L2FRegDsLH | MPosR | Line 2 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ALITOF_Mx_L3FRegDsLH | MPosR | Line 3 - (Direct Stable) Flow regulation H(-L) alarm threshold | 2.0 | % | 0.0 | 100.0 |
ALITOF_Mx_FlowDt | MPosR | All lines - Flow regulation alarm delay | 2.0 | min | 0.0 | 60.0 |
ALITOF_Mx_DeviceDt | MPosR | Profibus communication alarm delay | 5.0 | s | 0.0 | 60.0 |
ALITOF_Mx_ExtFlamGasDt | MPosR | ZSH9119 - External HW interlock alarm delay | 10.0 | s | 0.0 | 60.0 |
ALITOF_Mx_WrongFlowHH | MPosR | Evaporator Heater HH alarm threshold | 20 | C | 0.0 | 500.0 |
Recipe Instance: | ALITOF_Pp_Constant_Default |
Number of Recipe elements: | 5 |
ALITOF_Pp_PIDRamp | MPosR | PV4003 - Pressure regulation PID ramp parameter | 2.0 | mbar/s | 0.0 | 1000.0 |
ALITOF_Pp_PIDSpMax | MPosR | PV4003 - Pressure regulation max setpoint | 2.0 | mbar | -10.0 | 10.0 |
ALITOF_Pp_PIDSpMin | MPosR | PV4003 - Pressure regulation min setpoint | -12.0 | mbar | -12.0 | 10.0 |
ALITOF_Pp_PmpUpRunDt | MPosR | YV4002 - (Starting) Time after which the bypass valve shall be closed | 5.0 | s | 0.0 | 5.0 |
ALITOF_Pp_RunStabDt | MPosR | (Starting) Time required to complete the starting activity | 5.0 | min | 0.0 | 10.0 |
Recipe Instance: | ALITOF_Pp_Offset_Default |
Number of Recipe elements: | 2 |
ALITOF_Pp_RT1Offset | MPosR | PUMP4101 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
ALITOF_Pp_RT2Offset | MPosR | PUMP4201 - Total running hours computation offset | 0.0 | h | 0.0 | 90000.0 |
Recipe Instance: | ALITOF_Pp_Alarm_Default |
Number of Recipe elements: | 23 |
ALITOF_Pp_PressRegDt | MPosR | Pressure regulation alarm delay | 3.0 | s | 0.0 | 600.0 |
ALITOF_Pp_SWPressDt | MPosR | PT4004 - Soft. pressure alarm delay | 3.0 | s | 0.0 | 240.0 |
ALITOF_Pp_PmPPressDt | MPosR | PT4i01/j - Membranes pressures alarms delay | 120.0 | s | 0.0 | 600.0 |
ALITOF_Pp_TooHotDt | MPosR | TE4i01/j - Pumps temperatures alarms delay | 5.0 | min | 0.0 | 240.0 |
ALITOF_Pp_SWPressHH | MPosR | PT4004 - Soft. pressure HH alarm threshold | 20.0 | mbar | 0.0 | 30.0 |
ALITOF_Pp_SWPressH | MPosR | PT4004 - Soft. pressure H alarm threshold | 10.0 | mbar | 0.0 | 30.0 |
ALITOF_Pp_SWPressL | MPosR | PT4004 - Soft. pressure L alarm threshold | -15.0 | mbar | -30.0 | 0.0 |
ALITOF_Pp_SWPressLL | MPosR | PT4004 - Soft. pressure LL alarm threshold | -50.0 | mbar | -50.0 | 0.0 |
ALITOF_Pp_TooHot1HH | MPosR | TE4i01/1 - Pump too hot HH alarm threshold | 55.0 | C | 0.0 | 150.0 |
ALITOF_Pp_TooHot1H | MPosR | TE4i01/1 - Pump too hot H alarm threshold | 42.0 | C | 0.0 | 149.0 |
ALITOF_Pp_PmPPressLL | MPosR | PT4i01/j - Membranes pressures LL alarm threshold | -0.5 | bar | -1.0 | 1.2 |
ALITOF_Pp_PmPPressL | MPosR | PT4i01/j - Membranes pressures L alarm threshold | -0.2 | bar | -1.0 | 2.3 |
ALITOF_Pp_PmPPressH | MPosR | PT4i01/j - Membranes pressures H alarm threshold | 0.4 | bar | 0.0 | 3.4 |
ALITOF_Pp_PmPPressHH | MPosR | PT4i01/j - Membranes pressures HH alarm threshold | 0.5 | bar | 0.0 | 4.5 |
ALITOF_Pp_PressRegHHLL | MPosR | Pressure regulation HH(-LL) alarm thresholds | 3.0 | mbar | 0.0 | 5.0 |
ALITOF_Pp_PressRegHL | MPosR | Pressure regulation H(-L) alarm thresholds | 2.0 | mbar | 0.0 | 4.0 |
ALITOF_Pp_PV4003RLimDt | MPosR | Pump pressure regulation valve limit reached alarm delay | 180 | s | 0.0 | 1000 |
ALITOF_Pp_PDT4020Dt | MPosR | Pump module outlet filter clogged alarm delay | 60 | s | 0.0 | 1000 |
ALITOF_Pp_PUMPDefDisDt | MPosR | Pump Circuit breaker tripped alarm delay | 1 | s | 0.0 | 100 |
ALITOF_Pp_PDT4020AA | HH | Pump module outlet filter clogged | 20 | - | - | - |
ALITOF_Pp_PDT4020AA | H | Pump module outlet filter clogged | 15 | - | - | - |
ALITOF_Pp_PV4003RLimAl | HH | PV4003 Pump pressure regulation valve limit reached | 90 | - | - | - |
ALITOF_Pp_PV4003RLimAl | H | PV4003 Pump pressure regulation valve limit reached | | - | - | - |
Recipe Instance: | ALITOF_Pp_Parameter_Default |
Number of Recipe elements: | 11 |
ALITOF_Pp_RnDfltPSp | MPosR | Pressure regulation set point with PTxx04 sensor | -10.0 | mbar | -10.0 | 10.0 |
ALITOF_Pp_CN4003StUpKc | MPosR | CN4003 – Kc for Pump Pressure regulation Start-Up | 2 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003StUpTi | MPosR | CN4003 – Ti for Pump Pressure regulation Start-Up | 5 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003StUpTd | MPosR | CN4003 – Td for Pump Pressure regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003StUpTds | MPosR | CN4003 – Tds for Pump Pressure regulation Start-Up | 0 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003RunKc | MPosR | CN4003 – Kc for Pump Pressure regulation Run | 2 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003RunTi | MPosR | CN4003 – Ti for Pump Pressure regulation Run | 5 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003RunTd | MPosR | CN4003 – Td for Pump Pressure regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Pp_CN4003RunTds | MPosR | CN4003 – Tds for Pump Pressure regulation Run | 0 | | 0.0 | 100.0 |
ALITOF_Pp_Pump1Selected | ManReg01 | PUMP4101 selection (1=selected, 0=not selected) | TRUE | - | - | - |
ALITOF_Pp_Pump2Selected | ManReg01 | PUMP4201 selection (1=selected, 0=not selected) | FALSE | - | - | - |
Recipe Instance: | ALITOF_P1_Alarm_Default |
Number of Recipe elements: | 16 |
ALITOF_P1_AlmLatency | MPosR | Valves position alarms delay | 5000.0 | ms | 0.0 | 100000.0 |
ALITOF_P1_NoPurgeAlTOTP | MPosR | (Purge, CoolDown, Standby) - No flow detected in FIS3112 alarm delay | 15000.0 | ms | 0.0 | 100000.0 |
ALITOF_P1_NoRegenAlTOTP | MPosR | (Regeneration) - No flow detected in FIS3112 alarm delay | 15000.0 | ms | 0.0 | 100000.0 |
ALITOF_P1_BadTRegulH | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation H (-L) alarm threshold | 230.0 | C | 0.0 | 100000.0 |
ALITOF_P1_BadTRegulHH | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation HH (-LL) alarm threshold | 245.0 | C | 0.0 | 100000.0 |
ALITOF_P1_RunHotH | MPosR | (Run) - Internal temperature TEx101/1-2 H alarm threshold | 60.0 | C | 0.0 | 100000.0 |
ALITOF_P1_RunHotHH | MPosR | (Run) - Internal temperature TEx101/1-2 HH alarm threshold | 100.0 | C | 0.0 | 100000.0 |
ALITOF_P1_ExtTHotH | MPosR | (Regeneration) - Internal temperature (TEx101/3) H alarm threshold | 240.0 | C | 0.0 | 100000.0 |
ALITOF_P1_ExtTHotHH | MPosR | (Regeneration) - Internal temperature (TEx101/3) HH alarm threshold | 250.0 | C | 0.0 | 100000.0 |
ALITOF_P1_DeviceDt | MPosR | Profibus communication alarm delay | 2000.0 | ms | 0.0 | 100000.0 |
ALITOF_P1_HUpCheckDelay | MPosR | (Heat up) - Slow heating up (TEx101/1-2) alarm delay | 60.0 | min | 0.0 | 100000.0 |
ALITOF_P1_HUpFirstStepT | MPosR | (Heat up) - Slow heating up (TEx101/1-2) LL temperature alarm threshold | 40.0 | C | 0.0 | 100000.0 |
ALITOF_P1_HUpMaxTime | MPosR | (Heat Up) - Max time for regeneration temperature to be reached | 240.0 | min | 0.0 | 100000.0 |
ALITOF_P1_CDMaxTime | MPosR | (Cool Down) - Max time for cool down temperature to be reached | 1000.0 | min | 0.0 | 100000.0 |
ALITOF_P1_PrStBMaxTime | MPosR | (Prepare for Stand By) - Max time for Standby pressure to be reached | 6000000.0 | min | 0.0 | 6000000.0 |
ALITOF_P1_ColSynchAlDt | MPosR | Purifier Columns not synchronized alarm | 30 | s | 0.0 | 1000.0 |
Recipe Instance: | ALITOF_P1_Constant_Default |
Number of Recipe elements: | 36 |
ALITOF_P1_PurgPrGasTime | MPosR | (Purge) - Completion timeout | 1.0 | min | 0.0 | 100000.0 |
ALITOF_P1_RegenTempeSP | MPosR | (Regeneration) - Temperature (TEx101/1-2) regulation setpoint | 220.0 | C | 0.0 | 100000.0 |
ALITOF_P1_RegenTime | MPosR | (Regeneration) Completion timeout | 720.0 | min | 0.0 | 100000.0 |
ALITOF_P1_CoolDownTemp | MPosR | (Cool down,Purge) - Completion low temperature (TEx101/1-2) threshold | 50.0 | C | 0.0 | 100000.0 |
ALITOF_P1_ColumnPrPLim | MPosR | (Prepare for standby) - Completion high pressure (PTxc08) limit | 0.0 | bar | 0.0 | 100000.0 |
ALITOF_P1_RunSatVoLim | MPosR | (Run Pre Saturation) Columns saturation volume threshold | 2000.0 | m3 | 0.0 | 100000.0 |
ALITOF_P1_PrepRunP2Time | MPosR | (Prepare For Run/Ph2) - Completion timeout | 300.0 | min | 0.0 | 100000.0 |
ALITOF_P1_PreHUpTempe | MPosR | (Heat Up) - Temperature (TEx101/1-2) at which pump switch on | 50.0 | C | 0.0 | 100000.0 |
ALITOF_P1_MaxExtTemp | MPosR | (Heat up, Regenaration) - HH temperature (TExc01/2) limit for heater operation | 220.0 | C | 0.0 | 100000.0 |
ALITOF_P1_PressAdjustDt | MPosR | (Prepare For Run/Ph1) - Delay to allow Column Pressure stabilization after filling pulse | 10.0 | s | 0.0 | 100.0 |
ALITOF_P1_PressReadyH | MPosR | (Prepare For Run/Ph1) Column Pressure adjustment H limit | 0.5 | bar | -10.0 | 10.0 |
ALITOF_P1_PressReadyL | MPosR | (Prepare For Run/Ph1) Column Pressure adjustment L limit | 0.4 | bar | -10.0 | 10.0 |
ALITOF_P1_PressDelta | MPosR | gap of pressure variation (applied on exhaust pt5005 sensor) | 0.0 | bar | 0.0 | 10.0 |
ALITOF_P1_CAPh1Timer | MPosR | (Prepare for Run/Ph1) - Column A max time for phase 1 | 180.0 | min | 10.0 | 100000.0 |
ALITOF_P1_CAPh1PrDelta | MPosR | (Prepare for Run/Ph1 - Column A max pressure difference to complete Ph1 (PT5005 used) | 0.05 | bar | 0.0 | 100000.0 |
ALITOF_P1_CAPh1OnDt | MPosR | (Prepare for Run/Ph1) - Column A Input valve (YVij03) opening time for pulsing | 0.5 | s | 0.0 | 100000.0 |
ALITOF_P1_CAPh1OffDt | MPosR | (Prepare for Run/Ph1) - Column A Input valve (YVij03) waiting time between two pulses | 15.0 | s | 0.0 | 100000.0 |
ALITOF_P1_CBPh1Timer | MPosR | (Prepare for Run/Ph1) - Column B max time for phase 1 | 180.0 | min | 10.0 | 100000.0 |
ALITOF_P1_CBPh1PrDelta | MPosR | (Prepare for Run/Ph1 - Column B max pressure difference to complete Ph1 (PT5005 used) | 0.05 | bar | 0.0 | 100000.0 |
ALITOF_P1_CBPh1OnDt | MPosR | (Prepare for Run/Ph1) - Column B Input valve (YVij03) opening time for pulsing | 0.5 | s | 0.0 | 100000.0 |
ALITOF_P1_CBPh1OffDt | MPosR | Column B Input valve (YVij03) waiting time between two pulses | 15.0 | s | 0.0 | 100000.0 |
ALITOF_P1_RunPrSatVoLim | MPosR | (Run Nominal) Columns pre saturation volume threshold | 160.0 | m3 | 0.0 | 100000.0 |
ALITOF_P1_EvacPress | MPosR | Evacuation pressure threshold to trigger the extraction pump | -0.1 | bar | -1.0 | 5.0 |
ALITOF_P1_PumpInPforRun | ManReg01 | (Prepare for run) Pump selection (1=Selected, 0=Not selected) | TRUE | - | - | - |
ALITOF_P1_PumpInRegnSeq | ManReg01 | (Regeneration sequence) Pump selection(1=Selected, 0=Not selected) | TRUE | - | - | - |
ALITOF_P1_CAMntStartInt | ManReg01 | Column A cannot be used due to maintenance activity (1=Disabled, 0=Enabled) | FALSE | - | - | - |
ALITOF_P1_CBMntStartInt | ManReg01 | Column B cannot be used due to maintenance activity (1=Disabled, 0=Enabled) | FALSE | - | - | - |
ALITOF_P1_SkipPrep | ManReg01 | Skip Preparation for Run after restart (1=Selected, 0=Not Selected) | FALSE | - | - | - |
ALITOF_P1_CNTZ2101 | MKc | Purifier1 col A heater PID | 2 | - | - | - |
ALITOF_P1_CNTZ2101 | MTi | Purifier1 col A heater PID | 10 | - | - | - |
ALITOF_P1_CNTZ2101 | MTd | Purifier1 col A heater PID | 0 | - | - | - |
ALITOF_P1_CNTZ2101 | MTds | Purifier1 col A heater PID | 0 | - | - | - |
ALITOF_P1_CNTZ2201 | MKc | Purifier1 col B heater PID | 2 | - | - | - |
ALITOF_P1_CNTZ2201 | MTi | Purifier1 col B heater PID | 10 | - | - | - |
ALITOF_P1_CNTZ2201 | MTd | Purifier1 col B heater PID | 0 | - | - | - |
ALITOF_P1_CNTZ2201 | MTds | Purifier1 col B heater PID | 0 | - | - | - |
Recipe Instance: | ALITOF_P1_Offset_Default |
Number of Recipe elements: | |
| | Offset Description | | | | |
ALITOF_P1_CARunVOffset | MPosR | Column A run total volume offset | 20.0 | m3 | 0.0 | 10000.0 |
ALITOF_P1_CBRunVOffset | MPosR | Column B run total volume offset | 0.0 | m3 | 0.0 | 10000.0 |
ALITOF_P1_CANmROffset | MPosR | Column A number of regeneration cycles computation offset | 23.0 | - | 0.0 | 100.0 |
ALITOF_P1_CBNmROffset | MPosR | Column B number of regeneration cycles computation offset | 21.0 | - | 0.0 | 100.0 |